semi合集-English.pdf - 第3112页

SEMI E125-0305 © SEMI 2003, 2005 20 10.4.11.9. 1 If other Parameters are affe cted by this Parameter’s settings, all suc h affected Parameters shall ha ve a corresponding Associated Parameter instance provided with the C…

100%1 / 7923
SEMI E125-0305 © SEMI 2003, 2005 19
occurs. Providing a mechanism to describe the lifecycle for transient Parameters using metadata is beyond the scope
of this specification.
10.4.11.4 ReadWrite — This abstract class identifies a Parameter as being settable by an external entity. The
settings for such Parameters may influence the values or dynamics of other Parameters. For example, Parameters
corresponding to E30 “equipment constants” may be set by an external entity, and so would be classified as
ReadWrite. Parameters corresponding to E30 “status variables” or “data values” cannot be set by external entities,
so would not be classified as ReadWrite.
10.4.11.5 ReadWrite Association Definition Table
Table 29 ReadWrite Association Definition
Association Role Name Definition Comments
affectedParameters A list of associated Parameters that are affected
by the settings of this Parameter.
Unordered list of structured data, of type
AssociatedParameter.
10.4.11.5.1 affectedParameters
10.4.11.5.1.1 If the Parameter’s settings directly affect the values or dynamics of other Parameters elsewhere in the
metadata, an AssociatedParameter instance must be provided and described for each such relationship for the
Parameter being defined. Other generic associations may exist for the Parameter, but the specific associations that
arise from the settings of the Parameter’s value must be accessible through the affectedParameters association
provided by this base class unless otherwise specified in this document.
10.4.11.6 ReadOnly — This abstract class identifies a Parameter as being un-settable by an external entity. Its
value, however, is accessible to external entities. This class has no attributes or associations. For example,
Parameters corresponding to E30 “status variables” or “data values” cannot be set by an external entity, and so
would be classified as ReadOnly. Parameters corresponding to E30 “equipment constants” can be set by external
entities, so could not be classified as ReadOnly.
10.4.11.7 Data — This class is derived from ReadOnly, and identifies a Parameter as providing data values. If non-
transient, (for example, Parameters corresponding to E30 “status values”), the data values are accessible and
meaningful at all times. If transient, (for example, Parameters corresponding to E30 “data values”), the data values
are not guaranteed to be meaningful except when they are explicitly provided with the occurrence of specific events
or, if they represent attributes of an SEMI E39 ObjType, when the corresponding ObjType has at least one active
instance. This class defines no attributes or associations.
10.4.11.8 Control — This is derived from ReadWrite, and identifies a Parameter as being settable by an external
entity (for example, Parameters corresponding to recipe settings). Changes in the values of a Control Parameter
affect the way in which the equipment processes, measures, or tests material and may affect the values of other
Parameters. This class defines no attributes or associations.
10.4.11.8.1 If other Parameters are affected by this Parameter’s settings, all such affected Parameters shall have a
corresponding AssociatedParameter instance provided with the Control Parameter’s definition. Each such
AssociatedParameter instance shall be accessible via the “affectedParameters” association of this class (inherited
from ReadWrite).
10.4.11.8.2 If non-transient, the values of this Parameter are accessible and meaningful at all times, and can be set
by an external entity under conditions determined by the equipment.
10.4.11.8.3 If transient, the values of this Parameter are not guaranteed to be meaningful or settable at all times. If
the Parameter represents an attribute of an SEMI E39 ObjType, the Parameter will only be settable when the
corresponding ObjType has at least one active instance.
10.4.11.9 Configuration — This class is derived from ReadWrite, and identifies a Parameter as being settable by an
external entity, and in some way influencing equipment behavior and/or the values of other Parameters, but is not
considered a control Parameter (for example, E30 “equipment constants” used for configuring equipment
communication timeouts, etc.). This class defines no attributes or associations.
SEMI E125-0305 © SEMI 2003, 2005 20
10.4.11.9.1 If other Parameters are affected by this Parameter’s settings, all such affected Parameters shall have a
corresponding AssociatedParameter instance provided with the Configuration Parameter’s definition. Each such
AssociatedParameter instance shall be accessible via the “affectedParameters” association of this class (inherited
from ReadWrite).
