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SEMI E54.15-0305 © SEMI 2005 27 9.4.7 Assembly-EPD#4 –– The p resentation of the Assembly #4 E ndpoint Device (Assembl y-EPD#4) object instance attributes and services are as indicated in Table 50. Table 50 A ssembly-EPD…

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SEMI E54.15-0305 © SEMI 2005 26
Services
ID Service Name SDM Tag
33 Endpoint On S1
34 Endpoint Off S2
35 Endpoint Start S3
36 Endpoint Suspend S4
37 Endpoint Resume S5
9.4.4 Assembly-EPD#1 –– The presentation of the Assembly #1 Endpoint Device (Assembly-EPD#1) object
instance attributes and services are as indicated in Table 47.
Table 47 Assembly-EPD#1 Object Instance Attributes and Services
Assembly-EPD#1
Class ID = 138, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.4.5 Assembly-EPD#2 –– The presentation of the Assembly #2 Endpoint Device (Assembly-EPD#2) object
instance attributes and services are as indicated in Table 48.
Table 48 Assembly-EPD#2 Object Instance Attributes and
Services
Assembly-EPD#2
Class ID = 139, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.4.6 Assembly-EPD#3 –– The presentation of the Assembly #3 Endpoint Device (Assembly-EPD#3) object
instance attributes and services are as indicated in Table 49.
Table 49 Assembly-EPD#3 Object Instance Attributes and Services
Assembly-EPD#3
Class ID = 140, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
SEMI E54.15-0305 © SEMI 2005 27
9.4.7 Assembly-EPD#4 –– The presentation of the Assembly #4 Endpoint Device (Assembly-EPD#4) object
instance attributes and services are as indicated in Table 50.
Table 50 Assembly-EPD#4 Object Instance Attributes and Services
Assembly-EPD#4
Class ID = 141, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
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SEMI E54.16-0705 © SEMI 2005 1
SEMI E54.16-0705
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK
COMMUNICATIONS FOR LONWORKS
This standard was technically approved by the global Information & Control Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available
at www.semi.org in June 2005 and on CD-ROM in July 2005.
NOTICE: This document replaced SEMI E54.6 in 2005.
1 Purpose
1.1 This standard specification defines a communication specification based on the ANSI/EIA/CEA-709.1 Control
Networking Protocol (LONWORKS) to enable communications between intelligent devices on a sensor/actuator
network (SAN) that operate in accordance with SEMI-specified device models (common and device specific) on
semiconductor manufacturing equipment.
1.2 This document specifies a mapping of the SEMI Common Device Model (CDM) onto LONWORKS technology
using the LONMARK Interoperability Guidelines established for LONWORKS devices. The LONMARK International
Association will review and approve the enhanced SEMI LONMARK functional profiles presented in this network
communication document and incorporate the required SEMI profiles into the LONMARK Interoperability
Guidelines.
1.3 Background and Motivation — The LONWORKS communications system provides interconnection of smart
control devices such as sensors, actuators, and controllers in a fast-response time, low-cost network for industrial
use. LONWORKS enables multiple devices to share a single network, thereby significantly reducing the point-to-point
wiring between controllers, sensors, and actuators. The LONWORKS network communications standard (NCS) is
based on the seven-layer ANSI/EIA/CEA-709.1 (LONWORKS) protocol, implemented by the Neuron Chip, a
physical layer transceiver, and an optional host processor. The ANSI/EIA/CEA-709.1 (LONWORKS) control
networking protocol was developed by Echelon and may be freely licensed for implementation on any hardware
platform. The SEMI NCS for LONWORKS is based on the LONMARK interoperability guidelines, which provide a
framework for interoperable use of the ANSI/EIA/CEA-709.1 (LONWORKS) protocol at layers 1-6, as well as at the
application layer. Where the LONMARK interoperability guidelines do not provide the functionality required by the
SEMI Common Device Model (CDM) and the SEMI Specific Device models (SDM), the guidelines are extended
with SEMI-specific enhanced profile requirements.
2 Scope
2.1 This document specifies a SAN communications specification standard, based on the ANSI/EIA/CEA-709.1
Control Networking Protocol (LONWORKS) specification, that enables communication with SAN devices configured
according to the SEMI SAN Common Device Model and appropriate SEMI SAN Specific Device Model (SDM)
specifications.
2.2 This document specifies the use of LONWORKS technology for services that compliant intelligent devices must
support in order to exchange information over this semiconductor equipment sensor/actuator network.
2.3 This document specifies the utilization of LONWORKS technology to present externally visible device structure
and behavior, specified in the CDM and appropriate SDMs, on a LONWORKS network.
2.4 This document is used in conjunction with the SEMI SAN Common Device Model specification and one or
more SEMI SAN Specific Device Model specifications (e.g., for a mass flow controller). Together, the model
documents describe the externally visible data structures and behavior of devices using LONWORKS technology in a
SEMI-compliant SAN system.
2.5 This specification, together with the sensor/actuator network common device model, one or more sensor/
actuator network specific device model documents, the ANSI/EIA/CEA-709.1 (LONWORKS) protocol specification,
and the LONMARK interoperability guidelines, specifies requirements for SEMI SAN implementations based on
LONWORKS technology.