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SEMI S2-0703a E © SEMI 1991, 2004 70 Laser Control Measures 1. I dentify protective measures req uired during maintenance. _ _________________ _____________ _______________ _______________ __________________ _______ 2. L…

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RELATED INFORMATION 9
LASER CHECKLIST
NOTICE: The RI below will be withdrawn upon July 1, 2006 publication and replaced by the new sections,
figures, and Tables in Delayed Revisions Section 1. The EH&S Committee has voted that implementation of
the information is OPTIONAL before the effective date.
NOTICE: This related information is not an official part of SEMI S2 and was derived from practical application by
task force members. This related information was approved for publication by vote of the responsible committee on
October 21, 1999.
Laser Manufacturer: __________________________________
Model #: __________________________________
Serial #: __________________________________
Laser Hazard Classification: (During Operation)
1. Classification Number (e.g. 1, 2, 3a, 3b, 4): ________
2. Classification Standard(s) (e.g. FDA/CDRH, IEC, JIS, etc.): ________
NOTE R9-1: If any laser contained in the equipment is Class 2, 3a, 3b or 4 laser system or product, the vendor should make
available upon request a hazard evaluation to include the following information for each laser in the equipment (where
applicable):
Laser Parameters
1. Laser medium type (HeNe, Nd:YAG, CO
2
, Argon, Excimer, GaAs, etc.): __________
Note: For Excimer lasers, specify gases: _______________
2. Wavelength(s) in nanometers (nm): _______________
3. Continuous Wave
A. Peak Power in Watts (W): ________
B. Available Power in Watts (W): ________
C. Irradiance in Watts/square centimeter (W/cm
2
): _ ________
4. Pulse Characteristics
A. Duration of Pulse in Seconds (s): ________
B. Energy per Pulse in Joules (J): ________
C. Frequency of Pulses (Pulse Repetition Frequency) in Hertz (Hz): ________
D. Average Power in Watts (W): ________
E. Radiant Exposure in Joules/square centimeter (J/cm
2
): ________
F. Q-Switch controlled pulses ( ) Yes ( ) No
5. Beam Parameters
A. Emerging beam diameter in millimeters (mm): ________
B. Expanded beam diameter in millimeters (mm): ________
C. Beam divergence in milliradians (mr): ________
D. Collecting optics type: ________
E. Focal length in millimeters (mm): ________
SEMI S2-0703a
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© SEMI 1991, 2004 70
Laser Control Measures
1. Identify protective measures required during maintenance. __________________
____________________________________________________________________
2. Laser Controlled Area required for Maintenance procedures? ( ) Yes ( ) No
3. Laser Controlled Area required for Service procedures. ( ) Yes ( ) No
4. If a Nominal Ocular Hazard Distance (NOHD) is used as a control measure, then provide the NOHD
calculations. See IEC 60825-1 for NOHD calculations.
NOTE R9-2: Attach a diagram of the laser beam path and the irradiance/radiant exposure at each significant point.
Personnel Protective Equipment (PPE) (for laser radiation hazards in excess of the MPE)
1. Optical Density (OD) of PPE required during maintenance activities: ___________
2. OD of PPE required during service activities: ___________
3. Recommended PPE manufacturer and model #: ______________________________
Table R9-1 Equipment Safety Features
Equipment
Safety Features
(not an inclusive
list)
USA
Europe
Japan
21 CFR
1040.10
EN
60825-1
JIS 6802
Paragrap
h
Paragrap
h
Paragrap
h
Examples
1. Protective
Housing
( ) Yes
( ) No
(f)(1) 4.2 4.2.1 Aluminum or steel enclosures,
windows that provide adequate
attenuation, optical fibers or
beam tubes.
2. Safety Interlocks ( ) Yes
( ) No
(f)(2) 4.3 4.2.2 See Section 11 of SEMI S2.
3. Remote
Interlock
Connector
( ) Yes
( ) No
(f)(3) 4.4 4.2.3 Usually a 12 to 24 volt set of
contacts available to the user to
integrate additional room control
measures.
4. Key Control ( ) Yes
( ) No
(f)(4) 4.5 4.2.4 A key that is not removable in
the operations mode.
5. Laser Radiation
Emission
Warning
( ) Yes
( ) No
(f)(5) 4.6 4.2.5 A light or indicator that warns
the user of the emission through
the aperture.
6. Beam
Attenuator
( ) Yes
( ) No
(f)(6) 4.7 4.2.6 Shutters, beam blocks or water-
cooled beam dumps
7. Location of
Controls
( ) Yes
( ) No
(f)(7) 4.8 4.2.7
8. Viewing Optics ( ) Yes
( ) No
(f)(8) 4.9 4.2.8 Must block all hazardous
wavelengths to acceptable levels.
9. Scanning
Safeguard
( ) Yes
( ) No
(f)(9) 4.10 4.2.9 Shuts down if the scanning
mechanism (such as a rotating
mirror or galvanometer) fails.
SEMI S2-0703a
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© SEMI 1991, 2004 71
Equipment
Safety Features
(not an inclusive
list)
USA
Europe
Japan
21 CFR
1040.10
EN
60825-1
JIS 6802
Paragrap
h
Paragrap
h
Paragrap
h
Examples
10. Manual Reset
Mechanism
( ) Yes
( ) No
(f)(10) 4.3.1 4.2.2(c) A button or circuit that must be
energized before the equipment
resumes its functions.
11. Class
Designation &
Warning Labels
( ) Yes
( ) No
(g) 5 4.3 Identify which standard was used
for each hazard classification.
12. Aperture Label ( ) Yes
( ) No
(g)(5) 5.7 4.3.7 Identify the aperture.
13. Positioning of
Labels
( ) Yes
( ) No
(g)(9) 5.1 4.3.1 Conspicuous, but size is not
specified.
14. User
Information
( ) Yes
( ) No
(h)(1) 6.1 4.4.1 SOPs, instruction manuals
15. Service
Information
( ) Yes
( ) No
(h)(2) 6.2 4.4.2 Accessible laser radiation levels
during Service
16. Measurements ( ) Yes
( ) No
(e) 8 3.4
17. Classification ( ) Yes
( ) No
(c) 9 3.3.3
18. Certification
Information
21 CFR TBD by
Europe
TBD by
Japan
19. Certification
Label
( ) Yes
( ) No
1010.2
20. Identification
Label
( ) Yes
( ) No
1010.3