semi合集-English.pdf - 第1177页

SEMI E5-1104 © SEMI 1982, 2004 119 10.10 Stream 6 Data Collection — This stream is intend ed to cover th e needs of in-process measurem ents and equipment monitoring. Stream,Function Name (Mnemonic) Direction S6,F0 Abort…

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SEMI E5-1104 © SEMI 1982, 2004 118
Stream,Function Name (Mnemonic) Direction
S5,F15 Exception Recovery Complete Notify (EXRCN) S,H<-E,[reply]
Description
Allows the service provider to inform the controller/host that the recovery operation completed on a specific exception and an
error code if the recovery terminated abnormally.
Structure
L,3
1. <TIMESTAMP>
2. <EXID>
3. L,2
1. <ACKA>
2. L,m (m = {0,2})
1. <ERRCODE>
2. <ERRTEXT>
Exception
This list m can be of zero length if the recovery was successful.
Stream,Function Name (Mnemonic) Direction
S5,F16 Exception Recovery Complete Confirm (EXRCC) S,H->E
Description
Host confirms receipt of S5,F15 message from the equipment.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S5,F17 Exception Recovery Abort Request (EXRAR) S,H->E,reply
Description
Stop the recovery procedure on a specific exception.
Structure
1. <EXID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S5,F18 Exception Recovery Abort Acknowledge (EXRAA) S,H<-E
Description
Indicate the success of the request for Recovery Abort.
Structure
L,2
1. <EXID>
2. L,2
1. <ACKA>
2. L,m (m = {0,2})
1. <ERRCODE>
2. <ERRTEXT>
Exception
The list m can be of zero length if the abort was successful.
SEMI E5-1104 © SEMI 1982, 2004 119
10.10 Stream 6 Data Collection — This stream is intended to cover the needs of in-process measurements and
equipment monitoring.
Stream,Function Name (Mnemonic) Direction
S6,F0 Abort Transaction (S6F0) S,H<->E
Description
Same form as S1,F0.
Structure
Exception
Stream,Function Name (Mnemonic) Direction
S6,F1 Trace Data Send (TDS) M,H<-E,[reply]
Description
This function sends samples to the host according to the trace setup done by S2,F23. Trace is a time-driven form of equipment
status.
Even if S6,F1 is multi-block, it is not preceded by an Inquire/Grant transaction, because the Host S2,F23 is an implicit grant.
Some equipment may support only single-block S6,F1, and may refuse an S2,F23 (Trace Initiate Send) message which would
cause a multi-block S6,F1.
Structure
L,4
1. <TRID>
2. <SMPLN>
3. <STIME>
4. L,n
1. <SV
1
>
2. <SV
2
>
.
.
n. <SV
n
>
Exception
A zero-length STIME means no value is given and that the time is to be derived from SMPLN along with knowledge of the
request.
Stream,Function Name (Mnemonic) Direction
S6,F2 Trace Data Acknowledge (TDA) S,H->E
Description
Acknowledge or error
Structure
<ACKC6>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 120
Stream,Function Name (Mnemonic) Direction
S6,F3 Discrete Variable Data Send (DVS) M,H<-E,[reply]
Description
Any data report which is initiated by an event, such as the completion of a measurement, rather than passage of time is called a
discrete variable. Some equipment may have several possible events on which to send the data. S2,F15 is used to select the
desired reporting events. Reports requiring only one block of data may report directly to the host with this message. If S6,F3 is
multi-block, it must be preceded by the S6,F5/S6,F6 Inquire/Grant transaction.
Structure
L,3
1. <DATAID>
2. <CEID>
3. L,n
1. L,2
1. <DSID
1
>
2. L,m
1. L,2
1. <DVNAME
1
>
2. <DVVAL
1
>
2. L,2
.
.
m. L,2
1. <DVNAME
m
>
2. <DVVAL
m
>
2. L,2
.
.
n. L,2
1. <DSID
n
>
2. etc.
Exception
None
Stream,Function Name (Mnemonic) Direction
S6,F4 Discrete Variable Data Acknowledge (DVA) S,H->E
Description
Acknowledge or error
Structure
<ACKC6>
Exception
None
Stream,Function Name (Mnemonic) Direction
S6,F5 Multi-block Data Send Inquire (MBI) S,H<-E,reply
Description
If the discrete data report S6F3, F9, F11, F13 can involve more than one block, this transaction must precede the transmission.
Structure
L,2
1. <DATAID>
2. <DATALENGTH>
Exception
None