semi合集-English.pdf - 第1489页

SEMI E30.5-0302 © SEMI 2001, 2002 17 11.2.7.1 T here are five types of DE F-LIS T tables: • SITE-DEF-LIST: A list of Site s and their attributes, typically the list of sites to be measured. • ALIGN-DEF-LIST: A list o f a…

100%1 / 7923
SEMI E30.5-0302 © SEMI 2001, 2002 16
11.2.5 Sub-Process Programs
Equipment may allow a main Process Program to reference Sub-process
Programs. A main Process Program is one that can be referenced by the host. A Sub-process Program is a Process
Program that is referenced by a main Process Program or by other Sub-process Programs. No Sub-process Program
may reference its main Process Program. If the Equipment supports sub-process-program references, it must be
possible for the host to determine which Sub-process Programs are referenced in all Process Programs.
11.2.5.1 Before execution of a main Process Program can begin, the presence of all the Sub-process Programs that it
references must be verified by the Equipment. If they are not all present, an error collection event must occur. It
must be possible to include in the event report which Sub-process Programs are missing. For a formatted Process
Program, the error is reported using an S7F27 message.
11.2.6 Component Descriptions and Allowed Formats
Table 6 Process Program Component Description and Format Table
Component Name Description Format Comments
ALIGN-ATTRIBUTE
(n)
Tool specific information associated with
alignment site for which no specific MSEM
data item has been defined.
Examples include information
such as magnification, voltage,
current, wavelength, number of
scans, integration time, or film
stack. The equipment supplier
shall document all attributes
that are supported.
ALIGN-NAME The identifier given to a alignment site. A[1..16]
COORDSYS The identification for applicable coordinate
system.
A[1..16] Options for silicon wafers are:
SEMI M20, M20P, SEMI M21
COORDX The x coordinate for a site or the lower left
hand corner of an element.
F4 Units are in microns.
COORDY The y coordinate for a site or the lower left
hand corner of an element.
F4 Units are in microns.
ELEMENTID The element identifier in the SEMI M21
coordinate system
U4[2]
M21XSIZE The SEMI M21 element size in the x direction
in µm.
F4
M21YSIZE The SEMI M21 element size in the y direction
in µm.
F4
SITE-ATTRIBUTE
(n)
Tool specific information associated with a
measurement site for which no specific
MSEM data item has been defined.
Examples
include information such as
magnification, voltage, current,
wavelength,
number of scans, integration
time, or film stack. The
equipment supplier
shall document all attributes
that are supported.
SITENAME A unique identifier for a site. A[1..16]
11.2.7 DEF-LIST-TABLE Description
DEF-LIST types of tables are used by the equipment in conjunction with
the Process Programs. The DEF-LIST table structures provide a means to transfer to equipment a list of a particular
type of information. The DEF-LIST table structures are used by the host to send information to equipment for later
use in association with a Process Program. Each DEF-LIST that is sent has a unique Table name and each list
element in the DEF-LIST has several components including a name (Site-Name, or Align-Name) as well as other
components. A specific list row can be accessed for use with a specific Process Program by giving the DEF-LIST
table name and the specific row name.
SEMI E30.5-0302 © SEMI 2001, 200217
11.2.7.1 There are five types of DEF-LIST tables:
• SITE-DEF-LIST: A list of Sites and their attributes, typically the list of sites to be measured.
• ALIGN-DEF-LIST: A list of alignment sites and their attributes.
• M21-ELEMENT-DEF-LIST: A list of element ID and their low left hand location in M20P or SEMI M20
coordinates.
• M21-ELEMENT-SITE-DEF-LIST: A list of ElementID's and what sites are to be measured within that element.
• M21-ELEMENT-ALIGN-DEF-LIST: a list of ElementID's and the alignment sites to be used at each.
NOTE 2: The attributes are equipment-defined.
11.2.7.2 To support the SiteList, and AlignList, for SEMI M20, M20P and SEMI M21, the following types of tables
must be implemented: SITE-DEF-LIST, ALIGN-DEF-LIST, or M21-ELEMENT-SITE- DEF-LIST, M21-
ELEMENT-ALIGN-DEF-LIST and M21-ELEMENT-DEF-LIST. A host would send a DEF-LIST to equipment
using standard transfer methods for tables as defined by ARAMS (SEMI E58). MSEM requires that the following
columns be included in the DEF-LIST tables. The DEF-LIST-TABLE components table defines the DEF-LIST
column names and their allowable format is given below.
