semi合集-English.pdf - 第5788页
SEMI P23-0200 © SEMI 1993 , 2000 11 y1 x5 x4 x3 x2 x1 y3 y4 y2 50 u m 50 u m 25 0 um 25 0 um y5 Figure 6 Cell Contact Hole Pattern (T ype A) Defect ID; A to L, and N
SEMI P23-0200 © SEMI 1993, 2000 10
y1
x5x4x3x2x1
y3
y4
y2
50 um
50 um
250 um
250 um
y5
Figure 5
Cell
Sample; Wiring (Type A)
Defect ID; A, B, C, D
SEMI P23-0200 © SEMI 1993, 200011
y1
x5x4x3x2x1
y3
y4
y2
50 um
50 um
250 um
250 um
y5
Figure 6
Cell
Contact Hole Pattern (Type A)
Defect ID; A to L, and N
SEMI P23-0200 © SEMI 1993, 2000 12
y1
x5x4x3x2x1
y3
y4
y2
50 um
50 um
250 um
250 um
y5
Figure 7
Cell
Contact Hole Pattern (Type B)
Defect ID; M