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SEMI E123-0703 © SEMI 2003 2 equipment for purposes of perform ing package electrical testing. 5.1.4 execution area — The area from which a current copy of the process progra m instructions is executed. 5.1.5 handling eq…

SEMI E123-0703 © SEMI 2003 1

SEMI E123-0703

STANDARD FOR HANDLER EQUIPMENT SPECIFIC EQUIPMENT

MODEL (HSEM)

This standard was technically approved by the Global Information and Control Committee and is the direct

responsibility of the North American Information and Control Committee. Current edition approved by the

North American Regional Standards Committee on November 22, 2002. Initially available at www.semi.org

January 2003; to be published March 2003.

NOTICE: The designation of SEMI E123 was updated

during the 0703 publishing cycle to reflect the addition

of SEMI E123.1.

NOTICE: This standard replaces SEMI E30.2, which

has been removed from publication as of the March

2003 (0303) publication cycle.

1 Purpose

1.1 This document establishes a Specific Equipment

Model (SEM) for Handling equipment (HSEM). The

SEM consists of equipment characteristics and

behaviors that are applicable to this class of equipment.

The intent of this document is to facilitate the

integration of Handling equipment into an automated

(semiconductor) factory. This document accomplishes

this by defining an operational model for Handling

equipment as viewed by a factory automation

controller. This definition provides a standard host

interface and equipment operational behavior.

2 Scope

2.1 The scope of this document is limited to the

definition of Handling equipment behavior as perceived

by a host. It defines the view of the equipment through

the equipment communications interface. It does not

define the internal operation of the equipment. It

includes a specific processing state model as the basis

for the behavior of all equipment of this class.

2.2 This document expands the handler equipment

requirements and capabilities in the areas of the

processing state model, collection event, alarm

documentation, remote commands, variable item, and

process program management.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 Communications — HSEM-compliant equipment

shall support the High Speed Messaging Service

(HSMS) communication standard sending SEMI E5

messages over TCP/IP. The reason behind this

requirement is the amount of data available for

monitoring from this class of equipment. This

specification deals only with the behavior of the handler

in communicating with the host.

3.2 Multi-Process-Site HSEM Implementations — This

SEM makes some demands and assumptions about the

Handler with multiple process-sites in a configuration.

These requirements are as follows:

3.2.1 Handling equipment in a multiple process-site

configuration (i.e., lead conditioning site, electrical test-

site) provides identification and status information (see

Variable Item) at both the site level and the subsite

level. An example could be a handler with both a lead

conditioning site and an electrical test-site, with the

electrical test-site containing multiple subsites (i.e., test

heads).

4 Referenced Standards

4.1 SEMI Standards

SEMI E30 — Generic Model for Communications and

Control of Manufacturing Equipment (GEM)

SEMI E37 — High-Speed SECS Message Services

(HSMS) Generic Services

SEMI E37.1 — High-Speed SECS Message Services

Single Selected-Session Mode (HSMS-SS)

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Definitions

5.1.1 alignment location — Location that individual

packaged units are placed at the process-site (e.g.,

electrical test).

5.1.2 chaining — The process of execution over

multiple lots or runs with the same Process Program

and the same handler operating conditions.

5.1.3 electrical test-site — A process-site on the

equipment which is coupled with electrical testing

SEMI E123-0703 © SEMI 2003 2

equipment for purposes of performing package

electrical testing.

5.1.4 execution area — The area from which a current

copy of the process program instructions is executed.

5.1.5 handling equipment — An equipment class

generally consisting of integrated mechanisms and

controls for the purpose of manipulating packaged

devices, trays, and tubes during the manufacturing

process.

5.1.6 indexing — The controlled stepped movement of

material through the handler.

5.1.7 kit — Specific items of hardware and software as

specified by the equipment manufacturer that adapt the

equipment for a specific unit or unit package.

5.1.8 leadconditioning site — A process-site on the

handler where some form of conditioning occurs on the

package leadfingers (i.e., warming).

5.1.9 leadfinger (or substrate connector lead) — (1) In

ceramic packages, an area of refractory metal that has

been plated and is designated for the attachment to a

process-site. (2) The area of the unit designated for

attachment to a process-site.

5.1.10 leadframe — A sheet metal framework upon

which a chip (sometimes chips) is attached, wire-

bonded, and then either molded with plastic epoxy or

with ceramic and/or metal.

5.1.11 media — A temporary material carrier used to

hold and transport units/devices (tubes, trays, etc.).

5.1.12 media map — Formatted data used to map

functionally good and bad units/devices to an X, Y, Z

location in the media. Maps can be requested by the

handler for use prior to processing and then updated

after processing.

5.1.13 off-line programming (OLP) utility — Utility to

create, edit, and format process programs on a

computer, as opposed to creating process programs at

the equipment.

5.1.14 process-site — A location on the equipment

where work is performed on a packaged device (i.e,

electrical test-site, lead conditioning site).

5.1.15 process subsite — An addressable portion of a

process-site.

5.1.16 reset — The action of changing the value of a

variable, such as wafer count (usually to zero).

5.1.17 safe state — A state in which the equipment

presents no danger to the product or user. This implies

that safety interlocks are in place such that the

equipment can be serviced without harm to the operator

and that the material being processed has been removed

from the processing station into an accessible location.

5.1.18 slot — A position in a carrier where a

leadframe, tray, tube, or other media element may

reside.

5.1.19 sort category — Handler specific sorting

category related to a physical buffer within a handler

where parts are stored after processing based on

processing results. Typically there is some software

mapping between process results (e.g., Test Result

Bins) and a Sort Category.

5.1.20 tray — A flat rectangular form of media for

holding singulated packaged units. Also referred to as

waffle packs or matrix trays. A tray is generally

molded plastic with a defined matrix of cells or pockets

tailored for specific packages.

5.1.21 tube — A hollow form of media for holding

packaged units. Also referred to as rails or sticks. A

tube is generally composed of extruded polymer with

internal section dimensions and features tailored for a

specific package.

5.1.22 unit — Discreetly addressable element, such as

an integrated circuit or chip, handled individually or in

groups by a handler for a process tool.

6 State Model

6.1 State Model — The purpose is to define the

equipment-specific processing state model and other

state models necessary to portray the expected

operational states of the equipment to enable host

tracking and control in place of a local operator.

6.2 State Model Requirements

6.2.1 The processing state models in this document are

required for implementing an HSEM-compliant

handler. A state model consists of the following state

model diagram, state definitions, and state transition

tables.

6.2.2 A state model represents the host' s view of the

handler, not necessarily the actual handler' s internal

operations.

6.2.3 All HSEM state model transitions shall be

mapped sequentially into the actual equipment events

that satisfy the requirements of those transitions. In

certain implementations, the handler may enter a state

and have already satisfied all of the conditions required

by the HSEM state model for transition to another state.

The handler makes the required transition without any

additional actions in this situation.

6.2.4 Some equipment may need to include additional

states. However, any additional states must not change

the HSEM-defined state transitions. All expected transitions between HSEM states must occur.

6.3 HSEM State Model

EXECUTING

PROCESS

PROCESS ACTIVE

STOPPING

SETTING

READY

AWAITING

COMMAND

CONTACTOR

OPEN

IDLE

INIT

IDLE with

ALARM

ABORTED

WORKING

ABORTING

PAUSING

PAUSED

ALARM

PAUSED

CHECKING

PAUSE

PROCESS

PAUSE

PRELOADING

Figure 1

HSEM Processing State Model