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SEMI C16-0299 © SEMI 1997, 2005 2 7 Detection Limits 7.1 If a detection l i mit is rep orted, the specific m ethod or publ ished vari ant by which the detect ion limi t was obtained, sho uld be named. The l evel of the l…
SEMI C16-0299 © SEMI 1997, 2005 1
SEMI C16-0299 (Reapproved 0305)
GUIDE FOR PRECISION AND DATA REPORTING PRACTICES
This guide was technically approved by the Global Liquid Chemicals Committee and is the direct
responsibility of the North American Liquid Chemicals Committee. Current edition approved by the North
American Regional Standards Committee on November 4, 2004. Initially available at www.semi.org January
2005; to be published March 2005. Originally published in 1997; previously published February 1999.
1 Purpose
1.1 To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process
Chemicals or Gases SEMI specification.
2 Scope
2.1 This guide applies to data collected to support establishment of a SEMI Process Chemicals or Gases
specification or verification of performance to such a SEMI specification.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards
3.1 SEMI Standard
SEMI C1 Specifications for Reagents
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Terminology
None.
5 Standards
5.1 For each standard used in the study, the following should be reported:
5.1.1 Preparation method before analysis (e.g., dilution, evaporation).
5.1.2 Sample matrix.
5.1.3 Concentration.
5.1.4 n = number of determinations made on the standard.
5.1.5 The average of the n determinations.
5.1.6 The standard deviation of the n measurements (if n > 1).
5.1.7 Range of values observed (if n > 1).
5.1.8 Traceability of the standard.
5.1.9 If standard was produced internally, how was it produced.
6 Samples
6.1 For all reported sample results, including recovery studies, use as many of the reporting requirements for
standards as are applicable.
SEMI C16-0299 © SEMI 1997, 2005 2
7 Detection Limits
7.1 If a detection limit is reported, the specific method or published variant by which the detection limit was
obtained, should be named. The level of the lowest standard used in determination of a detection limit should be
reported.
8 Internal Standards
8.1 For procedures calling for concentration of an analyte by cryogenic trapping, acid extraction, distillation,
hydrolization, etc., a recovery study as per Method Validation (§3.14 of SEMI C1) is required. For a method to be
viable, a recovery in the range of 75–125% is recommended.
9 Calibration Models
9.1 The span of the calibration data should include the relevant specification.
9.2 The form of the calibration model (line through origin, line, etc.) should be stated. The assumption of linearity,
underlying reliance on two point (zero and span) calibrations for analytical instruments, should be justified by
reporting the basis for such an assumption.
9.3 A list of which standards were used to develop the calibration model should be provided.
9.4 Information on which fitting technique was used (i.e., regression using ordinary least squares, weighted least
squares, partial least squares) should be provided.
9.5 Identify which, if any, transformations were applied to the calibration data prior to the fitting of the calibration
model.
9.6 Identify which response was modeled to establish calibration (i.e., peak area, peak height, response factor).
9.7 A list of the types of standards employed (i.e., internal standards, external standards, method of standard
addition) should be provided.
9.8 Report how the calibration data is incorporated in producing the results of an analysis (i.e., zero and span
correction, graph).
10 Method Precision
10.1 An estimate of method precision should be provided at the level of the specification. Any known interferants
or factors which may affect method precision should be stated.
11 Summary
11.1 Since only a minimal set of guidelines is provided, those using this guide are encouraged to provide more
detail or use more stringent guidelines than those suggested.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
ACETIC ACID SEMI C18-0301 © SEMI 1978, 20011
SEMI C18-0301
SPECIFICATION FOR ACETIC ACID
This specification was technically approved by the Global Process Chemicals Committee and is the direct
responsibility of the North American Process Chemicals Committee. Current edition approved by the North
American Regional Standards Committee on October 17, 1999. Initially available at www.semi.org February
2001; to be published March 2001. This document replaces SEMI C1.1 in its entirety. Originally published
in 1978; previously published June 1999.
1 Purpose
1.1 The purpose of this document is to standardize
requirements for acetic acid used in the semiconductor
industry and testing procedures to support those
standards. Test methods have been shown to give
statistically valid results. This document also provides
guidelines for grades of acetic acid for which a need has
been identified. In the case of the guidelines, the test
methods may not have been statistically validated yet.
2 Scope
2.1 The scope of this document is all grades of acetic
acid used in the semiconductor industry.
2.2 These standards do not purport to address safety
issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 None.
4 Referenced Standards
4.1 SEMI Standards
SEMI C1 — Specifications for Reagents
4.2 ASTM Standards
1
ASTM D5127 — Standard Guide for Ultra Pure Water
Used in the Electronics and Semiconductor Industry
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 None.
6 Physical Property (for information only)
Density at 25°C
1.05 g/mL
NOTE 2: This material freezes at about 16°C.
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohocken, Pennsylvania 19428-2959, USA.
Telephone: 610.832.9585, Fax: 610.832.9555. Website:
www.astm.org
7 Requirements
7.1 The requirements for acetic acid for Grade 1 are
listed in Table 1.
8 Grade 1 Procedures
NOTE 3: Each laboratory is responsible for verifying the
validity of the method within its own operation.
8.1 Assay — Place 15 mL (15.8 g) of sample in a 20 ×
150 mm test tube in which is centered an accurate
thermometer. The sample tube is centered by one or
more stoppers in an outer tube about 38 × 20 mm. Cool
the entire apparatus, without stirring, in a bath of
shaved or crushed ice and sufficient water to immerse
the outer tube above the level of the acetic acid. When
the thermometer temperature is about 13°C stir to
induce freezing and read the thermometer every half
minute. The temperature that remains constant for 1 to
2 minutes is the freezing point and should not be below
16°C, indicating not less than 99.7% as CH
3
COOH.
8.2 Color — Dilute 2.0 mL of platinum-cobalt stock
solution (APHA No. 500) to 100 mL with water.
Compare this standard (APHA No. 10) with 100 mL of
sample in Nessler tubes. View vertically over a white
background. The sample must be no darker than the
standard.
8.3 Residue after Evaporation — Evaporate 95 mL
(100 g) of sample in a tared porcelain or silica dish to
dryness on a steam bath in a hood. Dry at 105°C for 30
minutes, cool in a desiccator, and weigh (see SEMI C1,
Section 3.3, Determination of Residue After
Evaporation).
8.4 Solubility in Water — Mix 10 mL of sample with
30 mL of water. Allow to stand 1 hour. The solution
should be as clear as an equal volume of water.
8.5 Chloride — Dilute 9.5 mL (10 g) of sample with
10 mL of water. Add 1 mL of silver nitrate reagent
solution and evaporate to dryness on a steam bath in a
hood. Dissolve the residue in 0.5 mL of ammonium
hydroxide, dilute with 20 mL of water and add 1.5 mL
of nitric acid. Any turbidity produced should be no
greater than that produced when 0.01 mg of chloride
ion (Cl) is treated as the sample.