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SEMI E127-0705 © SEMI 2003, 2005 50 RELATED INFORMATION 1 USE CASES AND SCENARIOS NOTICE : This rel ated information is n ot an official part of SEMI E127 and was derived from wor k of the originating committee. Th is re…

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SEMI E127-0705 © SEMI 2003, 2005 49
Fundamental IMMC Requirements IMMC Section Level of Compliance
Substrate Transfer Path Object 12.1–12.5, 12.7.3,
12.9–12.10, 12.11.2.3,
12.11.3.3
Full Partial Not Implemented
IMM Data Table Object 13, 14.1–14.4
Full Partial Not Implemented
IMM Raw Data Table Object 14.5.1–14.5.3
Full Partial Not Implemented
IMM Converted Data Table Object 14.5.1–2, 14.5.4
Full Partial Not Implemented
IMM Calibration Data Table Object 14.5.1–2, 14.5.5
Full Partial Not Implemented
Data Table, Data Row, Data Row Template, and
Data Information Objects
15.1–15.2
Full Partial Not Implemented
Additional Requirements for Substrate Object 16.1–all
Full Partial Not Implemented
Additional Requirements for Process Job
Management
16.2–all
Full Partial Not Implemented
Event Data 17–all
Full Partial Not Implemented
Message Service Definitions 18–all
Full Partial Not Implemented
Additional IMMC Capabilities IMMC Section Level of Compliance
Substrate Verification (Substrate ID Reader) 12.6
Full Partial Not Implemented
Substrate Orientation Detection 12.7–12.7.2, 12.7.4
Full Partial Not Implemented
Transfer Path Calibration (X,Y,Z Detection) 12.8
Full Partial Not Implemented
Master Data Table 15.3
Full Partial Not Implemented
21 Related Documents
21.1 List of Documents
21.1.1 This section is for useful documents related to this standard but not referenced within the specification.
21.1.1.1 Developing Software with UML,
Addison-Wesley c1999 by Oestereich, Bernd
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
SEMI E127-0705 © SEMI 2003, 2005 50
RELATED INFORMATION 1
USE CASES AND SCENARIOS
NOTICE: This related information is not an official part of SEMI E127 and was derived from work of the
originating committee. This related information was approved for publication by full letter ballot procedures.
R1-1 Data Tables Objects
R1-1.1 Obtaining A Directory Of Existing Table Objects
R1-1.1.1 The scenario in Table R1-1 illustrates getting a directory of all IMM Data Table Objects using GetAttr.
Table R1-1 Getting a Directory of Tables
Comments Client Dir IMM Comments
1 GetAttr.req
ObjSpec = object
specifier for IMM
ObjType =
‘TableIMM_Data
list of AttrName =
(“Objtype”, “ObjID”)
GetAttr.rsp
list of ObjSetting = pairs o
f
ObjType, ObjID for all existing
tables.
R1-1.2 Getting Table Templates
R1-1.2.1 The client is able to obtain the Data Row Template and Data Information either from an actual table object
or for the Master Data Table Object of interest. In the example shown in Table R1-2, the client wants the
information from the Master Converted Data Table. The same scenario, with different values for ObjType and
ObjID, could be used to get the specific templates for an actual table object.
Table R1-2 Getting IMM Data Table Object Templates
Comments Client Dir IMM Comments
1 GetAttr.req
ObjSpec = object specifier for IMM
ObjType -=
“TableIMM_ConvertedData”
list of ObjID =
“MasterConvertedData”
list of AttrName =
(“RowTemplateID”)
GetAttr.rsp
list of ObjSettings =
(“RowTemplateID”,
“MasterConvertedDataRowTemplate”)
GetAttr.req
SEMI E127-0705 © SEMI 2003, 2005 51
Comments Client Dir IMM Comments
ObjSpec = object specifier for IMM
ObjType = “DataRow Template”
list of ObjID =
(“MasterConvertedDataRow
Template”)
list of AttrName =
(“DataInfoIDList”)
GetAttr.rsp
list of ObjSetting = (“DataInfoIDList”,
list of ObjIDs) for the set o
f
DataInformation Objects”_
GetAttr.req
All attributes of the
Data Information
object are requested
for all of these
objects.
ObjSpec = object specifier for IMM
ObjType = “DataRow_Template”
list of ObjID = same as contents o
f
DataInfoIDList
list of AttrName = (empty list)
GetAttr.rsp
list of ObjSetting = (((“ObjID”,
“LineWidth”)
(“Assurance”,assurance value),
“DataType”, “F16”), :
(“ObjID”, “Data Type”), (“Units”,
“micron”)),
....
(...)))
list of lists of
name/value pairs
for each supported
attribute for each
DataInformation
ObjID.
R1-1.3 Table Services
R1-1.3.1 A client wants to download a Raw Data Table from a previous run for analysis. Table R1-3 illustrates this
scenario.
Table R1-3 Sending a Table
Comments Client Dir IMM Comments
1 TableSend.req
ObjSpec = object specifier for the IMM,
TableType = “TableIMM_RawData”,
TableID = “P19343445-Lot103102#5”,
TableCmd = Entire table;
list of TableAttr = name/value attribute
p
airs;
list of ColHdr = list of names of column
headers; list of values for 50 rows
TableSend.rsp
TableAck = Success: