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SEMI 30.1-0200 © SEMI 1998, 2000 45 Figure 7 Review Data Management
SEMI 30.1-0200 © SEMI 1998, 2000 44
The equipment first calculates Theta, using, for
example, the formula:
Θ=tan
−1
M
A −
M
N
1+ MA MN
where MA and MN are, respectively, the slopes of the
lines connecting the two actual fine sites and the line
connecting the two nominal sites, in “M20”
coordinates, calculated as follows:
MA =
yA
2
− yA
1
xA
2
− xA
1
MN =
yN
2
− yN
1
xN
2
− xN
1
The equipment then calculates DeltaX and DeltaY,
using, for example, the formulas:
DeltaX =
Csin Θ()+ Dcos Θ()
sin Θ()
()
2
+ cos Θ()
()
2
DeltaY =
Csin Θ
()− Dcos Θ()
sin Θ()()
2
+ cos Θ()()
2
where C and D, the adjusted site 1 coordinates in a
rotation-adjusted coordinate system, are calculated,
for example, using the formulas:
C
= yA1 − ((
xN
1 sinΘ ) + ((y
N
1 cosΘ)
D = xA1 − ((xN1 cosΘ) − ((yN1 sinΘ)
The equipment can also calculate a ScaleFactor term
to indicate the relative ratio between the length of the
vector connecting the nominal alignment sites and the
length of the vector connecting the actual alignment
sites. This can be used, for example, to judge whether
there is a problem with the alignment process, since
the difference between these two vectors should be
small.
ScaleFactor =
VA
V
N
where VA and VN are the length of the vectors
connecting the actual and nominal alignment sites,
calculated using the formulas:
VN = yN
2
− yN
1
()
2
+ xN
2
− xN
1
()
2
VA = yA
2
− yA
1
()
2
+ xA
2
− xA
1
()
2
SEMI 30.1-0200 © SEMI 1998, 200045
Figure 7
Review Data Management
SEMI 30.1-0200 © SEMI 1998, 2000 46
RELATED INFORMATION 2
APPLICATION NOTES
NOTE: The material contained in these Application Notes is not an official part of SEMI E30.1 and is not intended to modify or
supersede the official standard. Rather, these notes describe possible methods for implementing certain ISEM requirements
described by the standard and are included as reference material.
R2-1 Using ISEM Table Attributes to Specify Process Related Data Item Variable Values
R2-1.1 Section 11.1 (ISEM Table Data) allows the host to use ISEM Table attributes to specify product and process
related information related to the table data. The ISEM Variable Item Dictionary (Table 4) includes seven data items
intended to be used for this purpose. They are identified with the comment “This information may be added by the
host in the ISEM Tables.” Identifying the value of variable data items in Table attributes is not covered in use of
ISEM Tables. One method to accomplish this is to use attribute identifiers (ATTRIDn) that are the same identifiers
that are used for the equipment variable data items (Table R2-1). (This is very similar to the method specified in
Section 12.5 to identify values to override the default values of variable process program parameters using the “PP-
SELECT” remote commands).
Table R2-1 ISEM Variable Items and Their Equivalent ISEM Table Attribute Identifiers
Variable Item
(Table 4)
ISEM Table Attribute
Identifier
Description
Name Type
OperatorID DV OperatorID Identification of the operator of the inspection/review
equipment.
ProcessEquipmentID DV ProcessEquipmentID Identification of the process equipment used with the
current material immediately prior to the
inspection/review.
ProcessEquipmentLocation DV ProcessEquipmentLocation Location (code) of the process equipment used with the
current material immediately prior to the
inspection/review.
ProcessProgramID DV ProcessProgramID Identification of the process program used with the
process equipment used on the current material
immediately prior to the inspection/review.
ProcessLevel DV ProcessLevel Identification of the processing level of the current
material.
ProductID DV ProductID The product identification of the current material
inspected/reviewed.
ProcessRunID DV ProcessRunID Run identification for the process prior to current
inspection/review.
NOTE 1: The variable item may be identified using any appropriate SECS II data item format.
R2-2 Example ISEM Table with Item Attributes That Specify ISEM Variable Values Using S13,F13
Table Data Send
R2-2.1 Typical values for Data Items are indicated.
L, 8
1. <DATAID>
2. <OBJSPEC=null>
3. <TBLTYP=DefectData>
4. <TBLID=null>
5. <TBLCMD=1>