semi合集-English.pdf - 第2740页

SEMI E98-1102 © SEMI 2000, 2002 5 one location in the factor y to another location. Transport equipment may also prov ide short-term storage for material. (See also AMHS.) 5.2.49 vi rtual sensor (synthetic sensor, derive…

100%1 / 7923
SEMI E98-1102 © SEMI 2000, 2002 4
5.2.24 material — (1) any material used in, or required
by, the manufacturing process. Material is classified as
consumable, durable, or product. (2) an abstraction of
the various types of things used during manufacturing,
such as wafers, carriers, and chemicals, which require
some management.
5.2.25 material location — a reference to a place
within the equipment or an equipment component that
can hold material, such as the top surface of an indexer
or substrate chuck or the end effector of a substrate
handler.
5.2.26 measured value — a value representing a
measurement, with a numerical value, measurement
units, and a valid range.
5.2.27 measurement equipment — equipment whose
intended function is to measure or inspect the product
and to report results. Measurement of the product is the
factory’s means of gaining feedback on the
manufacturing process.
5.2.28 Object-Based Equipment Model — a model of
equipment, its components, behaviors, attributes, and
services, as defined by this document.
5.2.29 object type — a declaration (specification) that
describes the common properties and behavior for a
collection of objects. Types classify objects according
to a common interface; classes classify objects
according to a common implementation. (See also
SEMI E39 and E81.)
5.2.30 object specifier — designates a logical path
pointing to a specific instance of an object through a
hierarchy of owners. See SEMI E39.
5.2.31 Personal Guided Vehicle (PGV) — a manually
guided and operated vehicle capable of placing and
removing carriers to and from a carrier port.
5.2.32 pod — as used in this document, a container
providing environmental control, such as a SMIF or
FIMS pod
1
.
5.2.33 production equipment — process equipment and
measurement equipment.
5.2.34 process durable — a specialized durable used
by process equipment and specified by the user as part
of the process, such as a reticle or burin-in board.
5.2.35 process equipment — equipment whose
intended function is to process product, adding value to
the product.
5.2.36 product — (1) from the equipment’s perspec-
tive, product is a synonym for substrate, and includes
1 The term “pod” was originally defined as a bottom-opening pod
with a SMIF interface.
non-product substrates such as test substrates and send-
ahead substrates; (2) from the factory perspective,
product is the material being processed and produced
by the factory.
5.2.37 run-to-run control — techniques for varying
settings in one run based on analysis of either incoming
product (feed-forward) or product from an earlier run.
5.2.38 sensor — a component that responds to changes
in the physical environment and provides an analog or
digital input value.
5.2.39 sensor/actuator device — a device consisting of
one or more sensors and/or actuators on the physical
tool. See SEMI E54 for a precise definition of “sensor
or actuator” and for a description of the internal
structure of an sensor/actuator network Common
Device Model definition.
5.2.40 setup — 1. (verb) the performance of one or
more steps that puts the equipment into a known state in
which it is ready to perform a specific process; 2.
(noun) the state of the equipment once it has been
setup.
5.2.41 standardized object — an object that is formally
defined and compliant to SEMI E39, Object Services
Standard (reference SEMI E42).
5.2.42 storage equipment (stocker) — equipment
whose intended function is primarily to provide storage,
either short-term or long-term, for carriers.
5.2.43 subassembly — a component of equipment that
provides some limited functionality.
5.2.44 substrate — basic unit of material on which
work is performed to create a product. Examples
include wafers, die, plates used for masks, flat panels,
circuit boards, and leadframes.
5.2.45 subsystem — a subsystem is an intelligent
aggregate that behaves as a unit. A subsystem is made
up of sensors and/or actuators and may contain
mechanical assemblies. Subsystems may be shared by
multiple modules.
5.2.46 subtype — an object type that is based on
(derived from) another type and adds some specializa-
tion or overrides some properties or services. The type
from which the subtype is derived is the supertype. For
additional detail, see SEMI E39, Object Services
Standard.
5.2.47 supertype — an object type which is used as a
basis from which specializations are derived. The
derived types are called subtypes. For additional detail,
see SEMI E39.
5.2.48 transport equipment — equipment whose
intended function is primarily to move material from
SEMI E98-1102 © SEMI 2000, 2002 5
one location in the factory to another location.
