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SEMI T12-0305 © SEMI 2004, 2005 44 R3-2.3 Tracing Data of an Attachmen t and Hitting Expiration Host Equipme n t S14F19 ( GSR ) S14F20 ( GSA ) Ack n ow l ed g e upd at e: (use-time in crement) S14F19 ( GSR ) S14F20 ( GSA…

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SEMI T12-0305 © SEMI 2004, 2005 43
RELATED INFORMATION 3
AN EXAMPLE ON EQUIPMENT WITH SECS-II, GEM AND OSS
NOTICE: This related information is not an official part of SEMI T12 and was derived from the work of the
originating task force. This related information was approved for publication by full letter ballot procedures on
January 9, 2004.
R3-1 Example with GEM plus OSS
R3-1.1 This example is a possible implementation of attachment tracking capabilities “Acquisition of Minimum
Tracking Information”, “Action on Expiration” and “Identification and Verification of Attachments” with SEMI E5
(SECS-II), SEMI E30 (GEM) and SEMI E39 (OSS).
R3-1.2 Object base system modeling and OSS has been recognized recently by equipment users especially in 300
mm fabs as handy tools to access data on equipment because the allows accessing unit by object rather than all
values or just one data.
R3-2 Example Scenario
R3-2.1 An example scenario consists of verification of attachment/setting up expiry, tracing data of an attachment
and hitting expiration.
R3-2.2 Verification of Attachment/Setting up Expiry
Host
Equipment
S14F9 (COR)
S14F10 (COA)
Sendin
g
Invoice
A
cknowled
g
e
S6F11
(
ERS
)
S6F12
(
ERA
)
Acknowled
g
e
Invoice object has
been created
S6F11
(
ERS
)
S6F12
(
ERA
)
Acknowled
g
e
Secondment object
has been created
A
n attachment
has arrived
Equipment verifies
and it is ri
g
ht one.
Expiry objects has
been created, using
Invoice information
S14F19
(
GSR
)
S14F20
(
GSA
)
Acknowled
g
e
update:
(
De
p
loied
)
HistoryBuffer object
has been created
Figure R3-1
SEMI T12-0305 © SEMI 2004, 2005 44
R3-2.3 Tracing Data of an Attachment and Hitting Expiration
Host
Equipment
S14F19
(
GSR
)
S14F20
(
GSA
)
Acknowled
g
e
update:
(use-time increment)
S14F19
(
GSR
)
S14F20
(
GSA
)
Acknowled
g
e
update:
(
Ex
p
iration event
)
S6F11
(
ERS
)
S6F12
(
ERA
)
Acknowled
g
e
Equipment Stops
because expired
S5F1
(
ARS
)
S5F2
(
ARA
)
Acknowled
g
e
A
larm Raised
S5F1
(
ARS
)
S5F2
(
ARA
)
Acknowled
g
e
A
larm Cleared
S14F19
(
GSR
)
S14F20
(
GSA
)
Acknowled
g
e
update:
(
C
y
cle Increment
)
S6F11
(
ERS
)
S6F12
(
ERA
)
Acknowled
g
e
Exception object
has been created
Figure R3-2
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particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
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the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI T12.1-0704 © SEMI 2004 1
SEMI T12.1-0704
SPECIFICATION FOR SECS PROTOCOL FOR TRACKING JIGS AND
IMPLEMENTS
This specification was technically approved by the Global Traceability Committee and is the direct
responsibility of the Japanese Traceability Committee. Current edition approved by the Japanese Regional
Standards Committee on April 30, 2004. Initially available at www.semi.org June 2004; to be published July
2004.
1 Purpose
1.1 The purpose of this document is to map Services and data in Specification of Tracking Jig and Implements into
SECS protocol.
2 Scope
2.1 This document is applied to SECS implementation of Jigs and Implements traceability with some
interoperability with semiconductor Manufacturing Execution System (MES).
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)
SEMI E39 — Object Service Standard: Concepts, Behavior and Services
SEMI T12 — Specification for Tracing Jigs and Implements
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Requirements
4.1 Service Mapping — This specification maps service instructions defined in “Specification for Jigs and
Implements” into SECS stream/functions as follows. Supporting Class names specified in the following table are
used as OBJSPEC or a part of OBJSPEC to request services.
Table 1 Service Message Instruction Mapping
Service Message Name Supporting Class Stream, Function SECS-II Message Name
addEvent HistoryRecord S14, F19/F20 Generic Service Request / Response
adopt HistoryDB S14, F19/F20 Generic Service Request / Response
changeAction Expiry S14, F19/F20 Generic Service Request / Response
changeDescription Expiry S14, F19/F20 Generic Service Request / Response
changeExpiration Expiry S14, F19/F20 Generic Service Request / Response
changeName Attachment, PublicLocation,
Secondment
S14, F19/F20 Generic Service Request / Response
changeNamespace Inventory S14, F19/F20 Generic Service Request / Response
destrcut Exception, Expiry, HistoryBuffer,
HistoryRecord, Secondment
S14, F19/F20 Generic Service Request / Response
disown HistoryDB S14, F19/F20 Generic Service Request / Response
fluctuate HistoryRecord S14, F19/F20 Generic Service Request / Response
install Inventory S14, F19/F20 Generic Service Request / Response
listEvent HistoryRecord S14, F19/F20 Generic Service Request / Response