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SEMI E91-0600 © SEMI 1999 , 2000 10 Table 5 Collection Ev ents Required by Prober Job State Transiti on Transiti on Current State New State Typical Variable Data JOB Created Undefined JOB CREATED JOB Canceled JOB CREATED…

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SEMI E91-0600 © SEMI 1999, 20009
Table 4 Collection Events Required by Process State Transition
Transition Transition No. Current State New State Typical Variable
Data
Start INIT 1 Undefined INIT Previous Process
State
Into IDLE 2 INIT IDLE
5EXECUTING
12 STOPPING
22 ABORTING
24 IDLE with ALARMS
26 MAINTENANCE
Into IDLE with ALARMS 23 IDLE IDLE with ALARMS
Into MAINTENANCE 25 IDLE MAINTENANCE
Start SETTING UP 3 IDLE SETTING UP
11 EXECUTING
10 CHECKING
Start EXECUTING 4 SETTING UP EXECUTING
10 CHECKING
Start PAUSING 9 SETTING UP PAUSING
9EXECUTING
Into PAUSED 13 PAUSING PAUSED
18 PAUSED SETTING UP
14 ALARM PAUSED
Start CHECKING 16 PAUSED CHECKING
Into PAUSED SETTING UP 17 PAUSED PAUSED SETTING UP
Into ALARM PAUSED 8 SETTING UP ALARM PAUSED
8EXECUTING
15 CHECKING
15 PAUSING
15 PAUSED SETTING UP
15 PAUSED
Start STOPPING 6 SETTING UP STOPPING
6EXECUTING
19 CHECKING
19 PAUSING
19 PAUSED SETTING UP
19 PAUSED
19 ALARM PAUSED
Start ABORTING 7 SETTING UP ABORTING
7EXECUTING
20 CHECKING
20 PAUSING
20 PAUSED SETTING UP
20 PAUSED
20 ALARM PAUSED
21 STOPPING
SEMI E91-0600 © SEMI 1999, 2000 10
Table 5 Collection Events Required by Prober Job State Transition
Transition Current State New State
Typical Variable
Data
JOB Created Undefined JOB CREATED
JOB Canceled JOB CREATED Undefined
JOB Started JOB CREATED JOB SET UP
Enter Processing JOB SET UP JOB PROCESSING
End Processing JOB PROCESSING Undefined
Start Aborting JOB SET UP, JOB PROCESSING JOB ABORTING
End Aborting JOB ABORTING Undefined
Start Stopping JOB SET UP, JOB PROCESSING JOB STOPPING
End Stopping JOB STOPPING Undefined
EventJobID
Table 6 Other Collection Events
Event Name Contents Typical Variable Data
Wafer Start Wafer processing was started. WaferStartJobID, WaferStartWaferID
Wafer End Wafer processing was completed. WaferEndJobID, WaferEndWaferID
Ready to Receive
Previous Data
Waits for reception of instructed data for wafer. WaitPreDataJobID, WaitPreDataWaferID
7 Data Item Variables
7.1 The purpose of this section is to define the list of
data item variables required by the PSEM. Values of
these variables will be available to the host through
collection event reports and host status queries.
7.2 Requirements
7.2.1 All generic variable data items defined in GEM
are required by all PSEM equipment. Any supplier-
defined variables shall be documented in the same
format used by this document. The following minimum
information is required:
<variable name> Class: <ECV, SV, or DVVAL>
Format: <SML>
Description: <if class=DVVAL, description must
contain statement of when data is
valid>.
<If format = ASCII then a length is
required. It is assumed to be left-
justified unless otherwise noted. >
7.3 Data Types
7.3.1 Equipment Constants (ECVs) can be changed by
the host using S2F15. The operator may be able to
change some values, but the equipment does not change
the values on its own. The value of an equipment
constant may be queried by the host at any time, using
the S2F13/14 transaction. They reside in non-volatile
memory of the equipment. Equipment constants remain
in effect until they are overwritten either by manual
entry or by a NEW EQUIPMENT CONSTANT SEND.
Equipment constants have various uses in PSEM,
including the following:
• Equipment offsets that match the performance of
several pieces of equipment that would otherwise
perform differently due to inherent manufacturing
differences. Examples are home values and motion
axis scaling factors.
• Setting the configuration of the equipment to allow
for different material specifications, equipment
options, material flows, frequency of automatic
functions, etc. Examples are yield check frequency.
• Managing optional machine features. Examples are
constants that tell the system whether optional
features such as automated media stackers are
present and control the configuration and function
of these optional subsystems when they are
present.
7.3.2 Status Variables (SVs) are val id at all times. A
SV may not be changed by the host but may be changed
by the equipment or operator. The value of status
variables may be queried by the host at anytime using
the S1,F3/4 or S6,F19/20 transactions. DVVALs are
variables that are valid only upon the occurrence of
specific collection events. An attempt to read a data
variable at the wrong time will not generate an error,
but the data reported may not have relevant meaning.
SEMI E91-0600 © SEMI 1999, 200011
7.4 Data Item Variable Table
Table 7 Data Item Variable Table
Variable Name Description Class Format Comments
StopUnit Constant which specifies separation of stop
operation in probing.
ECV U1 0=Unit of Die
1=Unit of Wafer
2=Unit of Cassette
3=Unit of Lot
EventJobID Prober Job ID which occurs Prober Job state
transition.
DVVAL A[30] Valid when Prober Job state
transition occurs.
EventJobState Current state of Prober Job whose state changed. DVVAL U2 Valid in event of Prober Job
state transition.
ResultData Processing result in unit of one wafer. DVVAL L[n] Valid only in wafer end event.
8 Process Program Manage ment
8.1 PSEM explains how to specify a process program for the prober and the process program control between the
host and prober.
8.2 Process Program Requirements
8.2.1 The PSEM requires that the G EM capability of process program management be fully supported for this class
of prober.
8.3 Process Program
8.3.1 The process program of the prober consists of the main process program and two or more sub process
programs that are referred to by the main process program.
Table 8 Kinds and Descriptions of Process Programs
Kind Description
Product type master record Master process program for processing.
Sub-parameter record Sub-process program for processing.
Various kinds of parameter records that consist main process program for processing.
8.3.2 These process programs are controlled by the prober with grouped into different categories according to
application purposes and structures. The prober defines PPID with “structure class name/class name/process
program record name.” The number of PPID digits is defined by an equipment supplier. If the number of the digits
is less than a default value, left-justify and fill in space after PPID. Do not use space at some midpoint in PPID. At
present, the prober practically uses the structure class name and class name as shown in the table given below.
Table 9 How to Operate Class Name and Structural Class Name
Classification Operation Remarks
Structural class name Class name indicating major classification of process program record. Defined by supplier.
Class name Class name indicating attribute of process program record. Defined by supplier.
8.4 Master Process Program Reco rd
8.4.1 The master process program re cord is a plain text (ASCII) record like below:
DEVICE:xxxxxxxx
WAFER_SIZE:xx
DIE_SIZE:xxxxxx,xxxxxx