10.4.11.9.2 If non-transient, the values of this Parameter are accessible and meaningful at all times, and can be set
by an external entity under conditions determined by the equipment.
10.4.11.9.3 If transient, the values of this Parameter are not guaranteed to be meaningful or settable at all times. If
the Parameter represents an attribute of an SEMI E39 ObjType, the Parameter will only be settable when the
corresponding ObjType has at least one active instance. This class defines no attributes or associations.
10.5 Parameter Types
10.5.1 Parameter Type Definitions
10.5.1.1 Figure 11 shows a class that can be used to describe re-usable Parameter data types. Parameter type
definitions can be re-used elsewhere in the metadata wherever a Parameter’s type can be declared. See Related
Information Section R5-1 for some examples using the ParameterTypeDefinition class.
ParameterType
name
des cription
ParameterTypeDefinition
typeInformation
11
Figure 11
Describing Type Definitions
10.5.1.2 Parameter TypeDefinition — Serves as a class for naming and providing a re-usable description of a
primitive or composite type. For example, a Parameter TypeDefinition could define a re-usable Parameter type
named “KelvinTemperature” of type RealType, with Kelvin units and 4 digits of precision. A composite parameter
TypeDefinition can be a named Array, Enumeration, or Structure. Each kind of primitive and composite Parameter
type is described fully in subsequent sections of this document. ParameterTypeDefinition can be re-used in the
definition of other ParameterTypeDefinitions, recursively within the same ParameterTypeDefinition, and in the
definition of Parameters (see Section 10.4 ).
10.5.1.3 The primitive Parameter type description classes are defined in Section 10.5.2 ; composite type description
classes are defined in Section 10.5.3 .
10.5.1.3.1 ParameterTypeDefinition Attribute Definition Table
Table 30 ParameterTypeDefinition Attribute Definition
Attribute Name Definition Required Form
name The name for the re-usable type definition. Y Text, must be unique across all
ParameterTypeDefinitions.
description A description of the meaning or purpose of the
type definition.
Y Text.
SEMI E125-0305 © SEMI 2003, 2005 21
10.5.1.4 ParameterTypeDefinition Association Definition Table
Table 31 ParameterTypeDefinition Association Definition
Association Role Name Definition Comments
typeInformation The type description. One and only one element of any type description
class derived from ParameterType.
10.5.1.5 ParameterType — An abstract base class from which all type description classes are derived. This class
has no attributes or associations.
10.5.2 Primitive Parameter Type Descriptions
10.5.2.1 Metadata describing types must include a mechanism for describing primitive or single-valued, types such
as integers and strings in the type system being used. The specific simple or primitive types that should be provided
are typically determined by the implementation technology that will be used to communicate values of the declared
type (for example, SECS-II, XML, OMG IDL, etc.). The primitive types described here should be considered a
minimum set that could be refined and extended to work best with the type system in use. Any specification that
translates these types into a specific type system shall define how it has mapped these primitive types into the
technology-specific type system, and shall fully specify any additional primitive type description classes beyond
those defined here.
ParameterType
IntegerType
digitsOfPrecision
RealT ype
language
maxCharacters
StringType BooleanType BinaryType
Unit
units
0..* 1
units
0..*1
UnitConfig
units1
2..*
units1
2..*
{XOR}
{XOR}
Figure 12
Describing Primitive Parameter Types
10.5.2.2 Figure 12 shows a basic set of classes that can be used to describe primitive Parameter types. The numeric
classes representing integer and real numbers can specify their associated units, and real number types can specify
the number of digits of precision. Strings can describe the associated language and a maximum number of
characters, if applicable.
10.5.2.3 IntegerType — Represents an integer type, and associated units.
10.5.2.4 IntegerType Association Definition Table
Table 32 IntegerType Association Definition
Association Role Name Definition Comments
units The available units specified for this type. Either:
One and only one element of type Unit
or:
Two or more elements of type UnitConfig, if the
type supports configurable units.