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SEMI D42-0305 © SEMI 2005 3 Symbol Used Definition Specification H1 Bottom surface of mask substrate to the inside of the case body  50 mm H2 Top of mask substrate to the top of the case body 10 mm  ,  15mm NOTICE: SE…

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SEMI D42-0305 © SEMI 2005 2
Figure 1
Handling Volume for Ultra Large Size Mask Substrate used in LCD Manufacturing Process
Table 1 Symbols Outline
Symbol
Used
Definition Specification
A1 Exclusion Volume (Handling Volume) Defined by X1, X2, X3, W1, Y1, Y2, Y3, W2, H1, and H2
A2 Exclusion Volume (Handling Volume) Defined by X1, X2, X3, W1, Y1, Y2, Y3, W2, H1, and H2
X Long Side Length of Mask Substrate Defined by the Substrate Size
Y Short Side Length of Mask Substrate Defined by the Substrate Size
X1 Center of Long Side Length of Mask Substrate
to the edge of A1 volume
75 mm
X2 Center of Long Side Length of Mask Substrate
to the inside of A2 volume
165 mm
X3 Center of Long Side Length of Mask Substrate
to the outside of A2 volume
350 mm
W1 Edge of Long Side Length of Mask Substrate to
the inside of the case
70 mm
Y1 Center of Short Side Length of Mask Substrate
to the edge of A1 volume
75 mm
Y2 Center of Short Side Length of Mask Substrate
to the inside of A2 volume
165 mm
Y3 Center of Short Side Length of Mask Substrate
to the outside of A2 volume
350 mm
W2 Edge of Short Side Length of Mask Substrate to
the inside of the case
80 mm
SEMI D42-0305 © SEMI 2005 3
Symbol
Used
Definition Specification
H1 Bottom surface of mask substrate to the inside
of the case body
50 mm
H2 Top of mask substrate to the top of the case
body
10 mm , 15mm
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