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SEMI E19.4-0998 E © SEMI 1992, 2003 2 5.2.7 pod do or — a removable bottom for the pod that contains a means for proper ly positio ning the cassette. 5.2.8 pod latch — a mechanical latch that holds the pod door to the po…

SEMI E19.4-0998

(Reapproved 0703)

200 mm STANDARD MECHANICAL INTERFACE (SMIF)

This standard was technically reapproved by the Global Physical Interfaces & Carriers Committee and is the

direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition

approved by the North American Regional Standards Committee on March 12, 2003. Initially available at

www.semi.org May 2003; to be published July 2003. Originally published in 1992; previously published

March 2003.

NOTICE: The user’s attention is called to the

possibility that compliance with this standard may

require use of an invention covered by patent rights. By

publication of this standard, Semiconductor Equipment

and Materials International (SEMI) takes no position

with respect to the validity of any patent rights asserted

in connection with any item mentioned in this

document. Users of this document are expressly advised

that determination of any such patent rights, and the

risk of infringement of such rights, are entirely their

own responsibility.

1 Purpose

1.1 A standard interface is required for containers

intended to control the transport environment of

cassettes containing substrates. The interface must

address the proper container orientation for material

transfer and maintain continuity between the container

and equipment environment in order to control

particulate matter.

2 Scope

2.1 This specification describes one approach to

interfacing a clean cassette transport box to a clean

environmental housing on a piece of semiconductor

processing equipment or to other clean environments.

The system concept involves mating a door on a

cassette container to a door on an equipment enclosure

and transferring the cassette into, and out of, the

equipment without exposing the cassette and substrates

to outside contamination.

2.2 The incorporation of this standard may require

equipment designers to include the features of the

interface into the tool design. Spacing between open

cassette ports must be considered when incorporating

this interface. Designers are directed to the

specifications and recommendations made in SEMI E15

in this regard.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This standard is specific to 200 mm wafers. This

specification focuses on applications in which the

interface port is positioned horizontally. The standard is

focused exclusively on the box-to-canopy interface.

Other considerations of box and equipment design are

purposely excluded.

NOTE 1: Hewlett Packard has patent coverage for this

concept and is offering non-exclusive licenses on an equal

basis to any company. Companies intending to manufacture

products to this standard should be aware of Hewlett

Packard' s position.

4 Referenced Standards

4.1 SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E19 — Standard Mechanical Interface (SMIF)

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 (See Figure 1 for a pictorial depiction of most

terms.)

5.2 Definitions

5.2.1 box — a protective portable container for a

cassette and/or substrate(s).

5.2.2 cassette — an open structure that holds one or

more substrates (wafers, masks, etc.).

5.2.3 guide rail — a component of a port plate that

provides coarse location for placing the pod on the port

assembly.

5.2.4 hold-down latch — a mechanism for locking the

pod to the port plate.

5.2.5 latch pins — pins that engage the pod door latch

and accomplish the pod door lock/unlock functions.

Latch pins are carried by the port door.

5.2.6 pod — a box having a Standard Mechanical

Interface per SEMI E19.

SEMI E19.4-0998

5.2.7 pod door — a removable bottom for the pod that

contains a means for properly positioning the cassette.

5.2.8 pod latch — a mechanical latch that holds the

pod door to the pod until activated by the latch

mechanism pins. Upon activation, the pod door is

released from the pod.

5.2.9 pod latch holes — holes near the center of the

pod door bottom which accept the latch pins.

5.2.10 port assembly — an assembly of the port plate

and port door that includes the guide rails, registration

pins, latch pins, and pod hold-down latches.

5.2.11 port door — a door for the port plate opening

that provides a mating surface for the bottom of the pod

door when the pod is in place on the port plate. The port

door contains the registration pins and the pod door

latch pins.

5.2.12 port plate — a horizontal mating surface for the

base of the pod that provides a seal surface for the

bottom surface of the pod perimeter. The port plate

contains the guide rails and the pod hold-down latches.

5.2.13 registration holes — holes in the bottom of the

pod door that fit over registration pins in the top of the

port door when the pod is placed on the port door.

5.2.14 registration pins — pins that provide fixed

position and orientation between the port door and pod

door and assist in the final positioning of the pod on the

port assembly. The registration pins fit into the

registration holes in the bottom of the pod door.

6 Requirements

NOTE 2: The requirements and dimensions for the design of

mechanical interface standard ports and pods are given in this

section. See Table 1 for 200 mm (8 inch) Port Dimensions.

6.1 Cassette Sizes — All specifications are related to

200 mm wafers held in an appropriate cassette. It is

understood that smaller diameter wafers and other

substrates may be contained in pods which are

compatible with this standard.

6.2 Port Design Requirements — The general design

of the port is shown in Figures 2 and 3. Design

requirements for the interface components are provided

in Sections 6.2.1 through 6.2.5.

6.2.1 Port Door — Dimensions A1 through A3 specify

the port door top view. The gap between port door and

port plate is not specified, but should be kept to a

minimum distance to restrict particle movement.

6.2.2 Pod Guide — The inside distance of the corner

guides of the port is specified by B1 and B2. The length

of the corner is specified by B12. The corner guides

may be connected by guide rails if desired.

