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SEMI E104-0303 © SEMI 2000, 2003 4 same detected scattering intensity as th e localized light scatterer (LLS) under investigation under identical test conditions. 4.2.16 particle size for applicatio ns, size is the opt…
SEMI E104-0303 © SEMI 2000, 2003 3
3.8 JIS Standards
7
JIS B 9921 — Light Scattering Automatic Particle
Counter
3.9 VDI Standards
8
VDI-Richtlinie 3489-3 — Messen von Partikeln:
Methoden zur Charakterisierung und Überwachung von
Prüfaerosolen - Optischer Partikelzähler (Particulate
Matter Measurement: Methods of Characterizing and
Monitoring Test Aerosols – Optical Particle Counter)
VDI-Richtlinie 3491 — Messen von Partikeln:
Herstellungsverfahren für Prüfaerosole,
Verdünnungssysteme (Particulate Matter Measurement:
Generation of Test Aerosols, Dilution Systems)
NOTICE: As listed or revised, all documents cited
shall be the latest publications of adopted standards.
4 Terminology
4.1 Abbreviations and Acronyms
4.1.1 COV — Coefficient of Variation
4.1.2 HEPA — High-Efficiency Particulate Air
4.1.3 ISPM — In Situ Particle Monitor
4.1.4 LDL — Lower Detectable Limit
4.1.5 LPPD — Low-Pressure Particle Detector
4.1.6 PHA — Pulse Height Analyzer
4.1.7 RPC — Reference Particle Counter
4.1.8 ULPA — Ultra-Low Penetration Air
4.2 Definitions
4.2.1 accuracy of size — the closeness of agreement
between the ascertained size of the detected particle and
its real size.
4.2.2 coefficient of variation (COV) — the width of a
distribution (in %), obtained by dividing the standard
deviation of the distribution by the mean of the
distribution.
4.2.3 coincidence — the presence of two or more
particles in the detection area of the particle detector at
the same time, causing the particle detector to interpret
the combined signal erroneously as resulting from one
larger particle.
7 Japanese Industrial Standards, Available through the Japanese
Standards Association, 1-24, Akasaka 4-Chome, Minato-ku, Tokyo
107-8440, Japan. Telephone: 81.3.3583.8005; Fax: 81.3.3586.2014
Website: www.jsa.or.jp
8 Beuth Verlag GmbH, Burggrafenstrasse 6, D-10787 Berlin,
Germany. Telephone: 49.30.2601.0, Fax: 49.30.2601.1260 Website:
www2.beuth.de
4.2.4 concentration — the number of particles per unit
volume, at ambient temperature T
A
and pressure p.
4.2.5 concentration limit — the particle concentration
specified by the manufacturer of the particle detector at
which the error due to coincidence is 10% or less.
NOTE 1: Manufacturers may specify concentration limits at
error levels other than 10%.
4.2.6 counting efficiency the ratio (in %) of detected
concentration divided by the actual concentration of
particles of a given size or range of sizes (see appendix
2).
4.2.7 detection area the area, defined through the
light beam and the detection optics, in which the
particles are detected. Often this area is much smaller
than the cross-section of the pump line or the process
chamber.
4.2.8 high-efficiency particulate air (HEPA) filter
filter with a minimum particle-collection efficiency of
99.97% on all particles larger than
0.3 micrometer.
4.2.9 in situ refers to processing steps or tests that
are done without moving the wafer. Latin for “in
original position”.
4.2.10 in situ particle monitor (ISPM) particle
monitor used under atmospheric conditions or in low-
pressure, vacuum or liquid applications to detect
particles while a process is running.
4.2.11 isokinetic sampling sampling of particles in a
moving aerosol or fluid by matching the sample probe
inlet velocity (flow speed and
direction) to the velocity
of the moving aerosol or fluid.
4.2.12 lower detectable limit (LDL) in particle
measurement: the smallest particle size that a particle
detector can measure at a given flow rate with a signal-
to-noise ratio of at least 3 dB and with a counting
efficiency of 50% ± 10%.
