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SEMI S18-1102 © SEMI 2002 23 RELATED INFORMATION 3 EXAMPLES OF SIMPLIFIED VALV E AND PIPING DIAGRAM FOR GAS SUPPLY NOTICE: This Related Information is not an official balloted part of SE MI S 18. It is i nc l uded t o as…

SEMI S18-1102 © SEMI 2002 22

R2-2.5 Provide explosion venting for gas cabinets and enclosures to limit overpressure inside gas cabinets and

enclosures to 0.25 psig (1.7 kPag). Explosion venting can be provided by door panels, windows, louvers or exhaust

duct openings. Size explosion venting to satisfy both the requirements for line inventory pressure (Figure R2-2a) and

for the volume of the enclosure (or cabinet) (Figure R2-2b).

‘Semiconductor Fabrication Facilities’

Figure R2-2a

Vent Area Requirement for Prompt Ignition of Silane Releases as a Function of Initial Line Pressure

‘Semiconductor Fabrication Facilities’

Figure R2-2b

Vent Area Requirements for Ignition of Silane Releases at Shut-Off as a Function of Enclosure Volume

SEMI S18-1102 © SEMI 2002 23

RELATED INFORMATION 3

EXAMPLES OF SIMPLIFIED VALVE AND PIPING DIAGRAM FOR GAS

SUPPLY

NOTICE: This Related Information is not an official balloted part of SEMI S18. It is included to assist the user of

the document in understanding effective control systems. Publication is authorized by vote of the responsible

committee.

Vacuum

Generator

Supply

Vacuum

Generator

Valve

Vacuum

Generator

To Vent

Low Pressure

Vent Valve

To Process

Low Pressure

Gas Valve

2 Stage

Regulator

High Pressure

Gas Valve

Purge

Gas

Purge Gas

Valve

Automatic

Cylinder Valve

High Pressure

Vent Valve

Figure R3-1

Gas Supply System

NOTICE: SEMI makes no warranties or representations as to the suitability of the guideline set forth herein for any

particular application. The determination of the suitability of the guideline is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. This guideline is subject to change without notice.

The user’s attention is called to the possibility that compliance with this guideline may require use of copyrighted

material or of an invention covered by patent rights. By publication of this guideline, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

guideline. Users of this guideline are expressly advised that determination of any such patent rights or copyrights,

and the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI S19-1102 © SEMI 2002 1

SEMI S19-1102

SAFETY GUIDELINE FOR TRAINING OF SEMICONDUCTOR

MANUFACTURING EQUIPMENT INSTALLATION, MAINTENANCE AND

SERVICE PERSONNEL

This safety guideline was technically approved by the Global Environmental, Health, and Safety Committee

and is the direct responsibility of the North American Environmental, Health, and Safety Committee. Current

edition approved by the North American Regional Standards Committee on August 29, 2002. Initially

available at www.semi.org September 2002; to be published November 2002.

1 Purpose

1.1 Provide guidance to the employer for

environmental, health and safety proficiencies.

NOTE 1: The “employer” is determined by regulation or by

contact.

1.2 Establish specific learning objectives which, when

fulfilled, demonstrate a baseline level of environmental,

health and safety (EHS) proficiency.

1.3 Identify quality control, documentation and record

keeping criteria for the management of EHS training

programs.

2 Scope

2.1 This document applies to the EHS training of

personnel servicing, maintaining, installing or

otherwise providing semiconductor equipment support.

2.2 All elements of this guideline are necessary for

declaring conformance to the guideline.

2.3 This safety guideline does not purport to address all

of the safety issues associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 This guideline is not intended to apply to trades

used in the facility construction and remodeling, or

provision of building or facility services to

semiconductor equipment.

3.2 The guideline provided herein is not intended to

represent an all inclusive or exhaustive identification of

the EHS training required for personnel within the

scope of this guideline.

3.3 Depending on the hazards, additional training or

certifications, specific to the task or the area hazards,

may be required.

4 Referenced Standards

4.1 ANSI Documents

ANSI Z490.1 — Criteria for Accepted Practices in

Safety, Health and Environmental Training

NOTE 2: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

5 Terminology

5.1 Definitions

5.1.1 authorized employee(s) — persons trained and

proficient in performing a hazardous energy isolation

(lockout/tagout) procedure on an energy source

ensuring that the energy isolating device and the

equipment being controlled cannot be operated until the

locking device is removed.

5.1.2 instructor or facilitator — an individual with

appropriate technical expertise and experience,

authorized by the employer to deliver, or facilitate the

delivery of, a course module or set of modules and

capable of addressing student questions in a timely

manner.

5.1.3 learning objective — written statement of the

desired knowledge, skill, or ability to be demonstrated.

5.1.4 qualified employee(s) — persons trained and

proficient in the equipment and operation to be

performed, including recognition of the hazards and

necessary protective measures.

5.1.5 training — an activity which assists an individual

in fulfilling the learning objectives.

6 Core Curriculum

6.1 The employer is responsible for ensuring that the

employee’s EHS training is based on a needs

assessment or the results of hazards analyses. The

subject matter in this section is considered the

minimum basic curriculum for training personnel

within the limitations of this guideline.

1 American National Standards Institute, New York Office: 11 West

42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900;

Fax: 212.398.0023 Website: www.ansi.org