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SEMI F64-0701 © SEMI 2001 12 Time 0 Flo w 10X MFC Indicated Flow DUT Indicated Flow DUT Actual Flow Figure 11 Plots Test M etho d D Table 1 Data Pr esentation for Method B (see A ppendix 1) PC o = ______ ____% of FS/ psi…

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SEMI F64-0701 © SEMI 200111
Figure 9
Method C Flowchart
DUT
x units Gas
P
P
MFM
Flow Standard
P
MFC
10x DUT Gas
P1
P2
P3
Figure 10
Test Schematic for Method D
SEMI F64-0701 © SEMI 2001 12
Time
0
Flo
w
10X MFC Indicated Flow
DUT Indicated Flow
DUT Actual Flow
Figure 11 Plots
Test Method D
Table 1 Data Presentation for Method B (see Appendix 1)
PC
o
= __________% of FS/psi
@ 50% FS @ FS
PC
A
(% of reading/psi)
SEMI F64-0701 © SEMI 200113
APPENDIX 1
NOTE: The material in this appendix is an official part of SEMI F64 and was approved by full letter ballot procedures on April
30, 2001 by the Facilities Regional Standards Committee.
A1–1 Data Analysis: Method A-1
Table A1–1 Sample Data Sheet: Methods A-1 and A-2
Date: ________________ Time: __________
D.U.T. # ________________ Ambient Temp __________°C
Standard Flow Device:________________
Full Scale:________________ sccm
Ramp Rate (Method A-2) ______________kPa/sec
Time (sec) P1 (psig) Q
A
(sccm) Q
I
(sccm)
0 25.01 50.00 50.01
0.05 25.01 50.01 50.01
0.10 25.02 50.00 50.02
0.15 25.01 49.99 50.01
.
.
.
.
.
.
.
.
.
.
.
.
2.20 25.40 52.68 51.38
2.25 25.85 55.23 52.56
.
.
.
.
.
.
.
.
.
.
.
.
6.30 26.89 46.28 49.23
A1–1.1 Data Interpretation, Method A-1
A1–1.1.1
δ
Q
+
= maximum positive deviation of actual flow from nominal
δ
Q
+
= Q
max
- Q
N
where:
Q
max
= maximum value of Q
A
Q
N
= average value of Q
A
during time when P
1
= initial steady state
δ
Q
-
= maximum negative deviation of actual flow from nominal
δ
Q
-
= Q
min
- Q
N
where:
Q
min
= minimum value of Q
A