NOTE 2: This is a general definition of LDL. Due to the
special design of most of the LPPDs, a counting efficiency of
50% can not be achieved.
4.2.13 low-pressure particle detector (LPPD)
optical particle sensor for use under low-pressure and
vacuum conditions to measure particles or particle
levels in semiconductor process equipment.
4.2.14 monodisperse calibration particles particles
with known optical properties, a sizing accuracy of at
least 95%, and a size distribution in which the
coefficient of variation is 5% or less.
4.2.15 optical equivalent size the diameter of a
monodisperse calibration particle that produces the
SEMI E104-0303 © SEMI 2000, 2003 4
same detected scattering intensity as the localized light
scatterer (LLS) under investigation under identical test
conditions.
4.2.16 particle size for applications, size is the
optical equivalent diameter of a reference sphere with
known properties as detected by a given light-scattering
particle counter [as defined in SEMI C6.5 and SEMI
C6.6]. For calibration, size is the mean diameter of the
monodisperse sphere.
4.2.17 resolution the capability of the particle
detector to differentiate between particles of similar
size.
NOTE 3: The procedure to define resolution is discussed in
Section 9.2.3.5.
4.2.18 sensitivity in particle measurement: the
smallest standard particle size specified by the
manufacturer that an instrument, method, or system is
capable of measuring under specified conditions (with a
counting efficiency of 50%; see Appendix 2). Also
called minimum detectable particle size.
4.2.19 ultrafine particle a particle with an
equivalent diameter less than 0.1 µm [as defined in ISO
14644-1].
4.2.20 ultra-low penetration air (ULPA) filter filter
with a minimum particle-collection efficiency of
99.9995% on the most penetrating particle size.
4.2.21 zero count the maximum particle count
indicated by a particle counter, in a specified period of
time, that is sampling particle-free air. This value is
specified by the manufacturer, and is commonly also
referred to as false call rate, false count, noise, or noise
level.
4.2.22 zero gas in determining contaminant
contribution by gas distribution system components, a
purified gas that has an insignificant particle
concentration above the lower detectable limit (LDL) of
the analytical instrument. This gas is used for both
instrument calibration and component testing.
4.3 Symbols
4.3.1 A
L
the detection area (mm
2
), defined through
detector optics and light beam of the LPPD.
4.3.2 A
RC
the opening area (mm
2
) of the probe inlet
of the reference particle counter.
4.3.3 C
L
the number concentration (cm
-3
) of
particles in the line at the LPPD.
4.3.4 C
G
the number concentration (cm
-3
) of
particles generated from aerosol generator at given V´
G
.
4.3.5 D
L
the diameter of the pump line (mm) at the
LPPD.
4.3.6 d
p
the diameter of the spherical particle (µm).
4.3.7 D
RC
the diameter of the sample drawing line
(mm) for the reference particle counter.
4.3.8 D
VM
the diameter of the pump line (mm) at the
velocity meter.
4.3.9 p the line pressure (torr or mbar).
4.3.10 RH the relative humidity (%).
4.3.11 T
A
the ambient temperature (° C) around the
measurement or calibration system.
4.3.12 T
G
the gas temperature (° C).
4.3.13 v
L
the velocity (m/s) of the aerosol at the
LPPD.
4.3.14 v
L, min
, v
L, max
for applications, the velocity
range (m/s) of the aerosol at the LPPD specified by the
manufacturer.
4.3.15 V´
L
the volume flow rate (l/min) in the line
at the LPPD.
4.3.16 V´
G
the volume flow rate (l/min) of the
aerosol sample (measured directly behind the aerosol
generator).
4.3.17 v
VM
the velocity (m/s) of the aerosol at the
velocity meter.
4.3.18 V´
ZG
the volume flow rate (l/min) of the zero
gas.
4.3.19 σ
V,LPPD
the standard deviation of the voltage
sensor signal.
