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SEMI E105-0701 © SEMI 2000, 2001 24 RELATED INFORM A TI ON 3 A SSUM ED CASE OF SCHEDULER/DISPATCHER NOTE: T his related inf o rmation is n ot an offic ial part of SEMI E105. This relate d information w as approved f or p…

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SEMI E105-0701 © SEMI 2000, 200123
Operation Description Step MES
Factory
Ops
Scheduler /
Dispatcher
MTSC
Production
Machine
EQ1
Production
Machine
EQ2
AMHS
Equipment
26
TransportJob State Change (job:TJ1, from:Executing, to:Completed)
27
<> FO updates EQ1LP1 port availability status
Login lot 1 & change EQ1
status
28
Login lot 1, change equipment status, etc.
29
Notify Carrier C1 Arrives at EQP1
Process lot L1
30
ProductionJob State Change (job:ProdJ1, from:Queued, to:Executing)
31
L1 Processing
32
TransportJob State Change (job:TJ2, from:Executing, to:Completed)
33
<> FO updates EQ1LP2 port availability status
Logout lot 1 & change EQ1
status
34
Logout lot 1, change equipment status, etc.
35
ProductionJob State Change (job:ProdJ1, from:Executing, to:Completed)
36
Notify WIP State Change
Process lot 2
37
ProductionJob State Change (job:ProdJ2, from:Queued, to:Executing)
38
L2 Processing
Login lot 2 & change EQ1
status
39
Login lot 2, change equipment status, etc.
Disposition Decision for C1
40
whereNextForMaterialGroup (lot 1)
41
Reply (TransportActivity, MaterialGroup:lot 1, dest:Stocker2) (*1)
Request Transport Job to
move C1 to Stocker
42
Request Transport Job (carrier:C1, dest:Stocker2, deadline: , priority)
43
Reply Transport Job (TJ3)
44
<> FO updates port availability status
45
MTSC controls movement of TJ3 via AMHS
46
TransportJob State Change (job:TJ3, from:Queued, to:Executing)
47
<> MTSC publishes location updates as C1 moves through
AMHS
48
EQ2 becomes available
Dispatch Decision for EQ2
49
whatNextForResourceByCount (resource:EQ2)
50
Reply Production Activity (resource:EQ2, material:lot 1)
Port Reservation for EQ2LP1
51
Get Port Reservation (machine:EQ2, port:EQ2LP1, carrier:C1)
52
Production Job Setup (get Lot Info, verify job properties)
53
Reply Port Reservation (port:EQ2LP1, carrier:C1)
Request Transport Job for C3
54
Request Transport Job (carrier:C1 source EQ1LP1, dest:EQ2LP1)
55
Reply Transport Job (TJ4)
Request Production Job for
C1
56
Request Production Job (Lot:lot 1, machine:EQ2)
57
Reply Production Job (ProdJ3)
Transport Job to Store C1
Complete
58
TransportJob State Change (job:TJ4, from:Executing, to:Completed)
(*1) Scheduler/Dispatcher checks the next equipment EQ2 status and port availability. EQ2 Status: Processing, Available Ports: No vacant port.
Scheduler/Dispatcher decides to transfer lot 1 to Stocker 2.
SEMI E105-0701 © SEMI 2000, 2001 24
RELATED INFORMATION 3
ASSUMED CASE OF SCHEDULER/DISPATCHER
NOTE: This related information is not an official part of SEMI E105. This related information was approved for publication by
full letter ballot procedures on February 1, 2001.
The assumed two cases of scheduler/dispatcher were used to have an analysis and to make scenarios when the
interfaces defined in SEMI E105 ware developed. This related information describes the assumed two case of
scheduler/dispatcher to make easier for the standard user to understand SEMI E105. SEMI E105 does not limit the
case of Scheduler/Dispatcher to these two assumed scheduler/dispatcher.
R3-1 Dispatch List Based Scheduler/Dispatcher
R3-1.1 Basic Functions
Dispatch List Based Scheduler/Dispatcher has a waiting lots list in each operation and has a capability to prioritize
the existing lots.
EQ-1
Lot-1
Waiting Lot List
Operation : 1000
1 Lot-1
2 Lot-2
3 NPW-1(EQ1)
EQ-2
Lot-2
At 09:00
At 10:00
Waiting Lot List
Operation : 1000
1 Lot-3
2 NPW-1(EQ1)
3 NPW-2(EQ2)
EQ-1
Lot-3
EQ-2
NPW
-
2
Dispatch List Based S/D keeps the waiting Lot
List on each operation. The waiting Lot List is
the calculated result based on the rule provided by
the supplier
Decision made by Dispatch List Based S/D. Dispatch
List Based S/D sends one Lot (Batch) to FO as a
decision.
Waiting Lots
Dispatch List Based S/D output
Figure R3-1
SEMI E105-0701 © SEMI 2000, 200125
R3-1.2 Case 1 – Factory Operation decides storage machine (Refer to Scenarios R2-3 and R2-4)
Stocker 1
Production
Eq. 1
Stocker 2
Production
Eq. 2
Operation 1000 Operation 2000
Carrier A
AGV 1 OHT 1
OHS 2
Figure R3-2
1. Carrier A processing on Eq.1 (Operation 1000) is finished.
2. Next operation for Carrier A is “2000” and the production equipment in operation “2000”is Eq.2 only.
3. Factory Operation makes the logistic decision .
(1) Transfer Carrier A from Eq.1 to Eq.2
or
(2) Transfer Carrier A from Eq.1 to Stocker 2.
4. Factory Operation uses the following interfaces defined in section 6.1.6. (*1)
• whatNextForResourceByCount
• whatNextForMaterialGroupByCount
• whatNextForDurableByCount
5. Factory Operation dose not use the following interfaces defined in section 6.1.6. (*1)
• whereNextForMaterialGroup
• whereNextForDurable
6. Scheduler / Dispatcher shows the waiting Lot list in operation “2000” (Eq.2) to Factory Operation
R3-1.2 Case 2 – Scheduler / Dispatcher decides storage machine (Refer to Scenarios R2-5 and R2-6)
1. Carrier A processing on Eq.1 (Operation 1000) is finished.
2. Next operation for Carrier A is “2000” and the production equipment in operation “2000”is Eq.2 only.
3. Scheduler / Dispatcher checks the port status of Eq.2 and makes the logistic decision .
(1) Transfer Carrier A from Eq.1 to Eq.2
or
(2) Transfer Carrier A from Eq.1 to Stocker 2.
4. Factory Operation uses the following interfaces defined in section 6.1.6. (*1)
• whatNextForResourceByCount
• whereNextForMaterialGroup
• whereNextForDurable