6.2.3 Latch Pins — Two latch pins are located around

the port door center. For location of the pins, see C1,

C2, and C3.

6.2.4 Registration Pins — The three registration pins

on the port door are located asymmetrically, and spaced

by dimensions D1 through D4. The size of the pins is

specified by D5 through D7.

6.2.5 Pod — The bottom surfaces of the pod body and

pod door shall conform to the specified port

dimensions. The upper part of the pod body and top

surface of the pod door must fit and hold in place the

cassette for 200 mm (8 inch) wafers. Although the pod

dimensions are not explicitly specified by this standard,

the following requirements apply:

6.2.5.1 The bottom surfaces of the pod door at its

perimeter shall match the dimensions of the port door

top (A1 through A3). The tolerances shall be chosen so

that the pod door does not extend over the port door in

any instance, even when the port door is built to its

minimal acceptable dimensions and potential variance

between registration pins and holes is considered. This

is to ensure an interference-free passage of the pod door

through the port opening.

6.2.5.2 The base of the pod body shall fit freely but

with close tolerance between the guide rails (B1, B2,

and B9), which not only hold the pod in place while the

port is open, but also provide proper alignment for

closure of the pod at the end of the open/shut cycle.

6.2.5.3 The bottom surface of the pod requires three

registration holes to engage with the registration pins on

the port. The registration pins shall be positioned in the

door bottom so that the registration pins prevent seating

of the pod with the port in the event that the pod is

improperly rotated by 180 degrees from the correct

orientation. The correct orientation is illustrated in

Figure 2.

6.2.5.4 The perimeter of the bottom surface of the pod

body shall be continuous and shall be positioned against

the port surface. This positioning assures the activation

of an optional limit switch, placed in an unspecified

location along the port perimeter, for the sensing of

proper pod placement.

6.2.5.5 The center of the cassette crossbar shall

coincide with the center of the pod door, with the

cassette oriented as shown in Figure 2. The top surface

of the pod door requires the registration bars that hold

the cassette in place. The horizontal cassette movement

is limited by the tolerances G2. The vertical position of

the cassette while located on the pod door is specified

by the distance G1 between the top of the port surface

and the bottom surface of the cassette.

SEMI E19.4-0998

6.2.5.6 A pod hold-down latch is required. The available latch area is specified by dimension B11 in Figure 2. Latch

detail dimensions are specified in Figure 3.

6.2.5.7 The pod latch holes have a dimension of I1 perpendicular to the plane connecting both holes.

6.2.5.8 Positions for latches are identified in Figure 2 by positions 1, 2, 3, and 4. The following options for hold-

down latch positions are defined by this specification:

Option A Positions 1 and 2

Option B Positions 3 and 4

Option C Positions 1, 2, 3, and 4

7 References

The following articles describe the standard mechanical interface concept:

“The Challenge to Control Contamination: A Novel Technique for the IC Process,” The Journal of Environmental

Sciences (May/June 1984), page 23.

“SMIF, A Technology for Wafer Cassette Transfer in VLSI Manufacturing,” Solid State Technology (July 1984),

page 111.

The complete specification for this interface includes all general requirements of SEMI E19.

Table 1 Port Dimensions for 200 mm (8 inch) Wafer Cassette

Feature Dimension Label Metric English

Port Door A1 135.84 mm ± 0.13 mm (5.348 in. ± 0.005 in.)

A2 131.06 mm ± 0.13 mm (5.160 in. ± 0.005 in.)

A3 13.08 mm ± 0.25 mm (0.515 in. radius ± 0.010 in.)

A4 0.38 mm ± 0.13 mm (0.015 in. ± 0.005 in.)

Guide Rails B1 146.48 mm ± 0.13 mm (5.767 in. ± 0.005 in.)

B2 141.71 mm ± 0.13 mm (5.579 in. ± 0.005 in.)

B5 29.97 mm maximum (1.18 in. maximum)

B7 16 mm minimum (0.630 in. minimum)

B8 45° maximum (45° maximum)

B9 22.22 mm radius maximum (0.875 in. radius maximum)

B10

B11 50.8 mm maximum (2.00 in. maximum)

B12 26.9 mm minimum (1.06 in. minimum)

Latch Pins C1 16° ± 0° 30' (16° ± 0° 30' )

C2 86° ± 0° 30' (86° ± 0° 30' )

C3 26.72 mm ± 0.05 mm (1.052 in. diameter ± 0.002 in.)

C4 3.175 mm ± 0.025 mm (0.125 in. diameter ± 0.001 in.)

C6 9.14 mm ± 0.25 mm (0.360 in. ± 0.010 in.)

C7 Full Spherical Radius Full Spherical Radius

Registration Pins D1 183.39 mm ± 0.25 mm (7.22 in. ± 0.010 in.)

D2 91.69 mm ± 0.13 mm (3.610 in. ± 0.005 in.)

D3 231.78 mm ± 0.25 mm (9.125 in. ± 0.010 in.)

D4 116.59 mm ± 0.13 mm (4.590 in. ± 0.005 in.)