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SEMI E87-0705 © SEMI 1999, 2005 21 11.3.3 Access Mode State Definitions 11.3.3.1 ACCESS MODE — The parent state for the MANUAL and AUTO sub-states. 11.3.3.2 MANUAL — A sub-state of AC CESS MODE. Whe n the produc tion equ…

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SEMI E87-0705 © SEMI 1999, 2005 20
Table 8 Carrier Transfer Boundaries
Transfer Type Transfer Method Starting Boundary Ending Boundary
MANUAL This starting boundary is specified by the
user. Known examples of the starting
boundary include but are not limited to; the
presence sensor detecting a carrier, a load
port door opening, input to the equipment by
the operator through a switch at the load port
or the equipment console.
This ending boundary is specified by the
user. Known examples of the ending
boundary include but are not limited to; a
preset configurable time following presence
and placement sensor detecting a carrier, a
load port door closing, or input to the
equipment by the operator through a switch
at the load port or the equipment console or
a service message.
LOAD
AUTO The PIO signal “READY” is active for load.
See SEMI E84.
PIO signals a transfer complete signal
“COMPT”. See SEMI E84.
MANUAL This starting boundary is specified by the
user. Examples of the starting boundary
include but are not limited to presence and
placement sensor no longer detecting a
carrier, a load port door opening, or input to
the equipment by the operator through a
switch at the load port or the equipment
console or a service message.
This ending boundary is specified by the
user. Examples of the ending boundary
include but are not limited to a preset
configurable time following presence and
placement sensor no longer detecting a
carrier, a load port door closing, or input to
the equipment by the operator through a
switch at the load port or the equipment
console, or a service message.
UNLOAD
AUTO The PIO signal “READY” is active for
unload. See SEMI E84.
PIO signals a transfer complete signal
“COMPT”. See SEMI E84.
11.2 Manual Carrier Transfer Confirmation Trigger
11.2.1 For a manual transfer completion confirmation, the production equipment supplier must implement a
software or hardware mechanism for an operator to inform the equipment that the carrier transfer is complete.
11.3 Access Mode Initial Value
11.3.1 Also, when equipment re-initialization occurs, the access mode(s) must be remembered, and used as the
initial value when initializing. Since the access mode is remembered through re-initializations, the initial value that
is used the very first time the software is ever loaded is not important. The equipment supplier is free to set this
default value.
11.3.2 Access Mode State Model Diagram
ACCESS MODE
MANUAL
AUTO
1
2 3
H
Figure 4
Access Mode State Model Diagram
SEMI E87-0705 © SEMI 1999, 2005 21
11.3.3 Access Mode State Definitions
11.3.3.1 ACCESS MODE — The parent state for the MANUAL and AUTO sub-states.
11.3.3.2 MANUAL — A sub-state of ACCESS MODE. When the production equipment or specified load port is in
this mode, only manual (non-AMHS) carrier transfers are allowed. The production equipment shall have the
capability of generating an alarm if an automated (AMHS) delivery is attempted. If a ChangeAccess service with
the value of MANUAL is received in this state, the equipment shall accept the service and no event is sent for this
action.
11.3.3.3 AUTO — A sub-state of ACCESS MODE. When the production equipment or specified load ports are in
this mode, only automated (AMHS) carrier transfers are allowed. The production equipment shall have the
capability of generating an alarm if a manual delivery is attempted. If a ChangeAccess service with the value of
AUTO is received in this state, the equipment shall accept the service and no event is sent for this action.
11.3.4 Access Mode State Transition Table
11.3.4.1 Table 9 defines the transitions for the Access Mode State Model.
Table 9 Access Mode State Transition Definitions
# Previous State Trigger New state Actions Comments
1 (no state) System restart. MANUAL
or
AUTO
(History)
The access mode
returns to the
mode it was
previous to the
system reset.
Data required to be available for this event
report:
PortID
AccessMode
2 MANUAL The host or operator has
executed a ChangeAccess
service with the value of
AUTO. This trigger can
happen at anytime, except
during a carrier transfer.
AUTO Manual deliveries are not allowed after this
state transition. The operator may also trigger
this transaction from the production
equipment console.
Data required to be available for this event
report:
PortID
AccessMode
3 AUTO The host or operator has
executed a ChangeAccess
service with the value of
MANUAL. This trigger
can happen at anytime,
except during carrier
transfer.
MANUAL The operator may also trigger this transaction
from the production equipment console or a
manual switch at the load port. Automated
transfers are not allowed after this state
transition.
Data required to be available for this event
report:
PortID
AccessMode
12 Reservation State Model
12.1 The purpose of the Reservation State Model is to define the host view of future activity at a specific load port.
12.1.1 In the Reservation State Model, the ReserveAtPort and CancelReservationAtPort services enable the
following items:
1. They enable the host to inform the equipment of a future carrier delivery without specifying the carrier ID and
at the same time allow host based verification. (Equipment based verification is enabled via the Load
Port/Carrier Association State Model, the Bind service, and the Carrier Notification service detailed in §13,
¶15.4.2 and ¶15.4.11 of SEMI E87.)
2. They enable the equipment to send a state change event to the host if the operator (either local or remote)
informs the equipment of a future carrier delivery to a port without specifying the carrier ID. Thus the host
SEMI E87-0705 © SEMI 1999, 2005 22
knows that the operator expects to use that port for something the host did not request for AMHS based
delivery.
3. They enable internal buffer equipment to inform the host that it is physically initiating a carrier out operation
(this carrier has a known or specified ID) and that no AMHS delivery should be scheduled.
4. The Bind and CancelBind services also trigger changes in the Load Port Reservation State Model. If the Load
Port Reservation state model is in the NOT RESERVED state, the Bind service triggers a transition to the
RESERVED state. If the Load Port Reservation is in the RESERVED State, the CancelBind service triggers a
transition to NOT RESERVED.
12.1.2 For internal buffer equipment, the Reservation State Model, the ReserveAtPort service, the
CancelReservationAtPort service, and all other associated functionality are necessary for fundamental compliance to
this standard.
12.1.3 For fixed buffer equipment, the Reservation State Model, the ReserveAtPort service, the
CancelReserveAtPort service, and all other associated functionality is a user option and not necessary for
fundamental compliance.
12.1.4 For equipment implementing the reservation state model, the equipment shall provide a load port reservation
state model for each load port.
12.2 Reservation Visible Signal
12.2.1 When a port reservation has taken place, the equipment shall display a visible signal indicating that the
designated load port is in the Reserved State. Examples of visible signals for the associated load port are: Blinking
LEDs, flags, color indicators, or other methods that allow easy recognition that the load port is reserved; proximity
to or location on the load port is recommended. The visible signal shall remain present as long as the load port state
remains RESERVED. When the state changes to NOT RESERVED the visible indicator shall cease. This
capability is not required for fundamental compliance to CMS.
12.3 Reservation State Model Diagram
NOT
RESERVED
RESERVED
2 3
1
Load Port
Reservation
Figure 5
Reservation State Model Diagram