semi合集-English.pdf - 第1557页
SEMI E36-0704 1995, 2004 4 or follow the m arkup rules defi ned in Semiconductor Equipment Manufacturi ng Inform ation Tagging. 4.15 SGML - SGML is “Standard Generalized Markup Language.” The Sta ndard Generalized Mar …

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4.4 Conforming Element - A conforming element is
one that uses the names and markup rules defined in
Semiconductor Equipment Manufacturing Information
Tagging for the class of element. A conforming element
created by a conforming application must be
interchangeable with another conforming application
without information loss.
4.5 Conforming Rendering Application - Rendering
(presentation) is the process and means by which the
elements in a document shall be made visually or
otherwise understandable to the end user, for example,
printing a document on paper, browsing a series of
elements on screen, or stating a series of elements
through voice synthesis. A conforming rendering
application must be able to print or display conforming
documents without significant loss of information. The
presentation should be consistent with the intent of the
originating system.
A conforming rendering application may not impose
structural requirements that are not required by the
DTD or other document models as stated in the second
part of Semiconductor Equipment Manufacturing
Information Tagging. For example, a rendering engine
may not require an element which is optional in the
models or require an attribute that is implied. A
rendering application may require that the rules in this
Base Specification and those in the Tag Library are
followed.
For example, if the DTDs say that an element is
optional, a Rendering Application may not require that
it be present. If the Tag Library says that the contents
of an element must be some particular information, the
Rendering Application may require that it be so. More
specifically, if the <description> element is optional, a
Rendering Application may not fail to process a
document because it does not contain <description>s.
If the Tag Library says that the contents of a
“datechanged” attribute is a date in YYYYMMDD
format, a Rendering Application may fail if the attribute
does not contain a valid date.
4.6 Document - A logical assembly of elements, that, if
correctly ordered, is a means of transmitting an
internally consistent piece of information. A document
is made up of one or more elements which must all be
contained in one “root” element.
4.7 Document Class - A document class consists of all
of the documents or information fragments that follow a
single set of markup rules, including the same elements
and element relationships. In general, a class of
documents can be considered to be documents that are
nearly the same in structure and have similar types of
content. A document class is usually (but not
necessarily) defined by a structural model (such as a
DTD or Schema) that governs its existence.
4.8 Document Exchange - For SEMI E36, “document
exchange” is synonymous with “document interchange”
(see definition).
4.9 Document Interchange - Document interchange
entails passing one or more elements, usually as a
document, from one conforming system to one or more
other systems (also known as “exchange”).
4.10 Document Model - “Document model” is a term
for a set of structural rules that describe the legal
markup for a particular class of documents. DTDs and
Schema are types of document models.
4.11 Document Type Definition (DTD) - A DTD is a
document model or list of markup rules, which may be
used in both SGML and XML. As specified in the
SGML standard, ISO 8879, a DTD is:
“Rules, determined by an application, that apply
SGML to the markup of documents of a particular
type. A document type definition includes a formal
specification, expressed in a document type
declaration, of the element types, element
relationships and attributes and references that can
be represented by markup. It thereby defines the
vocabulary of the markup for which SGML defines
the syntax.” (ISO 8879 4.105)
4.12 Element - An element is one named, contiguous
piece of information in the information stream. Usually
the data within an element has a semantic or structural
relationship as well, for example a person’s surname, an
error code, a pointer to external data, a paragraph, or a
procedure that contains steps. In the previous version
of this specification (i.e., in SEMI E36-95) an element
is also referred to as an “information component.”
An element is:
• A uniquely addressable unit of information within
the document; and/or
• An identifier to an addressable unit of information
outside the document.
4.13 Markup - For Semiconductor Equipment
Manufacturing Information Tagging, markup is defined
as additional data characters that are added to data to
provide information about the data and make the data
more useable. The markup described by Semiconductor
Equipment Manufacturing Information Tagging is
internal markup, that is, markup which resides in the
same data stream as the data — in specific SGML and
XML markup.
4.14 Nonconforming Document - A non-conforming
document is one that does not use the markup properly

