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SEMI E127-0705 © SEMI 2003, 2005 13 11.2.2 The IMM Service state model shows its availability for process jobs. It has two states, IN SERVICE and NOT IN SERVICE. The IMM shall only a ccept or initiat e process jobs while…

SEMI E127-0705 © SEMI 2003, 2005 12

Integrated

Measurement

Module

Subsystem

1...*

0...*

Substrate

Transfer Path

0...*

Clock

0...*

IMM Data

Table

Substrate

Location

Substrate

0...*

occupied by

0...*

Process

Job

Recipe

manages

uses

contains

0...*

provides

manages

provides

Figure 1

IMM Object Model

10.1.3 The IMM has exactly one internal clock. It must have one or more measurement subsystems capable of

holding one or more substrates in a substrate location. It may have additional components, such as OCR

subsystems. Pattern recognition and analysis subsystem typically do not hold any material. The Clock shall be

provided as an OBEM-compliant clock object. Subsystems shown in Figure 1 are not required to be visible as

objects externally.

11 The Integrated Measurement Module Object

11.1 Relationship of IMM Object And Physical Module

11.1.1 The IMM object represents the IMM module and all of its internal components to its client. It is responsible

for ensuring proper behavior in all cases. In this document, the IMM object is considered synonymous with the

IMM module. The IMM provides all services to the client other than those specifically directed to the STPO,

including those specified by other SEMI standards.

11.2 IMM Service State Model

11.2.1 The IMM is either in a state where it can be used for normal measuring purposes or it is not. This is

reflected in the Service State Model as shown in Figure 2.

SERVICE

IN SERVICE

EXTERNAL

SELECT

INTERNAL

SELECT

NOT IN

SERVICE

Figure 2

IMM Service State Model

SEMI E127-0705 © SEMI 2003, 2005 13

11.2.2 The IMM Service state model shows its availability for process jobs. It has two states, IN SERVICE and

NOT IN SERVICE. The IMM shall only accept or initiate process jobs while in the IN SERVICE state.

11.2.3 State Definitions

11.2.3.1 IN SERVICE — In this state, the IMM is capable of performing all its normal activities for measurement. It

is able to accept and execute a process job or may be currently executing a process job. No faults or exceptions exist

that would interfere with its capability of loading, measuring, and unloading a substrate.

11.2.3.2 NOT IN SERVICE — In this state, the IMM shall not accept new process jobs or initiate execution of

existing process jobs. It may be able to perform special services required for maintenance and diagnostics, including

calibration and associated loading/unloading activities. Either the external Control Client or the IMM may put it in

an NOT IN SERVICE state. Once put into NOT IN SERVICE, only the one who put it NOT IN SERVICE may

change the state back to IN SERVICE. This is reflected in the two substates, EXTERNAL SELECT and

INTERNAL SELECT.

11.2.3.3 EXTERNAL SELECT — The Control Client has placed the IMM out of service.

11.2.3.4 INTERNAL SELECT — The IMM has placed itself out of service due to a fault condition.

11.2.4 Service State Model Transitions — Transitions are defined for the Service State Model in Table 1.

Table 1 Service State Model Transitions

# Previous State Trigger New State Comment

1 (no state) IMM initialization. IN SERVICE

or NOT IN

SERVICE

Initial state is determined first by existence of

exceptions or alam conditions. If none, then

initial state shall be the last known state.

2 IN SERVICE The IMM detects one of the conditions

for NOT IN SERVICE

The IMM client has issued a

ChangeService request.

NOT IN

SERVICE

Transitions 2 and 4 are combined for reporting

purposes.

3 NOT IN

SERVICE

The IMM or communications partner

has returned the IMM to IN SERVICE.

IN SERVICE

4 System

initialization

IN SERVICE

Entry into NOT IN SERVICE:

4-1 Following system initialization,

4-2 IMM initiated state change, and

4-3 Client requested state change.

EXTERNAL

SELECT

(trigger 4-3)

or INTERNAL

SELECT

(triggers 4-1 or

4-2)

Transitions 2 and 4 are combined for reporting

purposes.

11.2.5 The Control Client may request a state change through a Service request at any time.

11.2.6 A transition to OUT OF SERVICE shall not interrupt any process job currently executing. It is

recommended that all transitions to OUT OF SERVICE be delayed until such process jobs have completed, either

normally or abnormally. This avoids confusion or an unintended internally-generated abort of process jobs. Process

jobs must be aborted separately and deliberately when necessary.

11.3 Object Attributes

11.3.1 Table 2 defines the attributes of the IMM Object as shown in Figure 3.

Table 2 IMM Object Attribute Definitions

Attribute Name Definition Access Reqd Form

ObjType Defines object type. RO Y Text = “EquipmentModule”

ObjID Identifier of specific module. RO Y Conforms to requirement of ObjID

(SEMI E39).

Attribute Name Definition Access Reqd Form

EventList List of event name/event number pairs. RO Y List of text/integer pairs.

RetentionRules Retention Rules supported by the IMM. RO Y List of 0+ conditions.

Service Current status of the Service State Model. RO Y Enumerated:

InService

NotInService

SubstrateList A list of zero or more ObjID for all substrates

currently within the IMM, regardless of

location.

RO Y List of 0+ text.

TableCapacity Indicates maximum number of tables that may

be stored.

RO Y Integer.

TableCount Indicates number of tables currently stored. RO Y Integer.

TableStorageAlert Remaining table storage capacity. Either the

number of additional tables that can be stored

(integer) or the remaining percentage of total

capacity (floating point) available. When

remaining capacity reaches this value, the

Table Storage Capacity Warning event

message is sent.

RO Y Integer or floating point

IMM

EventList: list of text/integer pairs

RetentionRules: list of retention rule

Service: enumeration

SubstrateList: list of text

TableCapacity: integer

TableCount: integer

TableStorageAlert: integer or float

ChangeService

ClientConnect

ClientDisconnect

RequestRetentionConditions

SetAutoTableSend

SetRetentionConditions

TableRequest

TableSend

Figure 3

IMM Object

11.3.2 The attribute EventList identifies all of the errors that may be generated by the IMM object. Each such event

shall have both a descriptive name and a numeric identifier, each of which shall be unique within the EventList list.

11.3.3 The attribute TableCapacity identifies the maximum number of tables that the IMM is capable of storing.

The client may use this information for determining its own retention rules.

11.3.4 Retention Conditions — A question of concern to the IMM is the method of determining when a data table is

no longer required. Each client is able to select individual conditions for retaining raw data and conversion tables.

These conditions are the client-selected RetentionRules.

11.3.4.1 The IMM has a RetentionRules attribute that lists the specific retention rule elements supported by the

IMM (see Table 3 for definitions of retention rule elements). An empty (null) list signifies that there are no

retention rules that can be met to cause the table to be either deleted or retained.

11.3.4.2 The IMM maintains a list of rules for each client. This is a single level or two level list of rules from the

RetentionRules list. This list is available on the RequestRetentionRules request by the client and is not publicly

available as an attribute.