semi合集-English.pdf - 第6996页
SEMI S12-0298 © SEMI 1998 6 12.4 Other Related Documents BOCA — National Fire P revention Code publis hed by Building Officials a nd Code Ad ministration CCR 5215(c)(2)(C) — Cal/OSHA’ s 4,4’ — methylenebis (2-chloroanili…
SEMI S12-0298 © SEMI 19985
and a signed authorization from the receiver to accept
the equipment.
10.5 Equipment which is not completely
decontaminated is potentially a hazardous material.
Transfer of this equipment, including transportation,
must be in accordance with all applicable local, state,
national, and international regulations and organization
policies.
11 Documentation and Certif ications
11.1 The documentation recommended by this
guideline is in addition to that required by local, state,
national, and international regulations.
11.2 Documentation and certifications should be
securely attached in a clear, weatherproof bag and
transported with the equipment.
11.3 The following documentation and certifications
should be prepared prior to transfer of equipment:
11.3.1 A history of all hazardous materials used in the
equipment and potential by-products, including
concentrations, if known. At a minimum, list the
hazardous materials used in the tool just prior to
decontamination or transfer.
11.3.2 Documentation of the procedure used for
decontaminating the equipment, including:
11.3.2.1 the cleaning procedures used (including
chemicals used for cleaning),
11.3.2.2 liquid or gas purge procedure used,
11.3.2.3 testing procedure used to determine adequacy
of decontamination,
11.3.2.4 results of tests, and
11.3.2.5 other significant information pertinent to the
decontamination activities, including parts removed for
separate decontamination.
11.3.3 When it is likely that hazardous material
residues remain in or on the equipment, a warning must
accompany the equipment. The warning should identify
suspected hazards, state appropriate personal protective
equipment that should be worn, and precautions that
should be taken when handling the equipment.
11.3.4 Documentation should include the name and
phone number of the responsible/knowledgeable parties
in case of emergency or requirements for additional
information.
11.3.5 A certification by a responsible site
environmental, health, and safety representative that
states the equipment has been prepared for transfer
according to this guideline.
12 Related Documents
12.1 SEMI Documents
SEMI S2 — Safety Guidelines for Semiconductor
Manufacturing Equipment
SEMI S4 — Safety Guidelines for the Segregation/
Separation of Gas Cylinders Contained in Cabinets
SEMI S9 — Electrical Test Methods for Semiconductor
Manufacturing Equipment
12.2 EPA Documents
US EPA (Environmental Protection Agency) — EPA’s
“Guide for Decontaminating Buildings, Structures, and
Equipment at Superfund Sites,” EPA/600/2-85/028,
March 1985, Superintendent of Documents, US
Government Printing Office, Washington, D.C. 20402
US EPA — “Chain of Custody Procedures,” EPA/SW-
846, Superintendent of Documents, US Government
Printing Office, Washington, D.C. 20402
US EPA — Asbestos in Air Sampling, 40 CFR 763,
Subpart E, Appendix A, Federal Register
US EPA — TEST METHODS FOR EVALUATING
SOLID WASTES, EPA SW-846, Superintendent of
Documents, US Government Printing Office,
Washington, D.C. 20402
US EPA — INTEGRATED RISK INFORMATION
SYSTEM, 1994, Superintendent of Documents, US
Government Printing Office, Washington, D.C. 20402
US EPA — EXPOSURE FACTORS HANDBOOK,
1989, Superintendent of Documents, US Government
Printing Office, Washington, D.C. 20402
12.3 OSHA Documents
CFR 1910.1200 — Hazard Communication Standard –
Title 29, Federal Register, US Government Printing
Office, Washington, D.C. 20402
OSHA (Occupational Safety and Health
Administration), U.S. Department of Labor — OSHA
TECHNICAL MANUAL, CPL 2 - 2.20B, Chapter 2,
Sampling for Surface Contamination, February 5, 1990,
Superintendent of Documents, US Government Printing
Office, Washington, D.C. 20402
OSHA (Occupational Safety and Health
Administration), U.S. Department of Labor — OSHA’s
CHEMICAL SAMPLING INFORMATION,
Directorate of Technical Support, Salt Lake City
Technical Center, Superintendent of Documents, US
Government Printing Office, Washington, D.C. 20402
SEMI S12-0298 © SEMI 1998 6
12.4 Other Related Documents
BOCA — National Fire Prevention Code published by
Building Officials and Code Administration
CCR 5215(c)(2)(C) — Cal/OSHA’s 4,4’ —
methylenebis (2-chloroaniline), MBOCAA, Barclays
Law Publications, P.O. Box 3066, South San Francisco,
CA 94083-3066
NIOSH (National Institute of Occupational Safety and
Health), U.S. Department of Health and Human
Services, CDC, Public Health Service — NIOSH’s
STATISTICAL SAMPLING STRATEGIES,
Document #77-173, NTIS - PB 274792, Superintendent
of Documents, US Government Printing Office,
Washington, D.C. 20402
NIOSH (National Institute of Occupational Safety and
Health), U.S. Department of Health and Human
Services, CDC, Public Health Service — NIOSH’s
MANUAL OF ANALYTICAL METHODS, 3rd Ed.,
Superintendent of Documents, US Government Printing
Office, Washington, D.C. 20402
SBCCI — Standard Fire Prevention Code published by
Southern Building Code Conference International, Inc.
