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SEMI S13-0305 © SEMI 1998, 2005 16 R5-5.4 Operation, maintena nce, and test procedu res for fire s uppression and alarm sy stem should be described. R5-5.5 A list of any special appa ratus needed to t est the fire detect…

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SEMI S13-0305 © SEMI 1998, 2005 15
RELATED INFORMATION 5
DOCUMENT CRITERIA WHICH MAY BE DISCUSSED IN A FUTURE
REVISION OF SEMI S2
NOTICE: This related information is not an official part of SEMI S13 and was derived from the work of the SEMI
S13 Revision TF. This Related Information was approved for publication by a letter ballot on November 24, 2004.
R5-1 Purpose of this Related Information
R5-1.1 This related information contains criteria for documents that relate to technical criteria that may be
discussed for a future revision of SEMI S2.
R5-1.2 The criteria in this related information are not included in SEMI S2 as of the time this related information
was written, but are newly suggested as necessary criteria for determining whether the documents provided to the
equipment user conform to SEMI S13.
R5-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S2.
NOTE 1: It was the intent of the Task Force responsible for SEMI S13 that the criteria in this related information be
incorporated in a future revision of SEMI S2 and that this related information be removed from SEMI S13 by revising SEMI S13
with the same effective date as the effective date of the addition of these criteria to SEMI S2.
R5-2 Safety Interlock
R5-2.1 The equipment supplier should describe the safety interlocks provided as part of the equipment and their
function in a list in the documents provided to the equipment user. The interlock list should include the hazards
against which they protect, type of sensors/actuators used, the type of interlock circuit (e.g. hardware or software,
etc.), and equipment conditions after the interlocks are activated.
R5-2.2 The equipment supplier should describe how to restore each interlock and put equipment or parts of the
equipment back to operation after an interlock is activated.
R5-2.3 The locations of sensors and actuators used for safety interlocks protecting personnel should be described.
R5-2.4 Calibration and testing procedures and frequencies should be provided for all sensors and detectors which
require calibration and testing to be conducted by the user. Where applicable, gases used for calibration and test
apparatus should be identified.
R5-3 Emergency Shutdown
R5-3.1 The documents provided to the equipment user should describe the function and operation of the EMO
circuit that is provided as part of the equipment.
R5-3.2 The locations of EMO buttons should be described.
R5-4 Environmental Information
R5-4.1 Maintenance Procedures with Potential Environmental Impacts — The supplier’s recommended
maintenance procedures should:
identify procedural steps during which releases might occur, and the nature of the releases; and
identify waste characteristics and methods to minimize the volume of effluents, wastes, or emissions generated
during maintenance procedures.
R5-5 Fire Protection Information
R5-5.1 Information of fire protection should be written in the documents provided to the equipment user.
R5-5.2 The following ¶¶R5-5.2.1 to R5.5.2.3 apply only if the equipment includes the features to which the
information relates.
R5-5.3 Operation, maintenance and test procedures for fire detection and alarm system should be described.
SEMI S13-0305 © SEMI 1998, 2005 16
R5-5.4 Operation, maintenance, and test procedures for fire suppression and alarm system should be described.
R5-5.5 A list of any special apparatus needed to test the fire detection or suppression features of the equipment
should be provided. The list should note whether the apparatus is included with the equipment, or is sold separately.
R5-6 Industrial Hygiene Information
R5-6.1 Byproducts expected from the baseline process should be described.
R5-6.2 Documents provided to the equipment user should describe any exposure risk that is present.
R5-6.3 Methods for reducing exposure risk during performance of tasks (e.g., use of portable exhaust, use of
respirators, use of portable detection equipment to warn the worker) should be described.
R5-6.4 Radiation including ionizing (e.g., implanters, static elimination bars, X-ray) and non-ionizing (e.g., lasers,
Ultraviolet, infrared, RF, EMF) should be described.
SEMI S13-0305 © SEMI 1998, 2005 17
RELATED INFORMATION 6
DOCUMENT CRITERIA WHICH MAY BE DISCUSSED IN A FUTURE
REVISION OF SEMI S6
NOTICE: This related information is not an official part of SEMI S13 and was derived from the work of the SEMI
S13 Revision TF. This related information was approved for publication by a letter ballot on November 24, 2004.
R6-1 Purpose of this Related Information
R6-1.1 This related information contains criteria for documents that relate to technical criteria that may be
discussed for a future revision of SEMI S6.
R6-1.2 The criteria in this related information are not included in SEMI S6 as of the time this related information
was written, but are newly suggested as necessary criteria for determining whether the documents provided to the
equipment user conform to SEMI S13.
R6-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S6.
NOTE 1: It was the intent of the Task Force responsible for SEMI S13 that the criteria in this related information be
incorporated in a future revision of SEMI S6 and that this related information be removed from SEMI S13 by revising SEMI S13
with the same effective date as the effective date of the addition of these criteria to SEMI S6.
R6-2 Equipment Parameter Change
R6-2.1 Documents provided to the equipment user should describe changing any parameter of the systems in the
equipment (e.g., changing exhaust monitoring set points, working with portions of the enclosure removed) may
cause an unexpected condition.