semi合集-English.pdf - 第2520页
SEMI E88-1104 E © SEMI 1999, 2004 17 Collection Event Name From State To State Required DVVALs GEM CarrierStoredAlt TRANSFERRING ALTERNATE CommandID CarrierID CarrierLoc CarrierZoneName Dest N CarrierTransferring WAIT IN…
SEMI E88-1104
E
© SEMI 1999, 2004 16
Collection Event Name From State To State Required DVVALs GEM
TransferCancelFailed CANCELING QUEUED CommandID
CarrierID
CarrierLoc
CarrierZoneName
N
TransferCancelInitiated QUEUED CANCELING CommandID
CarrierID
CarrierLoc
CarrierZoneName
N
TransferCompleted ACTIVE None
This event will occur when the
carrier arrives at the transfer
completed port.
The TRANSFER command
DEST is an LP if transferring to
an output of the stocker.
CommandID
CarrierID
CarrierLoc
ResultCode
CarrierZoneName
N
TransferInitiated QUEUED
CANCELING
TRANSFERRING
TRANSFERRING
CommandID
CarrierID
CarrierLoc
CarrierZoneName
Dest
N
TransferPaused TRANSFERRING PAUSED CommandID
CarrierID
CarrierLoc
CarrierZoneName
N
TransferResumed PAUSED TRANSFERRING CommandID
CarrierID
CarrierLoc
CarrierZoneName
N
STOCKER CARRIER STATE TRANSITION EVENTS
CarrierInstallCompleted None COMPLETED CarrierID
CarrierLoc
CarrierZoneName
N
CarrierRemoveCompleted INSTALLED None CarrierID
CarrierLoc
CarrierZoneName
N
CarrierRemoved WAIT OUT
TRANSFERRING
None
None
CarrierID
HandoffType
N
CarrierResumed ALTERNATE TRANSFERRING CommandID
CarrierID
CarrierLoc
CarrierZoneName
Dest
StockerCraneID
N
CarrierStored TRANSFERRING COMPLETED CarrierID
CarrierLoc
CarrierZoneName
N
SEMI E88-1104
E
© SEMI 1999, 2004 17
Collection Event Name From State To State Required DVVALs GEM
CarrierStoredAlt TRANSFERRING ALTERNATE CommandID
CarrierID
CarrierLoc
CarrierZoneName
Dest
N
CarrierTransferring WAIT IN
COMPLETED
None
TRANSFERRING
TRANSFERRING
TRANSFERRING
CarrierID
CarrierLoc
CarrierZoneName
StockerCraneID
N
CarrierWaitIn None WAIT IN CarrierID
CarrierLoc
CarrierZoneName
N
CarrierWaitOut TRANSFERRING
WAIT OUT
None
WAIT OUT
WAIT OUT
WAIT OUT
CarrierID
CarrierLoc
CarrierZoneName
PortType
N
ZoneCapacityChange Any State or None Any State or None ZoneData N
STOCKER CRANE STATE TRANSITION EVENTS
CraneActive IDLE ACTIVE CommandID
StockerCraneID
N
CraneIdle ACTIVE IDLE CommandID
StockerCraneID
N
PORT TRANSFER STATE TRANSITION EVENTS
PortInService None
OUT OF SERVICE
IN SERVICE PortID
PortOutOfService None
IN SERVICE
OUT OF SERVICE PortID
PortTransferBlocked Any TRANSFER BLOCKED PortID
PortReadyToLoad Any READY TO LOAD PortID
PortReadyToUnload Any READY TO UNLOAD PortID
9.4 Non-Transition Collection Event Table
Table 7 Non-Transition Collection Event Table
Collection Event Name Event Description Required DVVALs or
Reports
CarrierIDRead A carrier identification has been performed by the stocker system. For
reads that occur at an Input port, the event shall come prior to the
CarrierWaitIn event. For reads that occur at CarrierWaitOut port
locations, the CarrierIDRead event and the CarrierWaitOut events for that
port shall be sent to the host in a consistent sequence (i.e. CarrierIDRead
shall always precede the CarrierWaitOut, or alternatively, the
CarrierWaitOut event shall always precede the CarrierIDRead event).
There are not dependencies with this event at any other location.
CarrierID
CarrierLoc
IDReadStatus
CarrierInstallFailed An INSTALL command has failed. CarrierID
FailureCode
CarrierLocateCompleted A LOCATE remote command has completed. CarrierLocations
CommandID
CarrierRemoveFailed A REMOVE command has failed. CarrierID
FailureCode
SEMI E88-1104
E
© SEMI 1999, 2004 18
Collection Event Name Event Description Required DVVALs or
Reports
IDReadError All carriers related to an ID error situation have been dispositioned. This
event occurs automatically when the stocker places the carrier that
experienced the ID error to the pickup port (See Section 13.3.3).
CarrierID
CarrierLoc
IDReadStatus
OperatorInitiatedAction The operator initiated an action from the Stocker Controller.
CommandID
CommandType
CarrierID
Source
Dest
Priority
10 Variable Data Items
10.1 The purpose of this section is to define the list of variable data item requirements for Stocker SEM equipment.
Values of these variables will be available to the host via collection event reports and host status queries.
10.2 Requirements
All variable data items and data item restrictions defined in SEMI E30 are required on Stocker SEM equipment
(according to the GEM capabilities required per Section 13).
All variable data items in the Stocker SEM Variable Data Item Dictionary for specific equipment classifications
are required for Stocker SEM equipment. The data item restrictions are also required.
Some SVs in the Variable Data Item Dictionary are referenced by an “i” subscript (e.g., CarrierID
i
). The “i”
subscript denotes a specific instance of the SV. This is necessary since there is usually more than one instance
of such an SV active in the system at the same time (e.g., if there are 20 carriers active at the same time then “i”
could range from 1 to 20 for CarrierID
i
). Variable Data Items containing the “i” subscript should not have
Variable IDs assigned to them.
All variable data items with a format of ASCII (A) shall be limited to printable characters in the decimal range
of 32 to 126, with the exception of the following non-permitted characters: “*” (decimal 42), “\”(decimal 92).
10.2.1 Variable data items are documented in the Stocker SEM Variable Data Item Dictionary using the following
format:
Variable Name Type Description Class Format Comments
Where:
Variable Name: A unique name for the variable data item.
Type: CV – meaning common variables, variables that are general to all vehicles.
CSV – meaning configuration specific variables.
Description: If class is DVVAL, then the description shall contain a statement of when data is valid in
terms of Stocker SEM events.
Class: The data type of the item.
Format: <SECS Message Language (SML) mnemonic>acceptable formats are SEMI E5 lists, ASCII,
floating point, unsigned integer or signed integer. A description of “ANY”, indicates that only
the above formats are acceptable and is left to the supplier to decide.
Comments: Any additional information pertinent to the variable name.