4.3.20 σ
p,LPPD
the standard deviation of the observed
particle distribution
4.3.21 σ
d,p
the standard deviation of the particles
given by the particle supplier
5 Mechanical Interfaces
5.1 Flanges
5.1.1 One of the following vacuum flanges should be
used for mounting an LPPD into a pump line or on
process equipment:
ISO 2861-1 and ISO 2861-2 (ISO-KF/MF)
ISO 1609 (ISO-K and ISO-F)
ISO 3669 (ISO-K-CF)
SEMI E104-0303 © SEMI 2000, 2003 5
5.2 Space, Distances, and Installation
5.2.1 The use of an LPPD should not have a negative
impact on the process performance. The sensor location
in the equipment shall ensure an optimum use of the
sensor sensitivity in order to allow a measurement
which is representative of the main particle flow. The
influence of the process and the process equipment on
the LPPD shall be minimized (thermal background
radiation, vibrations etc.)
5.2.2 The standard does not specify where an LPPD
should be located in original equipment, or where space
should be allowed for retro-fitting. It is recognized that
the location is dependent on factors including transport
behavior of particles, thermal background radiation etc.
The designers of semiconductor process equipment
should resort to the experience of application engineers
of the LPPD suppliers and the end users. However, in
either case designers shall take into account access
requirements for maintenance and re-calibration. In the
case of retro-fitting, the design should facilitate sensor
installation rather than hinder it.
6 Electrical Interfaces
6.1 Sensor/Controller Communication
6.1.1 Depending on the choice of the LPPD supplier
and the semiconductor equipment manufacturer, one of
the following interfaces for data exchange between the
LPPD and process equipment controller should be used.
6.1.2 Sensor/Actuator Network (SAN)
6.1.2.1 The electrical interfaces of the Sensor/ Actuator
Network are described in the suite of SEMI E54
standards.
6.1.3 Serial Communication
6.1.3.1 RS 232 C (V.24/V.28)
6.1.3.2 RS 485
6.1.4 Others
6.1.4.1 IEEE 488 or IEC 60625
6.2 Others
6.2.1 Sensor calibration output (direct analog output)
6.2.1.1 The analog output for access to the sensor
signal used for calibration purpose should be supported.
7 Communication Interfaces
7.1 Sensor Bus Communication
7.1.1 It is recommended to use a Sensor/Actuator
Network (SAN) for the intra-tool communication
between the LPPD controller and the controller of the
process equipment. This communication is based on a
suite of SEMI standards including a network
communication standard, several common device
models (DeviceNet, SDS, Lonworks, ProfiBus etc.),
and the specific device model for the sensor. The
Network is described by the following suite of SEMI
standards: SEMI E54. The specific device model for
ISPM is described by SEMI E54.10.
7.2 SEMI Equipment Communication (SECS)
7.2.1 If LPPD controllers provide the collected particle
data to the process equipment controller, factory
automation system, or SPC system, the SECS tool-to-
host communication could be used. SECS is described
in the following standards:
• SEMI E5
• SEMI E4
• SEMI E37
7.3 Attribute Definitions
7.3.1 SEMI E54.10 addresses the minimum attributes,
services and behavior an ISPM-device shall support. If
any attributes and services are used by communication
of the ISPM and the equipment controller via IEEE 488
(IEC 60625) or serial communication, they should be
concurring.
8 Operating Conditions
8.1 To specify the operating conditions of an LPPD
(temperature, humidity, electromagnetic compatibility,
vibrations etc.) refer to the following standards:
• IEC 60654-1
• IEC 60654-2
• IEC 60654-3
• IEC 60654-4
• IEC 60801-1
8.2 Temperature
8.2.1 The LPPD should work correctly at an ambient
temperature range T
A
as specified in ISO 14644-5. If
the use of an LPPD at an extended ambient temperature
range is required, the specific LPPD should comply
with these conditions.
8.2.2 The temperature T
G
inside the pump line or
inside the process equipment depends on the actual
application. The application engineers shall check the
use of LPPDs under these specific conditions. The
temperature T
G
is measured at the flange which the
LPPD is mounted on.