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SEMI F43-0699 © SEMI 1999 6 C N C Gas Inlet F1 R1 P1 V1 FM 1 FM 2 F2 PV1 F3 Test Purifier Exhaust P2 F1 = 10" PTFE Membrane Filter R1 = @ 0-1 00 psig Outlet Regulator P1, P2 = El ectronics Grade Pres sure Gauge (30&…

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SEMI F43-0699 © SEMI 19995
permanently crimp any ferrules onto the tube stubs.
Nylon ferrules are acceptable.
7.3.2.3 Using the flow control device, set the test flow
to manufacturer’s recommended maximum flow.
7.3.2.4 Turn on the counter pump and conduct the
static test. The purifier is to be tested with the valve
PV1 in the fully open position until 85 standard liters (3
scf) of gas have been sampled. Cumulative data should
be recorded at one-minute intervals.
7.3.3 Purifier Dynamic Test
7.3.3.1 This test is to immediately follow the static
test. To conduct the dynamic test, set the actuator
pressure of the actuator attached to valve PV1 to its
minimum actuator pressure as recommended by the
manufacturer to fully open the valve. Actuate valve
PV1 at the rate of 30 cycles/minute for 60 minutes. A
cycle consists of off and on actuation of the valve. The
off and on cycles should be of equal duration.
7.3.4 Purifier Impact Test
7.3.4.1 This test is to immediately follow the dynamic
test. Maintain the test flow rate for 10 minutes, with
the valve PV1 in the fully open position. Impact the
purifier once a minute for 10 minutes, using the
mechanical shock device. Purge the test component by
maintaining the test flow rate for 30 minutes.
7.3.5 Turn the counter pump off and then decrease the
test gas flow rate to ~ 5 slpm.
7.3.6 Remove the test purifier by first disconnecting
the downstream fitting and then the upstream fitting,
and immediately install the spool piece by connecting
the upstream fitting followed by the downstream fitting.
The removed purifier should be immediately valved off
or capped to prevent its exposure to room air.
7.4 Data Presentation
7.4.1 The following test conditions are to be reported
in the data presentation:
• Date and time of test
• Operator
• Test flow rate (scfm)
• Test pressure (psig)
• Test temperature (°C)
• Purifier type, manufacturer, serial number, lot
number, and model number
• CNC manufacturer, serial number, sample flow
rate (scfm), model number, and calibration date
• Test gas type and dew point (°C)
• A schematic of the test apparatus, including
manufacturer's and model numbers of all test
apparatus components
• Calibration dates for the flow meters and the test
date
7.4.2 Graph the static, dynamic and impact portions
of the test separately as counts/minute (measured by the
counter) versus time, including the appropriate
background (measured with the spool piece in place)
with each. Also graph the entire data set as counts per
minute versus time. If different filters are to be
compared, graph their entire data sets together.
7.4.3 Present the entire raw data set in tabular form.
8 Related Documents
8.1 The appropriate particle counter manufacturer's
operating and maintenance manuals should be consulted
when using this test method.
8.2 On particle counter efficiencies: Agarwal, J. K.
and Sem, G. J. "Continuous Flow, Single Particle
Counting Condensation Nucleus Counter." Journal of
Aerosol Science, v.11.4. July 1980:343–357.
8.3 On flow calculations: D. E. Dickie, ed. Crane
Handbook. Construction Safety Association of Toronto.
Ontario, Canada. 1975.
8.4 Statistical reference: Van Slooten, R. A.,
"Statistical Treatment of Particle Counts in Clean
Gases. " Microcontamination, v.4.2. Feb. 1986:32–38.
8.5 Hinds, W. C. Aerosol Technol ogy: Properties,
Behavior, and Measurement of Airborne Particles. John
Wiley & Sons. 1982:187–194.
8.6 Fissan, H. and Schwientek. "Sampling and
Transport of Aerosols." TSI Journal of Particle
Instrumentation, v.2.2. July–December 1987:3–10.
8.7 SEMI F1-96, Specification for Leak Integrity of
High Purity Gas Piping Systems and Components.
SEMI F43-0699 © SEMI 1999 6
C
N
C
Gas
Inlet
F1
R1
P1
V1
FM1
FM2
F2
PV1
F3
Test
Purifier
Exhaust
P2
F1 = 10" PTFE Membrane Filter
R1 = @ 0-100 psig Outlet Regulator
P1, P2 = Electronics Grade Pressure Gauge (30"-0-60)
V1 = Three-Way Valve
FM1 = Low Flow (0-2 scfm) Flowmeter
FM2 = High Flow (0-20 scfm) Flowmeter
F2, F3 = Electronics Grade Filter
PV1 = Electronics Grade Pneumatic Valve
Figure 1
Schematic of Particle Test Loop
SEMI F43-0699 © SEMI 19997
X
1
X
2
X
3
45º
C
L
Suitable
Delivery
Ramp
S.S.
Sphere
Mass = 54.8 ± 1g
X
1
=
30.5 cm ± 0.5
cm
X
2
= 0 cm or very close to it (due to angle and ball size)
X
3
=
2.4 cm ± 0.1 cm
(
dia . of the SS sphere)
TEST
COMPONENT
Figure 2
Mechanical Shock Device
NOTE 1: X3 will change with a change on sphere size.
NOTE 2: Position the delivery ramp so that the position of impact is at the midpoint of the axial centerline of the device under
test.