SEMI E36-0704 1995, 2004
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or follow the markup rules defined in Semiconductor
Equipment Manufacturing Information Tagging.
4.15 SGML - SGML is “Standard Generalized Markup
Language.” The Standard Generalized Markup
Language is an International Organization for
Standardization (ISO) standard. The ISO Reference
Number is ISO 8879:1986(E). SGML is a meta-
language for constructing markup. See also XML
(Extensible Markup Language).
4.16 Tag - A tag is a string of characters delimited by
rules set out in the SGML standard (and used in XML
and HTML). Tags are placed in the datastream to
indicate where an element begins and ends. In
Semiconductor Equipment Manufacturing Information
Tagging, tags match as closely as possible the names of
the elements in English.
4.17 XLL (Extensible Linking Language) - When
released, XLL is intended to be the syntax and
semantics for both simple hypertext linking (as
exemplified by HTML) and more complex linking,
providing such functionality as multi-way links, multi-
ended links, and addressing from an external document
based on structure. A W3C Working Group is in the
process of producing a draft specification, which uses
many of the concepts from HyTime
(Hypermedia/Time-based Document Representation
Language ISO/IEC 10744) and the TEI (Text Encoding
Initiative) extended pointers.
4.18 XML (Extensible Markup Language) - XML is a
W3C Recommendation that describes a subset of
SGML syntax and functionality intended for use on the
World Wide Web. XML is, by design, simpler, less
complex, and easier to implement than SGML. XML is
also, by design, far less flexible than SGML because it
includes only the most commonly implemented SGML
features.
XML is a family of Recommendations that includes a
linking specification (XLL); it may in the future include
other specifications such as a stylesheet specification
(XSL). The XLL linking specification will provide the
syntax for hypertext links defined in Semiconductor
Equipment Manufacturing Information Tagging. The
XSL stylesheet language will be neither mandated nor
prohibited in SEMI E36-98.
5 Design and Principles
5.1 Information Markup - For purposes of interchange,
information will be marked-up according to the
conventions established in Semiconductor Equipment
Manufacturing Information Tagging. The defined
markup will:
• Identify the start and end of elements, which may
contain named information content or structural
components;
• Provide information concerning the identified
elements; and
• Specify connections among elements and between
elements and external objects.
Applications will be able to utilize this markup to:
• Select, limit, and organize specific elements for
reuse or interchange;
• Start and stop behavior, such as print formatting,
complex screen display, and the actuation of
programs;
• Limit retrieval (for increased precision);
• Generate navigation aids such as indexes and tables
of contents; and
• Validate document structure or content.
5.2 SGML Standard and XML Family of
Recommendations - The intent of Semiconductor
Equipment Manufacturing Information Tagging is to
define the rules and markup that can be used to create
XML data (which is, by definition, SGML data) for
maximum interchangeability and movement across both
internets and intranets. Therefore all markup and rules
will be designed to be fully conforming with the W3C
XML Recommendation. It is also the intent to describe
hypertext linking in conformance with the XLL
(Extensible Linking Language), as much as it is known,
and to migrate in the direction of that recommendation
as the recommendation is finished.
Since the intent of Semiconductor Equipment
Manufacturing Information Tagging is to create data
that is both valid XML and type-valid SGML:
• The DTDs, which will be written in both SGML
and XML syntax, will conform to the XML subset
of SGML by not using features and syntax that
XML prohibits such as exceptions and #CONREF
attributes;
• Tagged data produced according to Semiconductor
Equipment Manufacturing Information Tagging
will be valid XML. Early implementers using
SGML authoring or conversion tools should check
with their tool suppliers to make sure those tools
will work with their document without
modification.
Names of elements, attributes, and entities will be used
consistently within the SEMI E36 module set. While
some elements may have different content models from

SEMI E36-0704 1995, 2004
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module to module, and in fact that is the intent of the
parameter entity framework, all name definitions and
use will be consistent throughout the SEMI E36 DTD
suite. This means that namespace issues, such as those
addressed by the XML Namespace Recommendation
(currently under development), are not relevant within
the scope of SEMI E36. It is likely that mechanisms
such as XML Namespaces will be used to incorporate
parts of the SEMI E36 markup set in other applications;
but this use is outside the scope of SEMI E36 itself.
5.3 Specification for Interchange - Semiconductor
Equipment Manufacturing Information Tagging defines
markup optimized for interchange, not for information
development (authoring) nor for information
presentation (rendering). Thus, some of the capabilities
and functionality that might be desired for authoring or
rendering will not be included in the markup rules, by
design. For example, few elements may be required and
the sequence of elements will not be tightly constrained.
It is anticipated that more specific authoring and
rendering models may be developed by other parties as
part of conforming applications. All conforming
interchange, however, will explicitly follow the markup
and structural rules defined in Semiconductor
Equipment Manufacturing Information Tagging.
5.4 General Modeling Principles
• Document (information) models will be
constructed that name the elements, describe the
relationships among these elements, and impose
certain markup or content constraints. The
information markup will be controlled by these
models.
• All models will be made available by SEMI and
distributed and balloted as additional parts of
Semiconductor Equipment Manufacturing
Information Tagging. Models will be described in
the second part of Semiconductor Equipment
Manufacturing Information Tagging rather than
included in the base document directly because the
models are assumed to be dynamic documents that
will grow and change as requirements alter. The
data models and the Tag Library may be balloted
separately without requiring a re-balloting of this
part of the specification.
• The models will initially be in the form of SGML
and XML Document Type Definitions (DTDs) and
may later include other XML-defining schema.
• There will be no all-inclusive general information
models; each DTD or other collection of rules will
model specific elements or specific document
types.
• Markup will be primarily designed according to the
nature of the information being described; such
considerations as data volume and ease of
implementation will only be considered
secondarily.
• DTDs will be constructed in a modular fashion,
with content-related or structurally-related
modules. The purpose of such modularization is to
reuse existing information content models as much
as possible. New element structures should be
created only when new content is analyzed.
5.5 Information Modeling
5.5.1 Types of Elements - SGML and XML elements
can identify many types of information. There are
situations in which each of the following element types
are appropriate, and many situations in which several
could be used. In designing structures and tagging
documents, elements should be designed using the
following hierarchy of types, from most- to least-
preferred. Only if the information cannot be
satisfactorily identified using one type of element
should those below it in the following list be
considered.
• Content Elements — those that identify the
information content, such as Warning, Procedural
Step, Part Number, Installation Manual, or Bill of
Materials.
• Structural Elements — those that identify the
structural role of a part of a document, such as
Title, Paragraph, or List Item.
• Pointer Elements — those that point to other
locations, either in this document or another, such
as Cross-reference, Footnote Reference, or URL.
• Format Elements — those that identify portions of
a document that are to be formatted differently
from surrounding text and for which there is no
Content, Structural, or Pointing reason that they
should be so formatted, for example a Bold
element. Format elements are to be used as a last
resort; use of a content, structure, or pointer
element with a format-related attribute is preferable
to use of a format element.
5.5.2 Naming Elements - Markup in the DTDs will be
named consistently across contexts. That is, the same
element name will be used for an element that can
occur in many places with the same function, regardless
of the location. For example, there is only one element
for Title, not many separate elements for Section Title,
Table Title, Figure Title, etc.
In XML, names are case-sensitive. In the interest of
keeping compliant with XML, all names will be case-