semi合集-English.pdf - 第7148页

SEMI S22-1103a © SEMI 2003, 2005 33 22.2.2 Procedure  For equipment conn ected to the facility branch circuit with a cord-and-plug (p lug/socket combination), ensure that the equi pmen t is i solated (e.g. , by placing …

SEMI S22-1103a © SEMI 2003, 2005 32

21.7 Method for Identifying Replacement Parts — A method of identifying parts that are anticipated to be replaced

by the user should be included in the instructions provided with the equipment.

21.8 Translations — Where required by law, the information should be provided in the primary language of the

location in which the equipment is to be used. However, the language in which the information was created should

be identified.

21.9 Applicable to All Documentation  The document reference designation system should be in accordance with

IEC 61346-1; or a reference key should be provided.

NOTE 54: Additional criteria pertaining to installation, operation, and maintenance instructions are provided in SEMI S2 and

SEMI S13.

22 Testing

22.1 General  The tests outlined in this document are to be performed by trained and qualified personnel who

have knowledge of the techniques and the test apparatuses described herein.

22.1.1 All test equipment should be calibrated and traceable to a calibration standards organization (e.g., National

Institute of Standards and Technology (NIST) in the United States or the National Metrology Institute in Japan).

22.1.2 The calibration interval for test equipment should be appropriate to the test equipment; usually this should

not exceed one year.

22.1.3 Except where noted otherwise, the equipment should be tested under the least favorable conditions within the

manufacturer's operating specifications. These conditions include:

a) supply potential,

b) supply frequency,

c) position of movable parts,

d) operating mode (e.g., full temperature conditions, motors in operation), and

e) adjustment of thermostats, regulating devices, or similar controls in operator-accessible areas.

NOTE 55: Least favorable conditions are those conditions in the manufacturer’s operating specifications under which the

equipment is least likely to pass the test.

22.1.4 To determine the least favorable supply potential for a test, consider:

a) multiple-nominal rated potentials (e.g., 120/240 V), and

b) extremes of nominal rated potential ranges (e.g., 208-240 V).

NOTE 56: Consideration of the tolerance on a nominal rated potential (e.g., 120  5 percent) is not necessary.

NOTE 57: Some standards (e.g., IEC 61010-1 and IEC 60950) may specify 90 percent and 110 percent of any rated supply

voltage.

22.1.5 To determine the least favorable supply frequency for a test, consider the nominal frequencies as specified

(e.g., 50 Hz, 60 Hz., or 50/60 Hz).

NOTE 58: Consideration of the tolerance on a nominal rated frequency (e.g., 50 ± 0.5 Hz) is not usually necessary.

22.1.6 As an alternative to carrying out tests on the complete equipment, tests may be conducted on circuits,

components and sub-assemblies independent of the equipment, provided that the results of the tests would be

representative of those performed as part of the assembled equipment.

EXCEPTION: The leakage current and earthing (grounding) continuity tests identified in ¶22.2 and ¶22.3 should be

completed only on fully assembled equipment.

22.2 Leakage Current Test for Cord-and-Plug Equipment

22.2.1 Test Equipment  A 1500 ohm resistor shunted by a 0.15µF capacitor (impedance network) and a true RMS

voltmeter with an accuracy of 1.0 percent. The impedance network may be a separate assembly or incorporated

within a leakage current measuring instrument.

SEMI S22-1103a © SEMI 2003, 2005 33

22.2.2 Procedure  For equipment connected to the facility branch circuit with a cord-and-plug (plug/socket

combination), ensure that the equipment is isolated (e.g., by placing the equipment on a wooden or other non-

conductive surface). Connect the equipment to its rated source of supply with the protective earthing conductor

disconnected and operate it at the least favorable conditions specified by the manufacturer. Connect the impedance

network between each accessible metal part and the protective earthing conductor. In determining accessibility of

energized parts, remove all doors, panels, etc. that are to be removed by the operator during normal operation. Using

a true RMS voltmeter, measure the voltage drop across the impedance network. Calculate the leakage current using

the formula:

leakage



tage

measured

1500 ohms

22.2.3 Acceptable Results  The maximum calculated leakage current does not exceed 3.5 mA.

NOTE 59: This test is to be conducted only on cord and plug connected equipment.

22.3 Earthing Continuity and Continuity of the Protective Bonding Circuit Test

22.3.1 Test Equipment  Low range ohmmeter with a range to measure 0.10 ohm with an accuracy of 1.0 percent.

The alternate test demands a low voltage current source capable of 10 Amps, a current meter to measure 10 amps

with an accuracy of 1 percent, and a voltage meter with a range to measure 0.01 Volts and an accuracy of 1 percent.

22.3.2 Procedure



Complete the test using one of the following procedures:

22.3.2.1 Disconnect the equipment from the supply. For equipment installed with fixed wiring methods, disconnect

the protective earthing conductor from the protective earthing conductor terminal. Measure the resistance between

the protective earthing terminal and each accessible metal part (handle, monitor, doors, etc.) on the equipment using

a low-range ohm-meter. Upon test completion, reconnect the protective earthing conductor to the protective

earthing conductor terminal.

