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SEMI E1.9-0701 E2 © SEMI 1994, 2004 16 Symbol Used Figure Number Value Specified Datum Measured from Boundary or Feature Measured to y 4 1, 2, 6 85 mm (3.35 in.) maximum facial datum pla ne rear of front cassette side do…
SEMI E1.9-0701
E2
© SEMI 1994, 2004 15
Symbol
Used
Figure
Number
Value Specified Datum Measured from Boundary or Feature Measured to
x3† 1, 10, 12 125 mm (4.92 in.)
minimum
bilateral datum plane inside of front cassette side domains
x4‡ 1, 10, 12 8 mm (0.31 in.)
minimum
farthest protrusion of
cassette from bilateral
datum plane
encroachment of cassette side domain on
side grip pits
x5 2, 4 76 ± 1 mm
(2.99 ± 0.04 in.)
bilateral datum plane outside of cassette top and bottom domains
above and below rear cassette side domains
x6 2, 4, 9 112.5 mm (4.43 in.)
maximum
bilateral datum plane encroachment of cassette top and bottom
domains on near side of vertical optical
wafer sensing paths
x7‡ 2, 10 12 mm (0.47 in.)
minimum
farthest protrusion of
cassette from bilateral
datum plane
encroachment of cassette top domain on
space underneath robotic handling flanges
x8* 5 12.5 mm (0.49 in.) bilateral datum plane end of line segment along center of center
cassette sensing pad
x9 1, 2, 4, 10,
12
167 mm (6.57 in.)
maximum
bilateral datum plane left and right side of cassette
x10‡ 1, 10, 12 166 ± 1 mm
(6.54 ± 0.04 in.)
bilateral datum plane rim of opening of side grip pits
x11 4, 12 166 mm (6.54 in.) bilateral datum plane origin of radius of fork-lift pin hole
x12 4, 9 125 mm (4.92 in.)
minimum
bilateral datum plane encroachment of cassette bottom domain on
far side of vertical optical wafer sensing
paths
x13* 5 88.5 mm (3.48 in.) bilateral datum plane near end of line segment along center of
front cassette sensing pads
x14* 5 118.5 mm (4.67 in.) bilateral datum plane far end of line segment along center of front
cassette sensing pads
x15 4, 12 132 mm (5.2 in.)
maximum
bilateral datum plane intersection of cassette bottom domain and
conveyor rail
x16 4, 12 140 ± 1 mm
(5.51 ± 0.04 in.)
(required)
140 ± 0.25 mm
(5.512 ± 0.010 in.)
(recommended for
roller conveyors)
bilateral datum plane end of conveyor rail and encroachment of
cassette bottom domain on fork-lift area
x17* 5 17.5 mm (0.69 in.) bilateral datum plane line segment along center of rear cassette
sensing pads
x21* 5 30 mm (1.18 in.) bilateral datum plane origin of radius r14 at center of info pads A
and B
x22* 5 70 mm (2.76 in.) bilateral datum plane origin of radius r17 at center of info pads C
and D
x25‡ 14, 16 30 mm (1.18 in.)
minimum
bilateral datum plane far end of top and bottom cassette
identification tag areas
x27 None ± 1 mm (± 0.04 in.)
flatness over tag area
bilateral datum plane surface of side cassette identification tag
area
y1† 1 3 mm (0.12 in.)
maximum
facial datum plane origin of r2 and r3 on bilateral datum plane
y2‡ 1, 7, 8 10 ± 1 mm
(0.39 ± 0.04 in.)
facial datum plane front wall of side grip pits
y3‡ 1, 7, 8 10 ± 1 mm
(0.39 ± 0.04 in.)
facial datum plane rear wall of side grip pits
SEMI E1.9-0701
E2
© SEMI 1994, 2004 16
Symbol
Used
Figure
Number
Value Specified Datum Measured from Boundary or Feature Measured to
y4 1, 2, 6 85 mm (3.35 in.)
maximum
facial datum plane rear of front cassette side domains and the
part of the cassette top domain above them
y5† 1, 6 120 mm (4.72 in.)
minimum
facial datum plane front of rear cassette side domains
y6 1, 6 152 mm (5.98 in.)
maximum
facial datum plane rear of rear cassette side domains
y7‡ 2, 7 2 ± 0.5 mm
(0.08 ± 0.02 in.)
facial datum plane rear side of top robotic handling flange
supports
y8‡ 2, 7 2 ± 0.5 mm
(0.08 ± 0.02 in.)
facial datum plane front side of top robotic handling flange
supports
y9* 5 92.5 mm (3.64 in.) facial datum plane front end of the line segment along center of
rear carrier sensing pads and origin of
radius r17 at center of info pads C and D
y10* 5 123.5 mm (4.86 in.) facial datum plane rear end of the line segment along center of
rear carrier sensing pads and origin of
radius r14 at center of info pads A and B
y11† 1, 6 85 mm (3.35 in.)
maximum
facial datum plane front of front cassette side domains
y14‡ None 142 mm (5.59 in.)
maximum
facial datum plane front of the cassette top
y15 2, 4, 6 95 mm (3.74 in.)
maximum
facial datum plane encroachment of cassette top and bottom
domains on vertical optical wafer sensing
paths
y16 2, 4, 6, 16 155 ± 1 mm
(6.10 ± 0.04 in.)
