semi合集-English.pdf - 第1093页
SEMI E5-1104 © SEMI 1982, 2004 35 Name Format Description Values Where Used RSACK 10 Ready to Send Acknowledge code, 1 byte 0 = Acknowledge, OK (note that 'OK' differs from 'ready') 1 = Invalid port n…
SEMI E5-1104 © SEMI 1982, 2004 34
Name Format Description Values Where Used
RPMACK 51 Reticle Pod management
service acknowledge code.
One byte.
0 = Acknowledge, service has
been performed
1 = Service does not exist
2 = Can not perform now
3 = At least parameter does not
exist
4 = Acknowledge, request will
be performed with completion
signaled later by an event
5 = Service is not completed or
prohibited
6 = No such object exists
7-63 Reserved
RPMDESTLOC 20 The LocationID towards
which a reticle must be
moved. Conforms to OBJID
S14F19
RPMSOURLOC The LocationID of the
location from which to pick-
up a reticle for moving it to
another location. Conforms
to OBJID.
S14F19
RPSEL 51 Reference Point Select
Number of reference point from
0-n.
S12F1, F4
RPTID 20, 3(),
5()
Report ID
S2F33, F35;
S6F11, F13,
F16, F11, F19,
F21, F22;
S17F1, F2, F3,
F4, F5, F9, F11,
F12
RPTOC 11 A Trace Object attribute for a
flag which, if set TRUE,
causes only variables which
have changed during the
sample period to be included
in a report.
S14F1, F2, F3,
F4;
S17F5
RQCMD 11 Required Command
True = Command must be
specified
False = Command is optional
S7F22
RQPAR 11 Required Parameter
True = Parameter must be
specified
False = Parameter is optional
S7F22
RRACK 10 Request to Receive
Acknowledge code, 1 byte
0 = Acknowledge, OK (note that
'OK' differs from 'ready')
1 = Invalid port number
2 = Requested material is not
at identified port
3 = Busy. Try again
4 = Sender does not have
permission to perform this
operation
5-63 Reserved
S4F18
SEMI E5-1104 © SEMI 1982, 2004 35
Name Format Description Values Where Used
RSACK 10 Ready to Send Acknowledge
code, 1 byte
0 = Acknowledge, OK (note that
'OK' differs from 'ready')
1 = Invalid port number
2 = Port is already occupied
3 = Busy, unable to move
material at this time. Try
again
4 = Receiver does not have
permission to perform this
operation
5-63 Reserved
S4F2
RSDA 10 Request Spool Data
Acknowledge
0 = OK
1 = Denied, busy try later
2 = Denied, spooled data does
not exist
3-63 Reserved
S6F24
RSDC 51 Request Spool Data Code
0 = Transmit Spooled Messages
1 = Purge Spooled Messages
2-63 Reserved
S6F23
RSINF 3() Starting location for row or
column. This item consists o
f
3 values (x,y,direction). If
direction value is negative, it
equals decreasing direction.
If the value is positive, it
equals increasing direction.
Direction must be a non-zero
value.
S12F7, F14
RSPACK 10 Reset Spooling Acknowledge
0 = Acknowledge, spooling setup
accepted
1 = Spooling setup rejected
2-63 Reserved
S2F44
RTYPE 3(), 5() Type of record
0 = Stream
1 = Discrete
2-63 Reserved
S13F4
SDACK 10 Map set-up data acknowledge
0 = Received data
>1 = Error
1-63 Reserved
S12F2
SDBIN 10 Send bin information flag
0 = Sent bin information
1 = Don't send bin information
>1 = Error
2-63 Reserved
S12F17
SEQNUM 3(), 5() Command Number
Value which identifies a unique
process program command by its
position in the list of commands
relative to the first. For the
first command of the process
program, SEQNUM is l.
S7F27
SFCD 10 Status form code, 1 byte
S1F5
SHEAD 10 Stored header related to the
transaction timer
S9F9
SLOTID 51 Used to reference material by
slot (a position that holds
material/substrates) in a
carrier. This item may be
implemented as an array in
some messages.
S16F11, F13,
F15
SMPLN 3(), 5() Sample number
S6F1
SEMI E5-1104 © SEMI 1982, 2004 36
Name Format Description Values Where Used
SOFTREV 20 Software revision code 6
bytes maximum
S1F2, F13, F14;
S7F22, F23,
F26, F31, F39,
F43
SPAACK 10 Equipment acknowledgement
code, 1 byte
0 = Everything correct
1 = Invalid data
>1 = Equipment-specific error
2-63 Reserved
S2F4
SPD 10 Service program data
S2F3, F6
SPID 20 Service program ID, 6
characters
S2F1, F5, F7,
F9, F12;
S9F13
SPNAME 20 Service parameter name
defined in specific standard.
If service parameter is
defined as an object attribute,
this is completely the same as
ATTRID except format
restrictions above.
S14F19, F20,
F21, F28
SPR Device
Depend-
ent
Service program results
Device dependent
S2F10
SPVAL 0, 10,
11, 20,
21, 3(),
4(), 5()
Service parameter value,
corresponding to SPNAME.
If service parameter is
defined as an object attribute,
this is completely the same as
ATTRDATA except format
restrictions for the attribute.
S14F19, F20,
F21
SSACK 20 Indicates the success or
failure of a requested action.
Two characters.
S18F2, F4, F6,
F8, F10, F12,
F14
SSCMD 20 Indicates an action to be
performed by the subsystem.
S18F13
STATUS 20 Provides status information
for a subsystem component.
Used in the data item
STATUSLIST.
See
STATUSLIST
STATUSLIST 0 A list of STATUS data sent
in a fixed order.
STATUSLIST has the
following form:
L,s
1. <STATUS
1
>
.
.
s. <STATUS
s
>
S18F4, F8, F10,
F12, F14, F16
STEMP 20 String template. ASCII text
string acceptable to
equipment as a parameter
value. A data string matches
a template string if the data
string is at least as long as the
template and each character
of the data string matches the
corresponding character of
the template. A null list
indicates all user data is
acceptable to the machine.
S7F22