semi合集-English.pdf - 第7640页
SEMI T5-96 © SEMI 1996, 2004 3 6.2 If t he optional special code characters are use d to indicate doping, surface orient ation, the sy mbols shown in Table 4 will be employed. Table 4 Special Code Charact ers Parameter C…
SEMI T5-96 © SEMI 1996, 2004 2
Figure 1
Character Outline
Table 1 Character Dimensions and Spacing —
Configuration A — 3”, 100 mm, 125 mm, 150 mm
Character (mm)
Height 1.624 ± 0.025
Width 0.812 ± 0.025
Thickness
0.200 + 0.050
Spacing 1.420 ± 0.025
Minimum Separation 0.400
Table 2 Configuration B — 2”, Option for 3” Wafers
Character (mm)
Height 0.812 ± 0.025
Width 0.406 ± 0.025
Thickness 0.100 ± 0.050
Spacing 0.710 ± 0.025
Minimum Separation 0.104
NOTE 3: The thickness of the diagonal in the letter “N” is
0.138 ± 0.05 mm for single density dot matrix.
5.3 SEMI OCR Standard Character Set — See Figure
2 and Appendix 1.
Figure 2
Standard Character Set
6 Alphanumeric Code
6.1 Code — Limited to one line of 20 characters
maximum (see Figure 3 and Table 3 for an example
using 15 characters). The first five to ten characters are
an identification number which is unique to the ingot
for a given supplier. This is followed by a dash, which
is followed by three digits which indicate the wafer
number, as numbered starting from the seed end of the
ingot. The next two alpha characters identify the
vendor according to SEMI AUX001. The last optional
characters are specified by the vendor or customer. For
example, these characters could be used to differentiate
specifications, orientation, or doping. The character
string (using a five character ingot as example) is
constructed as follows:
Table 3 Vendor identification code
Character # Character Style Parameter Definition
1 - 5 Alphanumeric Ingot number Supplier-
assigned
6 Alpha dash a spacer
7 - 9 Numeric Wafer number Number of
wafer in ingot
10 - 11 Alpha only Vendor
Identification
Code
See SEMI
AUX001
12 - 15 Alphanumeric Optional:
characters to
identify
specification(s)
Supplier- or
customer-
specified
SEMI T5-96 © SEMI 1996, 2004 3
6.2 If the optional special code characters are used to
indicate doping, surface orientation, the symbols shown
in Table 4 will be employed.
Table 4 Special Code Characters
Parameter Code Definition
Device surface orientationand flat
location
V V - Groove
D Dovetail
Dopant U Undoped
C Carbon
R Chromium
T Tellurium
I Indium
S Silicon
L Sulfur
Z Zinc
E Selenium
Front Surface Orientation 0 100
A, B 111 A or B
2 100 (2°off)
3 100 (other off
orientation)
4 other orientation
5 other flats
6.3 An example of the code is given in Figure 3.
Figure 3
Example of Code for 3" Wafer
7 Code Field Location
7.1 Code field shall be located on the polished front
surface of wafers or on the polished or etched back
surface of wafers as shown in Table 5.
7.2 Code field is located as shown in Figure 4 and
Table 6.
7.3 All characters must be contained within the code
field along the major flat. The top of the characters is
toward the side of the code field nearest the flat, see
Figure 4.
7.4 Dimensions — See Figure 4 and Table 6.
SEMI T5-96 © SEMI 1996, 2004 4
7.5 In the standard specification, the first character of the code line is located toward the left side of the code field.
Figure 4
Code Field Location for Flatted Wafers
Table 5 Location of Code Field
Wafer Diameter Location of Code Field
2" Front (standard); Back surface (alternate)
3" Front (standard); Back surface (alternate)
100 mm Front surface
125 mm Front surface
150 mm Front surface
Table 6 Code Field Location and Dimensions
Parameter (mm) 2" 3" 3" 100 mm 125 mm 150 mm
Configuration Character Dimension(See
Tables 1 and 2)
B B A
#1
A A A
L min 14.23 19.05 19.05 30.0 40.0 55.0
x 7.1 9.5 9.5 15.0 20.0 27.5
w 14.0 14.0 19.0 27.0 27.0 27.0
d 1.0 1.0 1.0 1.0 1.0 1.0
h 1.4 1.4 2.4 2.4 2.4 2.4
#1: For 3" wafers, only 13 characters are allowed due to limitations on the size of the code field.