22.3.2.2 Disconnect the equipment from the supply. For equipment installed with fixed wiring methods, disconnect

the protective earthing conductor from the protective earthing conductor terminal. Connect the low voltage current

source between the protective earthing conductor terminal and each accessible metal part (handle, monitor, doors,

etc.) on the equipment frame or cover. With a current of 10 amps injected, measure the voltage drop between the

equipment connection point and the protective earthing conductor terminal. Calculate the resistance by dividing the

measured voltage by the injected current. Upon test completion, reconnect the protective earthing conductor to the

protective earthing conductor terminal.

EXCEPTION: Earthing Continuity Test does not need to be conducted where accessible metal surfaces are not

likely to become energized in a single fault condition.

NOTE 60: Some standards (e.g., IEC 60204-1, IEC 61010-1) may specify this test to be performed using a current injection

method using more than 10 Amps.

22.3.3 Acceptable Results  The resistance between the protective earthing conductor terminal and each accessible

part should not exceed 0.1 ohm.

22.4 Starting Current Test

22.4.1 Test Equipment  None

22.4.2 Procedure — Start the equipment in accordance with manufacturer's instructions three times from a

completely stopped condition. Ensure that the time interval between successive starts is sufficient to allow the

equipment to return to ambient conditions.

22.4.3 Acceptable Results  None of the equipment's overcurrent protective devices should trip during this test.

NOTE 61: It is recommended that the peak inrush starting current be measured using an appropriate current measuring device

and recorded in the test report.

22.5 Input Test

22.5.1 Test Equipment  True RMS current measuring equipment, with accuracy of 3.0 percent.

SEMI S22-1103a © SEMI 2003, 2005 34

22.5.2 Procedure — Measure the input current to the equipment under the maximum normal operating load

conditions (i.e., with all motors, heaters, etc. running at manufacturer’s specified maximum loading conditions).

22.5.3 Acceptable Results  The measured current does not exceed 110 percent of the rated full load current value

specified on the equipment nameplate.

22.6 Dielectric Test

22.6.1 Test Equipment  Timer with accuracy of  5 seconds. Dielectric Withstand Tester with means of

indicating test potential, as well as an audible or visual indicator of dielectric breakdown, or an automatic-reject

feature for any unacceptable unit. In an alternating current test, the test equipment should include a transformer

having sinusoidal output. This transformer should have a rating of 500 VA or greater unless it is provided with a

voltmeter that directly measures the applied output potential.

22.6.2 Procedure — With the equipment disconnected from its supply, apply a dielectric withstand potential of

1500 Volts AC or 2121 Volts DC between energized metal parts of the primary circuit(s) and dead metal parts.

Surge suppression components and devices, and electronic components certified by an accredited testing laboratory

that may be damaged may be disconnected from the circuit for this test. For this test, the following conditions need

to be set:

a) the equipment should be at its maximum operating temperature;

b) switches should be placed in the “on” position; and

c) circuits through contactors should be completed by manually engaging the contacts or bypassing the contactor

terminals.

22.6.2.1 Achieve the test potential gradually, starting from zero and holding at the maximum value for a period of

one minute.

EXCEPTION: Where line-to-earth filter components are installed in the equipment, the DC dielectric potential

specified above may be used as an equivalent.

NOTE 62: An earthed conductor (neutral), if used in the circuit, is considered to be an energized conductor.

22.6.3 Acceptable Results  The equipment does not have a dielectric breakdown.

NOTE 63: Breakdown is often indicated by an abrupt decrease or nonlinear advance of voltage as the voltage is increased.

Similarly, a breakdown is often indicated by an abrupt increase in current. Partial discharge (corona) and similar phenomena are

disregarded during application of the test voltage.

22.7 Strain Relief Test  Either Procedure One or Procedure Two may be used to demonstrate compliance to this

test.

22.7.1 Test Equipment  Timer with accuracy of  5 seconds. A calibrated weight to apply a force of 156

Newtons (35 lb)  1.56 Newtons (0.35 lb). A supporting surface on which to secure the equipment.

22.7.2 Procedure One

22.7.2.1 For cord-and-plug connected equipment, strain relief is provided to prevent mechanical stress such as a

pull or twist being transmitted to terminals, splices or interior wiring. Support the equipment on a surface so it will

not move when the force is applied to the cord. Apply a direct pull of 156 N (35 pounds) to the equipment supply

cord from the least favorable angle. If necessary, use pulleys or other means to adjust the angle of force applied to

the strain relief on the equipment. Apply the force gradually by slowly suspending the weight on the cord and

maintain the applied force for a period of one minute.

22.7.2.2 Acceptable Results For Procedure One  The equipment supply cord does not displace to the extent that

stress could be applied to the internal connections.

22.7.3 Procedure Two

22.7.3.1 Support the equipment on a surface so it will not move when the force is applied to the cord. Disconnect

the internal connections for the cord. Mark the external portion of the cord with tape where it meets the strain relief.

Apply a direct pull of 156 N (35 pounds) to the equipment supply cord from the least favorable angle. If necessary,