semi合集-English.pdf - 第3699页

SEMI PR8-0703 © SEMI 2003 29 1) Contr ol Job relat ed 1. Control Job ID 2. CarrierInputSpec: Carrier I D list 3. ProcessingCtrlSpec: PRjob list 4. ProcessOrderMgmt: PRjob execution sequence 5. MtrlOutSpec: W afer orig in…

SEMI PR8-0703 © SEMI 2003 28

R3-1.1.3 Equipment Health Monitoring from Analog Data and Low Level Equipment Data

R3-1.1.3.1 This example describes a health check of vacuum level for each wafer.

Step Description

Assortment 1 Input is analog data from vacuum gauge and time stamp will be given.

Assortment

2-1

Input is detailed equipment event data, and pump down sequence is detected for starts and ends, and these events

are linked with JOB information and with carrier ID, slot ID and so on.

Assortment

2-2

The vacuum level is compared with reference data per wafer so as to examine if there is vacuum level

deterioration.

Storage Vacuum level data, its consequence or context, and the result of judgment are stored for a certain period of time.

This provides subscription function from the higher level application.

Report Application acquires the result, and this application has viewer output function.

Scenario Function/application in equipment Higher level applications

Scenario 1 Low level data such as detailed equipment event data is

given timestamp.

Pump down sequence is detected for starts and ends,

compare with reference data per wafer so as to detect

any problem.

Problem will be reported.

Scenario 3 Pump down sequence is detected for starts and ends,

compare with reference data per wafer so as to detect

any problem.

Acquire result of malfunction detection from equipment.

Show the result.

R3-1.1.4 Data Available from EDA Port

R3-1.1.4.1 The data available from the EDA port contains some reporting information such as EPT. These reports

are high-level equipment management information utilized by the fab-wide productivity monitoring application.

Logical model based data includes the status, for example, of the load port, or job status (CJ and PJ). These data

have the data life cycle of scenario #3.

R3-1.1.4.2 The other type of the data available from the EDA port is equipment data such as I/O status, sensor data,

and all the equipment constants. These data have the data life cycle of scenarios #1 and #3.

R3-1.1.4.3 Both areas of data should be available for efficient equipment management and OEE improvement.

Data covered and value added by

EPT , ST S, A R AM S Stan dard s an d

gLogical Model Based Datah

gEle m en ta ry Da tah

and health monito ring

I/O even ts, Sen sor data, equipment

con stan ts and such

Data covered and value added by

EPT , ST S, A R AM S Stan dard s an d

CJ/PJ

Ho st view d ata fo r

Equipment M anagement

Logical Model Based Data

Ele m en ta ry Da ta

Eq u ip men t view data fo r diag no stics

Life Cycle Scenario 3

Life Cycle Scenario 1, 3

I/O even ts, Sen sor data, equipment

con stan ts and such

Se ttin g Da ta

Valu es to control

Eq uip m en t so to

perform intended

process

Data covered and value added by

EPT , ST S, A R AM S Stan dard s an d

gLogical Model Based Datah

gEle m en ta ry Da tah

and health monito ring

I/O even ts, Sen sor data, equipment

con stan ts and such

Data covered and value added by

EPT , ST S, A R AM S Stan dard s an d

CJ/PJ

Ho st view d ata fo r

Equipment M anagement

Logical Model Based Data

Ele m en ta ry Da ta

Eq u ip men t view data fo r diag no stics

Life Cycle Scenario 3

Life Cycle Scenario 1, 3

I/O even ts, Sen sor data, equipment

con stan ts and such

Se ttin g Da ta

Valu es to control

Eq uip m en t so to

perform intended

process

Figure R3-2

Data Available from EDA Port

R3-1.1.4.4 In the case where the equipment sends out equipment data right after “assortment 1”, the application

above EDA interface needs to have such functions as to link the equipment data with JOB information, to compare

the data with some threshold values, or to calculate for statistic data abstraction. JOB information, the setting values

which may be described in the recipes or used in the equipment internally, the equipment control structure, or the

data naming conventions are to be made available through EDA port or some other means.

R3-1.1.4.5 The data that are supposed to be made available through the EDA port are listed below.

SEMI PR8-0703 © SEMI 2003 29

1) Control Job related

1. ControlJob ID

2. CarrierInputSpec: Carrier ID list

3. ProcessingCtrlSpec: PRjob list

4. ProcessOrderMgmt: PRjob execution sequence

5. MtrlOutSpec: Wafer origin and target specification

2) PR Job related

1. PRJobID

2. PRMtlType: Unit of material

3. PRMtlNameList: material name list

4. RecID

5. RecVariableList: Variable parameter name list and values

6. PRProcessStart: start method

NOTE 1: If process condition is changed, the content is to be reported for the name of parameters and values.

3) Recipe related

1. Recipe ID

2. Recipe body (detailed content)

3. Setting value data the equipment use internally for each of the process control devices (temperature

controllers, mass flow controllers and such)

RELATED INFORMATION 4

MESSAGE EXAMPLES

NOTICE: This related information is not an official part of SEMI PR8. This related information is not intended to

modify or supersede the official proposed standard. Determination of the suitability of the material is solely the

responsibility of the user.

R4-1 Example EDA Messages

R4-1.1 This section provides simple examples of each of the EDA messages defined in the specification. HTTP

headers are shown in full only for the IsEdaEnabled request. Thereafter, only the SOAPAction header is shown for

brevity.

R4-1.2 Data Management Messages (supported by the equipment)

R4-1.2.1 IsEdaEnabled Request

POST /EDAEquipmentService HTTP/1.1

User-Agent: Mozilla/4.0 (compatible; MSIE 6.0; MS Web Services Client Protocol

1.0.3705.0)

Content-Type: text/xml; charset=utf-8

SOAPAction: "urn:semi-org:ws:eda_ps_v0.0:IsEdaEnabled"

Content-Length: 433

Expect: 100-continue

Connection: Keep-Alive

Host: localhost

<?xml version="1.0" encoding="utf-8" ?>

<soap:Envelope xmlns:soap="http://schemas.xmlsoap.org/soap/envelope/"

xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"

xmlns:xsd="http://www.w3.org/2001/XMLSchema">

<soap:Header>

<To>urn:robofurnace:zippo:furnace-00899</To>

<From>urn:icm:equipment.client:app-1</From>

</MessageHeader>

</soap:Header>

<soap:Body>

<Supplier>RoboFurnace, Inc.</Supplier>

<Model>Zippo 355</Model>

</EquipmentID>

</IsEdaEnabled>

</soap:Body>

</soap:Envelope>