facial datum plane rear end of cassette top and bottom domains
y17* 5 27.5 mm (1.08 in.) facial datum plane line segment along center of center cassette
sensing pad
y18 5 40.2 mm (1.58 in.) facial datum plane near end of line segment along center of
front cassette sensing pads
y19* 5 61.1 mm (2.41 in.) facial datum plane far end of line segment along center of front
cassette sensing pads
y20‡ None 158 mm (6.22 in.) facial datum plane maximum protrusion of wafers toward the
front of the cassette
y21 14 136 mm (5.35 in.)
facial datum plane recommended center of label on top
cassette identification tag area
y22 16 145 mm (5.71 in.)
facial datum plane recommended center of label on bottom
cassette identification tag area
y23 4, 6 140 mm (5.51 in.)
maximum
facial datum plane rear of cassette bottom domain outside of x5
y24‡ 16 136 mm (5.35 in.)
maximum
facial datum plane near side of bottom cassette identification
tag area
y25‡ 14 127 mm (5.00 in.)
maximum
facial datum plane near side of top cassette identification tag
area
y26‡ 14 145 mm (5.71 in.)
minimum
facial datum plane far side of top cassette identification tag
area
y27‡ 15 9 mm (0.35 in.)
minimum
facial datum plane front side of side cassette identification tag
area
y28‡ 15 9 mm (0.35 in.)
minimum
facial datum plane rear side of side cassette identification tag
area
y29 13 89 mm (3.50 in.) facial datum plane axis of rotation of fork-lift area
z1 8, 12 0 mm (0 in.) minimum horizontal datum plane bottom of cassette bottom domain
SEMI E1.9-0701
E2
© SEMI 1994, 2004 17
Symbol
Used
Figure
Number
Value Specified Datum Measured from Boundary or Feature Measured to
z2* 5, 8, 12 2 mm (0.08 in.)
maximum
horizontal datum plane bottom of carrier sensing pads and info pads
(when down) and advancing box sensing
pads (on FOUP only, see SEMI E47.1)
z3 8, 12 7 ± 1 mm
(0.28 ± 0.04 in.)
horizontal datum plane bottom of conveyor rail between x15 and
x16
z4 8, 12 15 ± 1 mm
(0.59 ± 0.04 in.)
horizontal datum plane cassette bottom outside of x16
z5 8, 9 10 mm (0.39 in.)
minimum)
horizontal datum plane top of pod latch-pin hole
z6† 6, 8, 9, 12 21 mm (0.83 in.)
maximum
horizontal datum plane top of cassette bottom domain
z7‡ 8, 12 35 ± 1 mm
(1.38 ± 0.04 in.)
horizontal datum plane bottom point of bottom side grip pits
z8† 6, 9, 12 33 mm (1.30 in.) horizontal datum plane bottom nominal wafer seating plane
z9‡ 8, 12 45 ± 1 mm
(1.77 ± 0.04 in.)
horizontal datum plane bottom of vertical sides of bottom side grip
pits
z10† 10, 11 0 ± 0.5 mm
(0.00 ± 0.02 in.)
each nominal wafer
seating plane
entire bottom of the wafer
z11† 10, 11 see Table 2 each nominal wafer
seating plane
encroachment of cassette side domains on
clearance above the wafer
z12† 6, 9, 10,
11, 12
see Table 2 each nominal wafer
seating plane
adjacent nominal wafer seating planes
z13‡ 7, 10 24 ± 1 mm
(0.94 ± 0.04 in.)
top nominal wafer
seating plane
bottom wall of top side grip pits
z14‡ 7, 10 1 ± 1 mm
(0.04 ± 0.04 in.)
top nominal wafer
seating plane
top point of top side grip pits
z15† 6, 9, 10 13 mm (0.51 in.)
minimum
top nominal wafer
seating plane
bottom of cassette top domain
z16‡ 7, 10 9 ± 1 mm
(0.35 ± 0.04 in.)
lowest point of underside
of top robotic flange
encroachment of cassette top domain on
space underneath robotic handling flange
z17‡ 7, 10 26 ± 1 mm
(1.02 ± 0.04 in.)
top nominal wafer
seating plane
bottom of top robotic handling flanges
z18 6, 7, 9, 10 30 mm (1.18 in.)
maximum
top nominal wafer
seating plane
top of cassette top domain
z19 8, 12 24 mm (0.94 in.) horizontal datum plane origin of radius of cassette sensing hole
z20‡ 8, 12 60 ± 1 mm
(2.36 ± 0.04 in.)
top nominal wafer
seating plane
top wall of bottom side grip pits
z21‡ 7, 10 9 ± 1 mm
(0.35 ± 0.04 in.)
top nominal wafer
seating plane
top of vertical sides of top side grip pits
z22 8, 12 20 mm (0.79 in.)
minimum
horizontal datum plane top of fork-lift pin hole and upper limit of
volume bounded by r10
z23† 10 3 mm (0.12 in.)
maximum
each nominal wafer
seating plane
bottom of wafer extraction volume
z24‡ 7, 10 4 ± 1 mm
(0.16 ± 0.04 in.)
lowest point of underside
of top robotic flange
top of top robotic handling flange
z25‡ None ± 1 mm (± 0.04 in.)
flatness over tag area
horizontal datum plane surface of top and bottom cassette
identification tag areas
z26* 5 9 mm (0.35 in.)
minimum
horizontal datum plane bottom of info pads (when up)
z27‡ 15 64.5 mm (2.54 in.)
maximum
horizontal datum plane bottom end of side cassette identification tag
area