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SEMI E125-0305 © SEMI 2003, 2005 36 standardVersion objType SEMIObjType 1 attributes 2..* Parameter 1 stateMachine 0..1 StateMa chineInstance 1 eventData 0..* Figure 21 Describing Implemented SEMI ObjT ypes 10.9.1.1 SEMI…

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10.8.6.9 Event Attribute Definition Table
Table 61 Event Attribute Definition
Attribute Name Definition Form
name A human-readable name for the event. Text.
id A unique identifier for the event. Text, unique across all events in all StateMachines.
description A human-readable description of the meaning or
purpose of the event.
Text.
10.8.6.10 SEMI Standard Events
10.8.6.10.1 name — If the Event represents a SEMI standard event, the value of this attribute shall be a URN of the
form: “urn:semi-org:event:<standard id>:<state machine>:<transition number>:<event name>”.
10.8.6.10.1.1 <standard id> shall be a string formatted according to the SEMI standard form for representing a
specific version of a standard document (for example, “E87-1101”), no spaces, upper-case alphanumeric characters
and hyphens only.
10.8.6.10.1.2 <state machine> shall be the name of the state machine in which the event is defined. If no such state
machine is defined, this field shall be equal to the text “None”. If there is a defined state machine, the name shall be
equal to the state machine name as it appears in the standard, with each word in the name concatenated. The state
machine name shall use the camel case capitalization convention (that is, only the first letter of each word in the
state machine name is capitalized). For example, the state machine name for the SEMI E87 LOAD PORT
TRANSFER state machine would be “LoadPortTransfer”.
10.8.6.10.1.3 <transition number> shall be a string representation of the transition number as it appears in the state
machine definition. If no state machine or transition number is defined in the standard, this field shall be equal to
the text “None”.
10.8.6.10.1.4 <event name> shall be the name of the event as it appears in the standard with no spaces,
alphanumeric characters only, using camel case capitalization. If no event name is defined, this field shall be
formed by concatenating the names of the source and target states for the <transition id>, separated by a hyphen.
The state names shall have no spaces, alphanumeric characters only, and use camel case capitalization. If either of
these states is an “initial” or “final” state, the words “Initial” or “Final”, respectively, shall be used for the state
name. For example, the event name for the E87 load port transfer history transition from the initial state to “OUT
OF SERVICE” would be “Initial-OutOfService”.
10.8.6.11 Event Association Definition Table
Table 62 Event Association Definition
Association Role Name Definition Comments
transitions The transitions to which this event is mapped. One or more elements of type Transition.
10.9 ObjTypes
10.9.1 Figure 21 shows how to describe SEMI ObjTypes (for example, the “Carrier” ObjType from SEMI E87) that
have been implemented by the equipment. An ObjType is similar to a class in that it describes attributes and state
machines that are common to all instances of the ObjType. Each ObjType instance maintains its attributes and state
machines independently of all other instances of the same ObjType. See Related Information 6 for examples using
the SEMIObjType class.
SEMI E125-0305 © SEMI 2003, 2005 36
standardVersion
objType
SEMIObjType
1
attributes2..*
Parameter
1
stateMachine
0..1
StateMachineInstance
1
eventData 0..*
Figure 21
Describing Implemented SEMI ObjTypes
10.9.1.1 SEMIObjType — This class describes the attributes and events for a SEMI ObjType that has been
implemented by the equipment. If it is a SEMI standard ObjType then it is identified by the name of the SEMI
standard within which it was defined, and the name of the ObjType specified in that standard. Each ObjType
includes at least two attributes, corresponding to its type name and its instance id (see SEMI E39).
10.9.1.2 SEMIObjType Attribute Definition Table
Table 63 SEMIObjType Attribute Definition
Attribute Name Definition Required Form
standardVersion The complete SEMI standard version number for
the document where the ObjType is defined, if
applicable.
Y Text, using the SEMI standard form for
representing a specific version of a
standard document (for example, “E87-
1101”), no spaces, upper-case
alphanumeric characters and hyphens
only. If not a SEMI standard ObjType,
then this attribute shall be empty.
objType The name of the SEMI objType. Y Text. Named using identical spelling and
case as the documented objType in the
corresponding standard.
10.9.1.3 SEMIObjType Association Definition Table
Table 64 SEMIObjType Association Definition
Association Role Name Definition Comments
attributes Attributes defined for this ObjType. Unordered list of elements of type Parameter, described in
Section 10.4 . Each Parameter shall be typed and named
according to Sections 10.5.4 and 10.4.10 . All attributes
b
elonging to an ObjType are maintained independently in each
ObjType instance.
eventData Parameters that are not formal
attributes that this ObjType provides
with generated events.
List of zero or more elements of type Parameter, described in
Section 10.4 .
stateMachine The state machine (if any)
supported by this ObjType.
Zero or one element of type StateMachineInstance, described
in Section 10.8.6 .
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11 Requirements for Compliance
11.1 Compliance to Equipment Self-Description
11.2 Table 55 provides a checklist for Equipment Self Description compliance.
Table 65 Equipment Self-Description Compliance Statement
Fundamental Requirements Section Implemented using
SEMI technology
mapping
Implementation complies
with ESD specification
and technology mapping
ESD data associated with all
information sources and items
accessible via data
acquisition are described
Metadata Access 9.1
Yes No Yes No
N/A
Management of Equipment Metadata 10.1
Yes No Yes No
N/A
Equipment Physical Structure 10.2
Yes No Yes No Yes No
Equipment Node Description 10.3
Yes No Yes No Yes No
Parameters 10.4
Yes No Yes No Yes No
Types 10.5
Yes No Yes No Yes No
Units 10.6
Yes No Yes No Yes No
Exceptions 10.7
Yes No Yes No Yes No
State Machines 10.8
Yes No Yes No Yes No
ObjTypes 10.9
Yes No Yes No Yes No