Table 7 SITE-DEF-LIST
Sitename Coordx Coordy Coordsys Site- Attribute(n)
11.2.7.3 For SEMI M21 Coordinate system an additional table is required.
Table 8 M21-ELEMENT-SITE-DEF-LIST
Element id Sitename
Table 9 M21-ELEMENT-DEF-LIST
Element id Coordx Coordy Coordsys m21xsize m21ysize
Table 10 ALIGN-DEF-LIST
Align-Name Coordx Coordy Coordsys Align- Attribute(n)
Table 11 M21-ELEMENT-ALIGN-DEF-LIST
Element id Align-Name
SEMI E30.5-0302 © SEMI 2001, 2002 18
12 Remote Commands
12.1 The purpose of this section is to identify the
MSEM required remote commands, command
parameters, and valid commands versus MSEM states.
12.2 Requirements
The following capabilities are
required:
• StartProcessing
• Stop Processing
• Temporaly Suspend Processing
• Resume Processing
• Abort Processing
• Select Process Programs, Material and/or Sites to
Measure
• Report Location of Material Found within a
cassette
12.3 All the remote commands defined by MSEM are
required unless they have been qualified by the
statement “if the equipment supports this functionality
it shall use this command”. Then, they are only required
if the equipment supports the functionality necessary to
support the command. A good example of this is the
MAP-CASSETTE command if the equipment does not
have the hardware necessary to scan a cassette for the
presence of substrates in slots then the command is not
required by the MSEM. The alphanumeric strings
defined by MSEM for RCMD and CPNAME are
required.
12.4 Definitions
12.4.1 Host Command Parameter (CPNAME/CPVAL)
— a parameter name/value associated with a particular
host command (S2,F49). This document will specify
unique names (CPNAMEs) and values (CPVALs) for
many command parameters. Note that if there are no
associated parameters a zero-length list is sent.
12.5 Remote Commands Description — this section
describes required functionality, suppliers may
implement additional commands. The following remote
commands (RCMDs) must be supported as described
below.
NOTE 2: The terms “current cycle” and “safe point” used
below are to be defined by the supplier.
12.5.1 ABORT terminate the current cycle prior to
its completion. Abort has the intent of immediately
stopping the process and is used because of abnormal
conditions. Abort makes no guarantee about the
subsequent condition of material except as noted in the
CPNAME ABORT-LEVEL description.
12.5.2 CLEANUP
Process Program deselection,
removal of all material to output locations and any
equipment specific activities needed to transition into
the IDLE state. Completion of this command should
generate a collection event report.
12.5.3 NEXT-MATERIAL
processing of the current
substrate is halted at the first safe point and unloaded to
the target cassette location. Next-material has the intent
of allowing the host to skip measurement of the current
substrate. This is a trigger for processing state
transition from WORKING to UNLOAD.
12.5.4 PAUSE
suspend processing temporarily at
the next safe point. Pause has the intent of resuming
the process at the same point where it was paused.
RESUME or PP-UPDATE may be used to resume the
process.
12.5.5 PP-ASSIGN
instructs the equipment to assign
a process to a carrier ID(s)/location(s) and place the
exchange station in the process queue with the given
priority. Only one assignment is allowed for a exchange
station. Without specifying a priority, the material is
queued with the default priority. Material with equal
priority are queued in the order the PP-ASSIGN
commands are received. If the equipment supports the
functionality of queuing material, it will use this
command.
12.5.6 PP-SELECT
instructs the equipment to make
the requested Process Program(s) available in the
execution area. Additionally, to reduce the number of
Process Programs on the equipment, PP-SELECT may
define the material to be measured, measurement site
locations, and/or the information needed for site
alignment; default values shall be used if this
information is not specified. This is a trigger for the
processing state transition from IDLE to SETTING UP.
All Process Programs specified in the command are to
be validated
12.5.7 PP-UPDATE
provides the ability to alter
Process Program variables during the PAUSED
processing state. Any CPNAMEs specified in PP-
UPDATE will replace the previous definitions. This
command will RESUME the process. If the PP-
UPDATE fails, the Process Program variables present
prior to the PP-UPDATE are retained. If no parameters
values are specified, the defaults are used.
12.5.8 RESUME
resume processing from the point
where the process was paused. This is the trigger for
processing state transition 10, from PROCESS PAUSE.
12.5.9 START
instructs the equipment to initiate
processing. This is the trigger for the processing state
transition from READY to LOAD.