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SEMI E54.1-1000 © SEMI 1996, 2000 41 1292 MicroAm ps 1293 NanoAm ps 1294 PicoAm ps 1295 FemtoAm ps 1296 KiloAmps 1297 MegaA mps 1298 GigaA mps 1300 Ohms 1301 MilliOhms 1302 MicroOhms 1303 NanoOhm s 1304 PicoOhm s 1305 Fe…
SEMI E54.1-1000 © SEMI 1996, 2000 40
APPENDIX 1
DATA UNIT ENUMERATION
NOTE: This appendix was approved as an official part of SEMI E54.1 by full letter ballot procedure.
The Data Units data type term is defined in Section 5.2.
The following is a partial enumeration of that data type;
further enumeration may be provided in an application-
specific context.
Table A1-1 General
Data Units Description
0 Counts
1 Counts per Second
2 Counts per Millisecond
3 Counts per Microsecond
4 Counts per Minute
5 Counts per Hour
6 Counts per Day
7 Percent
8–191 Reserved
192–255 Open
Group 1 — Time and Frequency (256–511)
Table A1-2 Time and Frequency
Data Units Description
256 Seconds
257 Milliseconds
258 Microseconds
259 Minutes
260 Hours
261 Days
262 Hertz
263 KiloHertz
264 MegaHertz
265 GigaHertz
266–447 Reserved
448–511 Open
Group 2 — Temperature (512–767)
Table A1-3 Temperature
Data Units Description
512 Centigrade/Celsius
513 Fahrenheit
514 Kelvin
515–703 Reserved
704–767 Open
Group 3 — Pressure (768–1023)
Table A1-4 Pressure
Data Units Description
768 PSI
769 Torr
770 MilliTorr
771 mm Hg (0°C)
772 inches Hg (0°C)
773 cm H
2
O (25°C)
774 inches H
2
O (25°C)
775 Bar
776 MilliBar
777 Pascal
778 KiloPascal
779 Atmosphere
780–959 Reserved
960–1023 Open
Group 4 — Flow (1024–1279)
Table A1-5 Flow
Data Units Description
1024 SCCM
1025 SLM
1026 CFM
1027 Pa-m
3
/s
1028–1215 Reserved
1216–1279 Open
Group 5 — Electrical (1280–1535)
Table A1-6 Electrical
Data Units Description
1280 Volts
1281 MilliVolts
1282 MicroVolts
1283 NanoVolts
1284 PicoVolts
1285 FemtoVolts
1286 KiloVolts
1287 MegaVolts
1288 GigaVolts
1290 Amps
1291 MilliAmps
SEMI E54.1-1000 © SEMI 1996, 200041
1292 MicroAmps
1293 NanoAmps
1294 PicoAmps
1295 FemtoAmps
1296 KiloAmps
1297 MegaAmps
1298 GigaAmps
1300 Ohms
1301 MilliOhms
1302 MicroOhms
1303 NanoOhms
1304 PicoOhms
1305 FemtoOhms
1306 KiloOhms
1307 MegaOhms
1308 GigaOhms
1310 Farads
1311 MilliFarads
1312 MicroFarads
1313 NanoFarads
1314 PicoFarads
1315 FemtoFarads
1320 Henries
1321 MilliHenries
1322 MicroHenries
1323 NanoHenries
1324 PicoHenries
1325 FemtoHenries
1326–1471 Reserved
1472–1535 Open
SEMI E54.1-1000 © SEMI 1996, 2000 42
APPENDIX 2
ERROR RESPONSES
NOTE: This appendix was approved as an official part of SEMI E54.1 by full letter ballot procedure.
The following is a listing of common service error
responses. The details of presentation of these
responses over the network (such as response codes) are
network-specific and, thus, are not part of this
document. Also, note that there may be additional
service error responses delineated in the appropriate
SDM specification or manufacturer specification.
A2-1 Error Responses
A2-1.1 Resource Unavailable — Resources needed for
the object to perform the requested service are
unavailable.
A2-1.2 Service Not Supported — The requested
service is not implemented or is not defined for this
Object Class/Instance.
A2-1.3 Invalid Attribute Value — Invalid attribute data
detected.
A2-1.4 Already in Requested Mode/State — The object
is already in the mode/state being requested by the
service.
A2-1.5 Object State Conflict — The object cannot
perform the requested service in its current mode/state.
A2-1.6 Attribute Not Settable — A request to modify a
non-modifiable attribute was received.
A2-1.7 Device State Conflict — The device’s current
mode/state prohibits the execution of the requested
service.
A2-1.8 Service Parameter Data Not Complete — Not
enough data supplied with the service request.
A2-1.9 Attribute Not Supported — The attribute
specified in the request is not supported.
A2-1.10 Too Much Data for Service Parameters —
The service supplied more data than was expected.
A2-1.11 Object Does Not Exist — The object specified
does not exist in the device.
A2-1.12 Vendor-Specific Error — Vendor-specific
error.
A2-1.13 Invalid Service Parameter — A parameter
associated with the request was invalid.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
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suitability of the standards set forth herein for any
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instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
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patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
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