Transport equipment may also provide short-term
storage for material. (See also AMHS.)
5.2.49 virtual sensor (synthetic sensor, derived sensor)
— one or more calculated measured values that are
based on one or more sensor readings. This may
include results based on neural nets, statistical analysis,
etc. or may be based on a single sensor value.
5.2.50 work — a group of one or more substrates that
undergo processing in a factory. Something that may be
work in one kind of factory, such as reticles and
leadframes, may have a different role in other types of
factories. Work includes, but is not limited to, material
intended as product. For example, it may include
product substrates, test substrates, and filler substrates.
5.2.50.1 From the point of view of the equipment,
work is either new (processing has not started),
completed (all intended processing has been performed,
terminated, or aborted, including rejected and resorted
work, and no further processing is to be done) or
incomplete (work in progress, on hold).
6 Conventions
6.1 This section defines the conventions followed by
this document.
6.2 Object Conventions — This document conforms to
the conventions for objects established by SEMI E39,
including object diagrams, object terminology, and re-
quirements for standardized objects. Accordingly, not-
ation is based on Object Modeling Technique (OMT) as
described in Object Oriented Modeling Design
.
2
6.2.1 Formal Name of an Object — The text capitalizes
formal object name references. Similar to the way
capitalization is normally used when discussing entities.
When describing something in the general (like cities)
lower case is used, but when a specific entity is of
interest (New York City), then first letters are
capitalized.
6.2.2 Components of Complex Attributes — The names
of object attributes defined in tables are left-justified.
The individual elements of complex attributes are right-
justified in order of appearance below the complex
attribute.
2 Rumbaugh, James, et al, Object Oriented Modeling Design,
Prentice Hall, Englewood Cliffs, NJ, c1991.
SEMI E98-1102 © SEMI 2000, 2002 6
6.2.3 Names of OBEM Objects — The names of abstract object types start with the word “Abstract” and are not
intended to be directly implemented. All other objects defined in OBEM are concrete types that may be directly
implemented.
6.3 State Model Conventions
6.3.1 This document uses the Harel state chart convention for describing dynamic operation of defined objects. The
outline of this convention is described in an attachment of SEMI E30. The official definition of this convention is
described in “State charts: A Visual Formalism for Complex Systems”
3
.
6.3.2 The Harel convention has not the concept of state models of “creation” and “extinction” for expressing a
temporary entity. The “job” described in this document is such an entity, and a copy of the same state model is used
for an independent job newly created. In this document, a circle with a black circle inside is used for expressing
extinction of an entity. A filled black circle denotes the entry to the state model (the entity creation).
6.3.3 Transition tables are provided in conjunction with the state diagrams to explicitly describe the nature of each
state transition. A transition table contains columns for Transition number, Previous State, Trigger, New State,
Actions, and Comments. The “trigger” (column 3) for the transition occurs while in the “previous” state. The
“actions” (column 5) includes a combination of:
1. Actions taken upon exit of the previous state.
2. Actions taken upon entry of the new state.
3. Actions taken which are most closely associated with the transition.
6.3.3.1 No differentiation is made between these cases.
Num Previous State Trigger New State Actions Comments
6.4 Service Message Representation — Services are functions or methods that may be provided by either the
equipment or the host. A service message may be either a request message, which always requires a response, or a
notification message, that does not require a response.
6.4.1 Service Definition
6.4.1.1 A service definition table defines the specific set of messages for a given service resource, as shown in the
following table:
Message Service Name Type Description
6.4.1.2 Type can be either “N” = Notification or “R” = Request & Response.
6.4.1.3 Notification type messages are initiated by the service provider (e.g., the equipment) and the provider does
not expect to get a response from the service user. Request messages are initiated by a service user (e.g., the host).
Request messages ask for data or an activity from the provider. Request messages expect a specific response
message (no presumption on the message content).
6.4.2 Service Parameter Dictionary
6.4.2.1 A service parameter dictionary table defines the description, format and its possible value for parameters
used by services, as shown in the following table:
Parameter Name Description Format: Possible Value
6.4.2.2 A row is provided in the table for each parameter of a service.
3 D. Harel, “State charts: A Visual Formalism for Complex Systems”, Science of Computer Programming 8,
1987.