semi合集-English.pdf - 第5152页

SEMI M31-0705 © SEMI 1998, 2005 12 human handle (optional) y 53  190 y 52 =  165.5 ± 0.5 mm (6.52 ± 0.02 in.) bilateral datum plane front side of the FOSB where wafers are accessed y 51  50 y 50  130 x 50  215 (a…

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SEMI M31-0705 © SEMI 1998, 2005 11
facial
datum plane
horizontal datum of
box nest or load
port plane
y53 190
y52 165 ± 0.5 mm
(6.52 ± 0.02 in.)
y50 130
(numbers in parentheses are for 25-wafer FOSB, if different)
y46
= 71 ± 1
y44
53
z49
8
z48
15
z47
= 210
(330)
± 1
y40
116
human
handle
(optional)
front side
of the
FOSB
where
wafers
are
accessed
y
58 75
z
41 0
z
2 2
(
at sensor
p
ads
)
d
65 =10±0.5
z
65 7
z43 = 2 ± 1
Figure 8
Side View of FOSB
bilateral datum plane
(numbers in parentheses are for 25-wafer FOSB, if different)
horizontal datum plane of
box nest or load port
x
53

195 (elsewhere)
x
46
= 71 ± 1
x
44
53
z
49
8
z
48
15
z
47
= 210
(330)
± 1
human
handle
(optional)
z
41

0
z
2

2
(at sensor pads)
z
43 = 2 ± 1
bottom rail
x
57

180
d65
= 10± 0.5
z
65 7
x
65 = 187.5
x
56 = 194.75(at bottom rail)
x
50

215 (at human handle)
Figure 9
Rear View of FOSB
SEMI M31-0705 © SEMI 1998, 2005 12
human
handle
(optional)
y53
190
y52 =
165.5 ± 0.5 mm
(6.52 ± 0.02 in.)
bilateral
datum plane
front side of the FOSB where wafers are accessed
y51
50
y50
130
x50 215 (at human handle)
x53 195 (elsewhere)
r67 240
facial
datum
plane
y40
116
y67
= 25
detail in
Figure 12
r68 271
x81 215
y82
191
y81
30
x81 215
Manual door exclusion zone
Figure 10
Top View of FOSB
SEMI M31-0705 © SEMI 1998, 2005 13
x42 = 50 ± 1
x41 = 30 ± 1
y45
=65.3± 1
y47
58
x44
53
facial
datum
plane
bilateral
datum
plane
front side of
the carrier
where wafers
are accessed
y41 = 30 ± 1
y46 =
71 ± 1
x43 = 50 ± 1
x47
58
(16x)
= 45
± 0.5°
positio
n notch
orientation
notch
x46 = 71 ± 1
x45 =
65.3 ± 1
y44 53
d63
=35 + 0.9 / -0.1
y68
55
x69 = 7.6 ± 0.1
= 60°
r63
66
top
of box
bilateral
datum plane
horizontal
datum plane
z47
= 210 (330)
[253 (373)]
± 1
position notch
d63
=35 +0.9 / -0.1
cross-
section
above
x69 = 7.6 ± 0.1
= 45 ± 1°
= 52 ± 1°
x45 = 65.3 ± 1
x46 = 71 ± 1
z49 8
z48
15
(numbers in parentheses are for 25-wafer boxes, if different)
[numbers in square brackets are for removable cassettes, if different]
z50
5
r59
6
Figure 11
Top Robotic Handling Flange