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SEMI C18-0301 © SEMI 1978, 2001 A C ETIC A C ID 4 Previous SEMI Refe rence # C1.1- 96 Grade 1 (Specificatio n) Sodium (Na) 0.3 ppm m ax Tin (S n) 0.3 ppm m ax Titanium (Ti) 0.3 ppm m a x Zinc (Z n) 0.3 ppm max Particles …
ACETIC ACID SEMI C18-0301 © SEMI 1978, 20013
sample by effervescence or spattering until there is no
further loss of liquid. Cool. Add 1 mL of ultra pure,
70% nitric acid. While maintaining volume, carefully
warm several minutes to dissolve any residue. Cool.
Transfer quantitatively to a 50 mL volumetric flask
using 2% nitric acid for rinsing and dilution to volume.
Run a reagent blank.
8.12.3 Analysis
8.12.3.1 Using the acidic sample standards and a
reagent blank, analyze group I elements by flame
atomic absorption spectroscopy and all other elements
by plasma emission spectroscopy.
9 Grade 2 Procedures
9.1 This section does not apply to this chemical.
10 Grade 3 Procedures
10.1 This section does not apply to this chemical.
11 Grade 4 Procedures
11.1 This section does not apply to this chemical.
12 Grade 5 Procedures
12.1 This section does not apply to this chemical.
13 VLSI Grade Procedures
13.1 This section does not apply to this chemical.
14 Tier A Procedures
14.1 This section does not apply to this chemical.
15 Tier B Procedures
15.1 This section does not apply to this chemical.
16 Tier C Procedures
16.1 This section does not apply to this chemical.
17 Tier D Procedures
17.1 This section does not apply to this chemical.
Table 1 Impurity Limits and Other Requirements for Acetic Acid
Previous SEMI Reference # C1.1-96
Grade 1
(Specification)
Assay (CH
3
COOH) 99.7% min
Color (APHA) 10 max
Residue after Evaporation 10 ppm max
Solubility in Water To pass test
Substances Reducing Dichromate To pass test
Substances Reducing Permanganate To pass test
Chloride (Cl) 1 ppm max
Phosphate (PO
4
) 1 ppm max
Sulfate (SO
4
) 0.5 ppm max
Acetic Anhydride [(CH
3
CO)
2
O] 0.1% max
Aluminum (Al) 0.3 ppm max
Arsenic and Antimony (as As) 0.005 ppm max
Boron (B) 0.2 ppm max
Calcium (Ca) 0.3 ppm max
Chromium (Cr) 0.2 ppm max
Copper (Cu) 0.1 ppm max
Gold (Au) 0.3 ppm max
Iron (Fe) 0.2 ppm max
Lead (Pb) 0.3 ppm max
Magnesium (Mg) 0.3 ppm max
Manganese (Mn) 0.3 ppm max
Nickel (Ni) 0.1 ppm max
Potassium (K) 0.3 ppm max
SEMI C18-0301 © SEMI 1978, 2001 ACETIC ACID4
Previous SEMI Reference # C1.1-96
Grade 1
(Specification)
Sodium (Na) 0.3 ppm max
Tin (Sn) 0.3 ppm max
Titanium (Ti) 0.3 ppm max
Zinc (Zn) 0.3 ppm max
Particles in bottles:
size, #/mL
≥1.0 µm, 25 max
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
ACETONE SEMI C19-0301 © SEMI 1978, 20011
SEMI C19-0301
SPECIFICATION FOR ACETONE
This specification was technically approved by the Global Process Chemicals Committee and is the direct
responsibility of the North American Process Chemicals Committee. Current edition approved by the North
American Regional Standards Committee on October 17, 1999. Initially available at www.semi.org February
2001; to be published March 2001. This document replaces SEMI C1.2 in its entirety. Originally published
in 1978; previously published June 1999.
1 Purpose
1.1 The purpose of this document is to standardize
requirements for acetone used in the semiconductor
industry and testing procedures to support those
standards. Test methods have been shown to give
statistically valid results. This document also provides
guidelines for grades of acetone for which a need has
been identified. In the case of the guidelines, the test
methods may not have been statistically validated yet.
2 Scope
2.1 The scope of this document is all grades of acetone
used in the semiconductor industry.
2.2 These standards do not purport to address safety
issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 None.
4 Referenced Documents
4.1 SEMI Standards
SEMI C1 — Specifications for Reagents
4.2 ASTM Standards
1
ASTM D5127 — Standard Guide for Ultra Pure Water
Used in the Electronics and Semiconductor Industry
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 None.
6 Physical Property (for information only)
Density at 25°C
0.79 g/mL
Boiling Point
56.3°C
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohocken, Pennsylvania 19428-2959, USA.
Telephone: 610.832.9585, Fax: 610.832.9555. Website:
www.astm.org
7 Requirements
7.1 The requirements for acetone for Grade 1 are listed
in Table 1.
8 Grade 1 Procedures
NOTE 2: Each laboratory is responsible for verifying the
validity of the method within its own operation.
8.1 Assay — Analyze the sample b y gas
chromatography (see SEMI C1, Section 3.1, Guidelines
for Assay by Wide Bore Column Gas
Chromatography). The parameters cited have given
satisfactory results.
Column: 30 meter × 530 micron I.D.-fused silica
capillary, coated with 1 mm film of DB-1701 or
equivalent (14% cyanopropyphenyl which has been
surface bonded and crosslinked).
Column Temperature: 40°C isothermal for 5 minutes,
then programmed to 200°C at 10°C/min.
Injector Temperature:
150°C
Detector Temperature:
250°C
Sample Size: 1 µL split
Carrier Gas: Helium at 3
mL/min
Detector: Flame Ionization
Approximate Retention Times (min):
Methanol 1.1
Acetaldehyde 2.3
Acetone 2.9
Isopropanol 3.3
Cumene 10.0
Mesityl Oxide 11.8
Diacetone Alcohol 12.0
8.2 Color — Dilute 2.0 mL of platinum-cobalt stock
solution (APHA No. 500) to 100 mL with water.
Compare this standard (APHA No. 10) with 100 mL of
sample in Nessler tubes. View vertically over white
background. The sample must be no darker than the
standard.
8.3 Acidity — To 25 mL of water in a glass-stoppered
flask, add 10 mL of sample and 0.1 mL of