UFC (Uniform Fire Code) — Uniform Fire Code
published by International Conference of Building
Officials and Western Fire Chiefs Association, 5360
South Workman Mill Road, Whittier, CA 90601
US Nuclear Regulatory Commission — MANUAL
FOR CONDUCTING RADIOLOGICAL SURVEYS
IN SUPPORT OF LICENSE TERMINATION,
NUREG/CR-5849, ORAU-92/C57, June 1992
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
SEMI S12-0298 © SEMI 19987
RELATED INFORMATION 1
EXAMPLES OF WIPE SAMPLING PROCEDURES
NOTE: This related information is not an official part of
SEMI S12 and is not intended to modify or supersede the
official standard. It has been derived from the work of the
originating task force. Publication was authorized by full
ballot procedures. Determination of the suitability of the
material is solely the responsibility of the user.
Wipe sampling should be conducted primarily on
nonporous surfaces. “Wet” (swab or filter paper with
solvent) or “dry” (swab or filter paper without solvent)
wipe sampling techniques may be used. These
procedures are based on those contained in the US
EPA’s “Guide for Decontaminating Buildings,
Structures, and Equipment at Superfund Sites,”
EPA/600/2-85/028, March, 1985. The sample area has
been decreased in the wet wipe sampling procedure
from 0.25 m
2
to 100 cm
2
(0.01 m
2
) due to the size of
equipment and surfaces anticipated to be sampled for
this SEMI Guideline. Another relevant document on
sampling for surface contamination is contained in the
OSHA - Occupational Safety and Health
Administration, U.S. Department of Labor, OSHA
TECHNICAL MANUAL, CPL 2 - 2.20B, Chapter 2,
Sampling for Surface Contamination, February 5,
1990. Chemical-resistant gloves should be worn while
performing these procedures. Gloves should be clean to
avoid tainting the samples obtained and should be
changed between the securing of samples to avoid
cross-contamination.
R1-1 General Recommendations
R1-1.1 Assure that the marking method for the sample
container and area to be wiped will not interfere with
the intended analysis.
R1-1.2 Assure that the container will not absorb the
material being sampled or add interfering material that
will be detected during analyses.
R1-1.3 Assure that the wetting agent will not react with
the material being sampled, interfere with the analysis,
or degrade the shipping container.
R1-1.4 Should it become necessary to swipe an area
other than 100 cm
2
(e.g., a lever or knob or other part of
a tool), then record the estimated or, preferably,
measured swipe area.
R1-1.5 Submit a blank with each batch of swipe
samples. The blank is a sampling device (such as a
swipe tab) of the same type and from the same batch as
that used for the sampling and which is wetted and
handled just like the samples, but which is not rubbed
on a surface.
R1-1.6 Use appropriate personal protective equipment
during sampling.
R1-1.7 Samples should be analyzed by a competent
and appropriately certified laboratory for the hazardous
materials being evaluated.
R1-1.8 The sampling and analytical methods used
should be appropriate for the agent in question, with
the NIOSH Manual of Analytical Methods, EPA’s Test
Methods for Evaluation of Solid Wastes (EPA SW-846),
and OSHA’s Sampling and Analytical Methods being
established methodologies. If new methods are to be
developed or reviewed, they should be approved by an
industrial hygienist certified by the American Board of
Industrial Hygiene or by another appropriately certified
or registered professional.
R1-2 Wet Wipe Sampling Procedure
R1-2.1 Mark off a square area of approximately 100
cm
2
on the surface to be wiped, using a template which
is cleaned between each sampling event. If a template is
unavailable or the area to be wiped is less than 100 cm
2
,
note the exact dimensions and establish markings on the
four outer corners of the area to be wiped.
R1-2.2 Label the appropriate wet sample container
with the information listed in R1-1.5.
R1-2.3 Hold a filter paper with a clean, impervious,
gloved hand or metal clamp, and saturate the wipe with
either deionized water, isopropyl alcohol, or other
wetting agent, depending on the hazardous material to
be sampled.
R1-2.4 Wipe the sampling area starting at the outside
edge and progressing toward the center, making
concentric circles of decreasing size, applying moderate
pressure. Fold the wipe sample with the exposed side
in, and fold it over again.
R1-2.5 Carefully place the completed wipe sample in
the container for storage and transportation, without
allowing the sample to contact any other surfaces.
R1-3 Dry Wipe Sampling Procedure
R1-3.1 Label the appropriate dry sample container with
the information listed in R1-1.5.
R1-3.2 Hold a filter paper wipe with a clean,
impervious, gloved hand.
R1-3.3 Wipe the sampling area, starting at the outside
edge and progressing toward the center, making
concentric circles of decreasing size, applying