semi合集-English.pdf - 第1435页

SEMI 30.1-0200 © SEMI 1998, 2000 10 Transi- tion # Previ ous State Trigger New State Actions Comments 7 PROCESS The equipm ent has received an AB ORT command . ABORTING The eq uipment i s put in a “safe state” if nece ss…

100%1 / 7923
SEMI 30.1-0200 © SEMI 1998, 20009
reviewing the anomalies in the current alignment as
defined by the recipe and any commands.
7.3.28 SETTING UP (PROCESS Sub-State) — The
equipment is being setup so that external conditions are
satisfied to start processing the material. This includes
the receipt of any process programs and material to be
processed and their validation. Any of these conditions
may be satisfied on entry to SETTING UP. For
example, the selected process program may have
already been loaded (e.g., if it was the default process
program), or the specified material may have already
been placed on the equipment material port. Additional
information may come from the host during the
execution of this state.
7.3.29 STOPPING (PROCESSING ACTIVE Sub-
State) — The equipment has completed all process
programs within a “CARRIERBLD” ISEM job or has
been instructed to stop processing and shall do so
gracefully at the next opportunity. All cleanup
necessary is being completed within this state with
regard to material, data, control system, etc. Data is
normally preserved. Any alarm or error condition in
this state causes a transition to ABORTING.
7.3.30 UNLOAD (EXECUTING Sub-State) — The
substrate is being removed from the processing
location.
7.3.31 WORKING (EXECUTING Sub-State) — The
equipment is processing a specific material.
7.4 Processing State Transition Table
Table 1 Processing State Transition Table
Transi-
tion #
Previous State Trigger New State Actions Comments
1 INIT All equipment
initialization is
complete with no
alarms or error
conditions.
IDLE Equipment awaits for a PP-
SELECT, PP-ASSIGN, or
MAP-CARRIER command.
All equipment requires INIT to
be free of errors and alarms
when exited. IDLE state entry
requires that no process
program is selected.
2 IDLE A ISEM job has been
or is queued
(PP-ASSIGN) or
selected
(PP-SELECT).
SETTING UP The setup procedure is
equipment-dependent.
Commit has been made to
setup. Material may have been
placed on the equipment
before SETUP is entered.
When the job becomes active,
the process program gets
selected.
3
SETTING UP All setup activity has
completed, and the
equipment is ready to
receive a START
command.
READY The equipment is waiting for a
START command. START
may be initiated by an operator
or may be included in the
process program.
The selected process program
is available for execution.
When running multiple
process programs within a
ISEM job, the equipment
makes the next process
program available for
execution.
4
READY The equipment
receives a START
command from the
user or from within the
body of the process
program selected for
execution.
LOAD The equipment determines if
processing is completed. If not,
it transfers the next substrate to
the processing location.
Equipment transitions to
STOPPING when all process
programs in the selected ISEM
job are executed. If a new
process program within the
ISEM job needs to be
executed, the equipment
transitions to SETTING UP.
5
LOAD The processing job is
complete, and there are
no more substrates to
load or process
programs to run.
STOPPING Equipment initiates a cleanup
to remove the completed ISEM
job and process program.
Normal completion of the run.
6
PROCESS The equipment has
received a STOP
command.
STOPPING The equipment unloads the
material and brings the
equipment to a “safe state.”
Data is typically preserved and
is valid.
SEMI 30.1-0200 © SEMI 1998, 2000 10
Transi-
tion #
Previous State Trigger New State Actions Comments
7
PROCESS The equipment has
received an ABORT
command.
ABORTING The equipment is put in a “safe
state” if necessary.
Data may be invalid or not
available.
8
PROCESS An alarm occurs. ALARM
PAUSED
PROCESS activity is
suspended, and the equipment
is waiting for all alarms to be
cleared.
ALARM PAUSED is a
PAUSE Sub-State.
9
PROCESS The equipment has
received a PAUSE
command.
PAUSING PROCESS shall be suspended
at the next opportunity.
Actions to put the equipment
in a “safe state” will be
performed.
This transition is required if
the user wants to make
changes to the current process
program being executed.
10
PROCESS
PAUSE
The equipment has
received a RESUME
command.
Previous
PROCESS
State
Proceed with the suspended
process Sub-State.
If a RESUME command is
received in the CHECKING
state, then the PP-UPDATE
command is canceled. Some
equipment may only allow
RESUME remote command
from the PAUSE state.
