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SEMI F65-1101 © SEMI 2001 1 SEMI F65-1101 DIMENSIONAL SPECIFICA TION FOR MOUNTING BA SES OF DIAPHRAGM VALVES USED WITH METRIC PFA TUBES This spe cification w as technically approved by the Global L iquid Chemica l Distri…

SEMI F64-0701 © SEMI 2001 16

A–4 Data Analysis: Method C

Table A4–1 Sample Data Sheet: Method C

Date:________________ Time: __________

DUT #________________ Ambient Temp __________°C

Standard Flow Device ________________

Setpoint________________ sccm

Te = ________________ °C P1 = __________psig

Time (sec) P2 (kPa) Q

(sccm) Q

(sccm)

0 101.338 50.05 50.0

0.05 101.338 50.05 50.0

2.20 95.086 52.28 51.5

2.25 88.406 54.56 52.1

8.45 32.424 50.08 50.0

8.50 31.811 50.07 50.0

15.20 26.838 50.06 50.0

A1–4.1 Data Interpretation, Method C – See Appendix A1–1.1

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacture's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copy-righted

material or of an invention covered by patent rights. By publications of this standard, Semiconductor Equipment

and Materials International (SEMI) takes no position respecting the validity of any patent rights or copyrights

asserted in connection with any items mentioned in this standard. Users of this standard are expressly advised that

determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their

own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F65-1101 © SEMI 20011

SEMI F65-1101

DIMENSIONAL SPECIFICATION FOR MOUNTING BASES OF

DIAPHRAGM VALVES USED WITH METRIC PFA TUBES

This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee

and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current

edition approved by the Japanese Regional Standards Committee on August 3, 2001. Initially available at

www.semi.org September 2001; to be published November 2001.

1 Purpose

1.1 This document specifies dimensions of mounting

base and their clearance hole sizes for bolts and the hole

locations of diaphragm valves used with metric PFA

tubes in liquid chemical distribution facilities and

process equipment for semiconductor and flat panel

display manufacturing.

1.2 To avoid any disturbance of future development

and to facilitate interchangeability of diaphragm valves,

this document has a limited scope as specified in

Section 2.

2 Scope

2.1 This document applies to mounting bases for two

way valves with a diaphragm designed to shut off

and/or regulate a liquid chemical flow in tubes whose

sizes are listed in Table 1.

2.2 The valves are made from materials such as PTFE

or PFA, which have high corrosion resistance and low

contamination contribution to the fluid.

2.3 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the user of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Referenced Standards

3.1 ISO Standards

ISO 273 — Fasteners – Clearance Holes for Bolts and

Screws

ISO 2768-1 — General Tolerance – Part 1: Tolerances

for linear and angular dimensions without individual

tolerance indications

3.2 JIS Standards

JIS B 1001 — Diameter of Clearance Holes and

Counterbores for Bolts and Screws

1 International Organization for Standardization (ISO), 1, rue de

Varembé, Case postale 56, CH-1211 Genève 20, Switzerland.

2 Japan Standards Association, 4-1-24, Akasaka, Minato-ku, Tokyo,

Japan 107-8440.

JIS B 0405 — General Tolerance – Part 1: Tolerances

for linear and angular dimensions without individual

tolerance indications

NOTE 1: Unless otherwise indicated, all documents cited

shall be the latest published versions.

4 Terminology

4.1 Abbreviations and Acronyms

4.1.1 PFA — tetrafluoroethylene perfluoroalkylvinyl-

ether copolymer

4.1.2 PTFE — polytetrafluoroethylene

4.2 Definitions

4.2.1 back pressure — a maximum allowable pressure

applied to outlet of a diaphragm valve.

4.2.2 liquid chemicals — acid, alkali, organic solvent,

and pure water used for wet stations; resists and devel-

opers used for track system; and other chemicals used

for process or maintenance (such as slurry of chemical-

mechanical polishing) of equipment or facilities.

4.2.3 mounting bases — plates which are attached to

diaphragm valves to mount the valves to equipment or a

facility.

5 Dimensional Specification

5.1 Mounting Base Dimensions — the length (l) and

width (w) of the mount base plate indicated in the

Figure 1 and the values for different tube sizes are

specified in Table 1.

5.2 Clearance Hole Locations — the location of the

clearance holes for bolts are indicated with “w” and “l”

in the Figure 1 and the values for different tube sizes

are specified in Table 1.

5.3 Clearance Hole Sizes — the size of clearance holes

(φD) for different tube sizes are specified in the Table 1

according to ISO 273 (JIS B 1001).

SEMI F65-1101 © SEMI 2001 2

5.4 Where the dimension depends on the valve design considering the back pressure, the upper row in Table 1

applies to the valves that withstand up to 0.2 megapascals (MPa) (29 pounds per square inch (psi)) back pressure,

and the lower row applies to the valves that withstand more than 0.2 MPa (29 psi) back pressure.

φD

w’ w

l’

Figure 1

Top View of A Typical Diaphragm Valve with A Mounting Base

Table 1 Dimensional Specifications

Tube Size (mm) (OD / ID)* Back Pressure

(Mpa)

l’ (mm) l (mm) w’ (mm) w (mm)

D (mm)

Bolt Type

(example)

≤ 0.2

60 48

25 / 22

> 0.2

68 56

96 84 7 M6

≤ 0.2

44 32 76 64

19 / 16

> 0.2

52 40 84 72

≤ 0.2

34 22 62 50

12 / 10

> 0.2

46 34 70 58

7M6

≤ 0.2

34 22 62 50

10 / 8

> 0.2

46 34 68 56

7M6

≤ 0.2

32 20 56 44

6 / 4

> 0.2

40 28 60 48

Note 1: OD and ID are outside diameter and inside diameter of the tube respectively.

Note 2: Refer to ISO 2768-1 or JIS B 0405 for tolerances.

6 Measurements

6.1 The mounting base must be conditioned for a minimum of one hour in an air environment of 23 ± 3ºC (73.4 ±

5.4ºF) prior to measuring the dimensions.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.