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SEMI M29-1296 © SEMI 1996, 2003 12 5.6 Clamp — Dimensions of a clam p are shown in Figure 16 a nd Table 6. Figure 16 Clamp Table 6 Dimensions of Clamp Unit: mm Standardized Dimension Location 13 Wafers 25 Wafers CL1 100 …
SEMI M29-1296 © SEMI 1996, 2003 11
5.5.2 Rear Retainer — Dimensions of a rear retainer are shown in Figure 15 and Table 5.
Figure 15
Rear Retainer
Table 5 Dimensions of Rear Retainer
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
RR1 110 ± 1 ←
RR2 184 ± 2 304 ± 3
RR3 157 ± 2 ←
RR4 19.5 ± 1 ←
RR5 27 ± 1 ←
RR6 10 ± 0.5 ←
RR7 20 ± 0.5 ←
RR8 23 ± 2 ←
RR9 25 ± 1 ←
RR10 15 ± 5 ←
RR11 5 ± 0.5 ←
SEMI M29-1296 © SEMI 1996, 2003 12
5.6 Clamp — Dimensions of a clamp are shown in Figure 16 and Table 6.
Figure 16
Clamp
Table 6 Dimensions of Clamp
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
CL1 100 ± 10 ←
CL2 95 ± 2 ←
CL3 45 ± 2 ←
CL4 25 ± 1 ←
CL5 10 max ←
CL6 20 ± 5 ←
CL7 40 ± 10 ←
5.7 Gasket — A gasket is a part to be mainly designed with maker’s know-how regarding its material and form. In
addition, this is frequently revised for increase of quality.
5.7.1 Since there is no practical problem so long as its position is decided, the gasket is not defined. However, it
should be provided in the area defined in Sections 5.3.3 and 5.4.3.
SEMI M29-1296 © SEMI 1996, 2003 13
APPENDIX 1
APPLICATION NOTES
NOTICE: This appendix was approved as a part of SEMI M29 by full letter ballot procedure.
A1-1 Heat-Resistant Temperature
A1-1.1 Parts defined herein are not considered to be used under high temperature because it is assumed to be used
under the usual conditions. As for operating temperature of each part, information from its maker should be
confirmed.
A1-2 Orientation of Wafers in Transportation
A1-2.1 It is necessary to vertically keep wafers in transportation. Therefore, it is necessary to clarify vertical
holding indicated on buffering material and carton boxes.
A1-3 Using Procedure
A1-3.1 The procedure for using a shipping box defined in this document is shown in Figure A1-1.
Figure A1-1
Example of Procedure for Using a Shipping Box
A1-4 Maximum Dimensions and Attached Location of Label
A1-4.1 In case it is necessary to attach a label on a shipping box, the label should be attached in the area shown in
Figure 18 and Table A1-1, and hence, a designer of a shipping box should not provide a projection in this area.