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SEMI E87-0705 © SEMI 1999, 2005 8 9.5.3 Load Port Tr ansfer State Definitions 9.5.3.1 LOAD PORT TRANSFER — The supe r state for the IN SE RVICE and OUT OF SERVICE states. 9.5.3.2 OUT OF SERVICE — Transfer to/from this lo…

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SEMI E87-0705 © SEMI 1999, 2005 7
7.4 Alarm Requirements Definition
7.4.1 An alarm requirements definition table defines the specific set of alarms required by CMS. The table is
divided up by equipment configuration, and then by alarm. The danger and affected columns are marked with “X”
characters to show each alarm and its possible impact to operators, equipment, and material. The table format is
shown in the following example:
Equipment Danger Affected
Configuration Alarm Text Potential Imminent Operator Equipment Material
Configuration 1 Alarm 1 X X X X
Alarm 2 X X
Configuration 2 Alarm 3 X X X
Alarm 4 X X X
8 Overview
8.1 CMS defines the behavior, data, and services required for equipment supporting automated carrier transfer. This
document provides a standard interface for host/equipment communications regarding the transfer of carriers. The
standardized carrier transfer host interface includes not only transfers to and from the external load ports, but also
transfers to and from the internal buffer positions on internal buffer type equipment.
8.2 Single Connection Requirement
8.2.1 The expectation of the production equipment supplier is that this standard be implemented in conjunction with
the GEM interface to their production equipment and without the use of a separate communication connection.
9 Load Port
9.1 A load port (port) is used by the factory to load and unload carriers to and from production equipment. A load
port may be used as an input load port, an output load port, or as an input/output load port, depending upon
equipment type, configuration and/or factory practices. This classification may be fixed or it may be programmable
by the user. A load port is generally designed to handle one specific carrier type, such as substrate cassettes,
leadframe magazines, SMIF pods, or FOUPs.
9.2 Load Port Numbering
9.2.1 The load port number shall be assigned incrementally from the bottom left to bottom right, then top left to top
right when facing the front of the equipment. The load port numbering requirement is to provide a common
reference base to external entities, such as humans.
9.3 Carrier Slot Numbering
9.3.1 The slot numbers for a carrier shall be assigned incrementally from the bottom, starting with “1.”
9.4 Load Port Resource Sharing
9.4.1 A model of a load port must account for any mechanical assemblies that are either active during carrier
transfer or are capable of interacting with the transfer. The load port is responsible for such mechanisms when the
load port is in the TRANSFER READY state. If these mechanisms are shared with other load ports, then the sharing
must be coordinated.
9.5 Load Port Transfer State Model
9.5.1 The purpose of the Load Port Transfer State Model is to define the host view of a carrier transfer, which
includes the host interactions with the equipment necessary to transfer carriers to and from equipment load ports.
Each load port on the equipment shall maintain an independent instance of this state model.
9.5.2 Load Port Transfer State Model Diagram
9.5.2.1 Figure 1 is the diagram for the Load Port Transfer State Model.
SEMI E87-0705 © SEMI 1999, 2005 8
9.5.3 Load Port Transfer State Definitions
9.5.3.1 LOAD PORT TRANSFER — The super state for the IN SERVICE and OUT OF SERVICE states.
9.5.3.2 OUT OF SERVICE — Transfer to/from this load port is disabled. A transition to IN SERVICE is required to
continue using this load port for transfers.
9.5.3.3 IN SERVICE — Transfer to/from this load port is enabled. A transition to OUT OF SERVICE disables the
load port for transfer use.
9.5.3.4 TRANSFER READY — A sub-state of IN SERVICE. The load port is available for carrier transfer. The
transfer can either be manual or automated, and can be a load or an unload. This state contains two sub-states, which
are used depending on whether or not a carrier is present on the load port (READY TO LOAD and READY TO
UNLOAD).
9.5.3.5 READY TO LOAD — A sub-state of TRANSFER READY. When transitioning to the TRANSFER READY
state, if a carrier is not present on the specified load port, this is the active sub-state. In this state, the load port is
available to be loaded with an external carrier, or with a carrier that is currently located inside the equipment (i.e.
internal buffer).
9.5.3.6 READY TO UNLOAD — A sub-state of TRANSFER READY. When transitioning to the TRANSFER
READY state, if a carrier is present on the specified load port, this is the active sub-state. In this state, the load port
is available for unloading of a carrier from the loadport to material handling equipment. When the load port is being
used by the equipment, the state shall transition to TRANSFER BLOCKED.
9.5.3.7 TRANSFER BLOCKED — The carrier transfer state is neither READY TO LOAD nor READY TO
UNLOAD. Because of load port related activity being performed, transfer is not available to/from this load port at
this time.
LOAD PORT TRANSFER
OUT OF SERVICE
IN SERVICE
TRANSFER BLOCKED
TRANSFER READY
READY TO
LOAD
READY TO
UNLOAD
2 3
6
8 97
10
4
C
5 C
1
H
Figure 2
Load Port Transfer State Model Diagram
SEMI E87-0705 © SEMI 1999, 2005 9
9.5.4 Load Port Transfer State Transition Table
Table 5 Load Port Transfer State Transition Definition
Num Previous State Trigger New State Actions Comments
1 (no state) System reset. OUT OF
SERVICE
or
IN SERVICE
(History)
This transition is based on what the current
transfer status was prior to system reset.
Data required to be available for this event
report:
PortID
PortTransferState
2 OUT OF
SERVICE
The host or an operator has
invoked the ChangeServiceStatus
service for this load port with a
value of IN SERVICE.
IN SERVICE Load port is now usable for transfer.
Data required to be available for this event
report:
PortID
PortTransferState
3 IN SERVICE The host or an operator has
invoked the ChangeServiceStatus
service for this load port with a
value of OUT OF SERVICE.
OUT OF
SERVICE
Load port is now rendered unusable for
transfer. Attempted usage of the load port
for carrier transfer after the state transition
results in an alarm.
Data required to be available for this event
report:
PortID
PortTransferState
4 IN SERVICE Service: The host or an operator
has invoked the
ChangeServiceStatus service for
this load port with a value of IN
SERVICE.
System Reset: This transition can
be activated by an equipment re-
initialization.
TRANSFER
READY
or
TRANSFER
BLOCKED
This is the default entry into IN SERVICE.
The state is TRANSFER BLOCKED if the
carrier, or load port, is not available for
carrier transfer. Otherwise, the state is
TRANSFER READY.
Data required to be available for this event
report:
PortID
PortTransferState
5 TRANSFER
READY
Service: The host or an operator
has invoked the
ChangeServiceStatus service for
this load port with a value of IN
SERVICE.
System Reset: This transition can
be activated by an equipment re-
initialization.
Failed Transfer: If a transfer fails,
this transition is activated by
transition #10.
READY TO
LOAD
or
READY TO
UNLOAD
When entering the TRANSFER READY
state, if a carrier is present, the sub-state is
READY TO UNLOAD, else the sub-state
is READY TO LOAD.
If the state is READY TO LOAD, data
required to be available for this event
report:
PortID
If the state is READY TO UNLOAD, data
required to be available for this event
report:
PortID
CarrierID
PortTransferState