11
CHECKING The equipment has
validated “all”
requested updates to
the current process
program being
executed; changes are
done before entering
into the next state.
Previous
PROCESS
State
Verification is appropriate in
this state to check the changes
made to the process program
updated.
If an alarm occurs in the
CHECKING state, then the
PP-UPDATE command is
canceled.
12
STOPPING The equipment
cleanup is complete,
and the equipment is
free of alarms.
IDLE Equipment waits for a
command/or determines if
there is a ISEM job queued.
IDLE state entry requires that
no process program is selected.
13
PAUSE The equipment has
received a STOP
command.
STOPPING The equipment proceeds with
cleanup.
Normally, data is preserved
and is valid.
14
PAUSE The equipment has
received an ABORT
command.
ABORTING Any unsafe condition is
resolved if possible.
Data may be invalid or not
available.
15
STOPPING The equipment has
received an ABORT
command or an alarm
was received while
STOPPING.
ABORTING Any unsafe condition is
resolved if possible.
Data may be invalid or not
available.
16
ABORTING Unsafe conditions
have been resolved
where possible.
ABORTED The equipment is waiting for
alarm and ABORT conditions
to be cleared.
The only state change allowed
is to IDLE.
17 ABORTED All alarms and abort
conditions have been
cleared.
IDLE Equipment is waiting for a
command (PP-SELECT, PP-
ASSIGN, or MAP-
CARRIER).
If needed, the CLEANUP
command clears the abort
conditions. IDLE state entry
requires that no ISEM job or
process program be selected.
18 IDLE An alarm is set. IDLE with
ALARMS
The equipment waits for all
alarms to be cleared.
None
19 IDLE with
ALARMS
All alarms have been
cleared.
IDLE None IDLE is free of alarms.
SEMI 30.1-0200 © SEMI 1998, 200011
Transi-
tion #
Previous State Trigger New State Actions Comments
20 PAUSING The equipment has
achieved a “safe state.”
PAUSED The equipment is waiting for a
command (PP-UPDATE,
RESUME, STOP, or
ABORT).
None
21 PROCESS
PAUSED
An alarm is set. ALARM
PAUSED
The equipment waits for all
alarms to be cleared or for a
STOP or ABORT command.
None
22 ALARM
PAUSED
All alarms are cleared. PAUSED The equipment is waiting for a
command (RESUME, PP-
UPDATE, STOP, or ABORT).
None
23 LOAD Material transfer to
processing location is
complete.
WORKING The substrate is being
processed.
None
24 WORKING The processing of the
specific material being
processed successfully
completed.
UNLOAD This material is transferred
from the processing location.
Normal completion of the
substrate.
25 UNLOAD The material unload is
complete.
LOAD The equipment returns to
LOAD and determines if
processing is complete, if not,
transfers the next substrate to
the processing location.
None
26 WORKING The processing of the
specific material being
processed abnormally
ended.
UNLOAD This material is transferred
from the processing location.
Error exit from WORKING.
Data may be invalid.
27 ALIGN The material alignment
is complete, and
inspection is required.
INSPECT The equipment determines if
another region needs to be
inspected.
This transition is to the
INSPECT SETUP Sub-State
of INSPECT.
28 INSPECT
SETUP
All inspect setup
activity is complete,
and the inspection is
not complete.
INSPECT
REGION
The equipment inspects the
current alignment region.
None
29 INSPECT
REGION
The region inspection
has ended.
INSPECT
SETUP
The equipment determines if
another region needs to be
inspected.
None
30 INSPECT
SETUP
Inspection of this
alignment group is
complete.
INSPECT
COMPLETE
The equipment determines if
(a) additional alignment areas
are required to do more
inspections, (b) the recipe on
this material is complete, or (c)
a review of the current
alignment area is required.
The next transition is
conditional.
31 INSPECT
COMPLETE
The inspection of this
alignment area ended,
and additional
inspections may be
required.
ALIGN An inspection group is
complete, and additional
inspections may be required.
None
32 ALIGN The material alignment
is complete, and
review is required.
REVIEW The material is reviewed. This transition is to the
REVIEW SETUP Sub-State of
REVIEW.
33 REVIEW
SETUP
Anomaly data is
needed to perform the
review.
ACQUIRE
ANOMALY
DATA
Anomaly data is being
acquired.
Anomaly data may come from
the host or equipment.