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SEMI S6-93 © SEMI 199 3, 1996 10 SEMI S6-93 © SEMI 1993, 1996 Copyright by SEMI ® (Semiconducto r Equipment and Materials International ), 3081 Zanker Road, San Jose, C A 95134. Reproduction of the contents in whole or i…

SEMI S6-93 © SEMI 19939

APPENDIX 2

REFERENCED DOCUMENTS

A2-1 Industrial Ventilation

A Manual of Recommended Practice

Library of Congress Catalog Card Number: 62-12929

Published by: ACGIH (American Conference of

Government Industrial Hygienists)

6500 Glenway Ave., Building D-7

Cincinnati, OH 45211-4438

Telephone: 513-661-7881

A2-2 HVAC Systems Duct Design

1981 Second Edition

Published by: SMACNA (Sheet Metal and Air

Conditioning Contractors’ National Association, Inc.)

8224 Old Courthouse RoadTyson’s Corner

Vienna, VA 22183

Telephone: 703-790-9890

A2-3 HVAC Systems

Testing, Adjusting, and Balancing

Third Printing - June 1986

Published by: SMACNA (Sheet Metal and Air

Conditioning Contractors’ National Association, Inc.)

A2-4 Procedural Standards for Certified

Testing of Cleanrooms

First Edition — October 1988

Published by: NEBB (National Environmental

Balancing Bureau) 8224 Old Courthouse Road Tyson’s

Corner Vienna, VA 22180

A2-5 Threshold Limit Values for Chemical

Substances and Physical Agents and

Biological Exposure Indices

Published by: ACGIH

A2-6 AABC National Standards for Field

Measurement and Instrumentation — Total

System Balance

Volume Two, No. 12173

Published by: AABC (Associated Air Balance Council)

1518 K Street Northwest

Suite 503

Washington, D.C. 20005

Telephone: 202-737-0202

A2-7 ASHRAE 1981 Fundamentals Handbook

Chapter 33 Duct Design

Published by: ASHRAE (American Society of

Heating, Refrigerating, and Air Conditioning

Engineers, Inc.)

1791 Tullie Circle, N.E.Atlanta, GA 30329

Telephone: 404-636-8400

A2-8 SEMI S2, Safety Guidelines for

Semiconductor Manufacturing Equipment

Published by: SEMI (Semiconductor Equipment and

Materials International)

3081 Zanker Road

San Jose, CA 95134

Telephone: 408-428-9600

A2-9 SEMI F15, Test Method for Enclosures

Using Sulfur Hexafluoride Tracer Gas and Gas

Chromatography

Published by: SEMI

SEMI S6-93 © SEMI 1993, 1996 10

SEMI S6-93 © SEMI 1993, 1996 Copyright by SEMI®

(Semiconductor Equipment and Materials International),

3081 Zanker Road, San Jose, CA 95134. Reproduction of the

contents in whole or in part is forbidden without express

NOTICE: This guideline does not purport to address

all of the safety issues associated with its use. It is the

responsibility of the user of this guideline to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the guideline set forth herein for any

particular application. The determination of the

suitability of the guideline is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. This guideline is subject to change

without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

SEMI S7-96 © SEMI 1994, 19961

SEMI S7-96

SAFETY GUIDELINES FOR ENVIRONMENTAL, SAFETY, AND HEALTH

(ESH) EVALUATION OF SEMICONDUCTOR MANUFACTURING

EQUIPMENT

NOTICE: This safety guideline does not purport to

address all of the safety issues associated with its use. It

is the responsibility of the user of this guideline to

establish appropriate safety and health practices and

determine the applicability of regulatory limitations

prior to use.

NOTE: This entire document was revised in 1995.

1 Purpose

1.1 The purpose of this document is to provide

guidance to the equipment manufacturer or supplier, the

evaluator, and the user to define responsibilities and to

ensure the objective evaluation of designs and

equipment.

1.2 Preservation of employee safety and conformance

to environmental regulations are important criteria

when selecting semiconductor manufacturing

equipment. A basic expectation is that the equipment

manufacturer will design and build inherently safe (to

the operator, facility, and environment) equipment and

will provide documentation that the equipment has been

evaluated against a specific set of criteria, verifying

conformance thereto.

1.3 A safety evaluation is important for a variety of

reasons, including: operator safety, equipment

reliability, conformance to regulatory (e.g., OSHA,

EPA, local fire and building codes) and insurance

requirements. These are intended to ensure a safe and

environmentally responsible workplace.

2 Scope

2.1 This document defines the requirements for ESH

evaluation of equipment design and operation.

2.2 These guidelines include:

• Purpose

• Scope

• Referenced Documents

• Terminology

• Codes, Regulations, and Standards

• Requirements for Third Party Evaluators

• Contracting with an Evaluator

• Documentation Provided to the Evaluator by the

Supplier

• Evaluation Methods

• Contents of Reports

• Provision of Reports to Potential Users

2.3 The evaluation program is designed to be used in

addressing the ESH aspects of new, refurbished, or

resold process tools prior to the tool being delivered to

the user.

2.4 The evaluator may be within the supplier’s

organization. As some equipment suppliers do not

maintain a comprehensive ESH equipment evaluation

program in-house, third party contractor(s) may be

used. In either case, the evaluator should meet the

requirements listed in Section 6.

3 Referenced Documents

NOTE: All documents cited shall be the latest published

versions.

3.1 SEMI Document

SEMI S2 — Safety Guidelines for Semiconductor

Manufacturing Equipment

3.2 ANSI Document

Z34.1 — Third Party Certification Program

4 Terminology

4.1 supplier — The party providing the equipment to,

and communicating directly with, the user. It may be

the manufacturer or an equipment representative or

distributor. The supplier has the responsibilities of

obtaining the required information from the

manufacturer or other sources and of providing it to the

evaluator.

4.2 user — The purchaser of semiconductor

manufacturing who will use the equipment.

5 Codes, Regulations, and Standards

5.1 Semiconductor equipment should conform to the

applicable codes, regulations, and standards. The

American National Standards Institute, 1430 Broadway, New York,

NY 10018