semi合集-English.pdf - 第1091页
SEMI E5-1104 © SEMI 1982, 2004 33 Name Format Description Values Where Used RMCHGTYPE 5() Indicates the type of chang e for a recipe 0 = No change 1 = Create 2 = Update 5 = Delete 6 = Copy (new object) 7 = Rename 8 = Unp…
SEMI E5-1104 © SEMI 1982, 2004 32
Name Format Description Values Where Used
RECLEN 3(), 5() Maximum length of a
Discrete record
S13F4
REFP 3() Reference Point
S12F1, F4
REPGSZ 20, 3(),
5()
Reporting group size
S2F23;
S17F5
RESC 31, 51 Resolution code for numeric
data
1 = Absolute. Value may be
specified to nearest increment
of RESV
2 = Significant Digits. Value
may be specified with no more
significant digits than RESV
allows
S7F22
RESPEC 20 Object specifier for the recipe
executor
S15F29, F33,
F35
RESV 3(), 4(),
5()
Resolution value for numeric
data
If RESC=1, then RESV contains
smallest increment allowed for
parameter
S7F22
RETICLEID 20 The object identifier for a
reticle. Conforms to
OBJSPEC.
S3F35
RETPLACEINSTR 51 Instructions to indicate which
pod slots will have reticles
placed. Possible values for
ReticlePlacementInstruction
are:
0 = PLACE
1 = PASS BY
2 = CURRENTLY OCCUPIED
S3F35
RETREMOVEINSTR 51 Instructions to indicate which
pod slots will have reticles
removed
0 = REMOVE
1 = PASS BY
S3F35
RIC 31, 51 Reset code, 1 byte
0 = Not used
1 = Power up reset
>1 Other reset conditions
2-63 Reserved
S2F19
RMACK 51 Conveys whether a requested
action was successfully
completed, denied, completed
with errors, or will be
completed with notification to
the requestor
0 = Successful completion
1 = Cannot perform action
2 = Completed with errors
3 = Action will be completed
and notification sent
4 = No request for this action
exists
S15F4, F6, F8,
F10, F12, F14,
F16, F18, F20,
F22, F24, F25,
F26, F28, F30,
F32, F34, F36,
F38, F40, F42,
F44, F48, F53
RMCHGSTAT 5() Indicates the change that
occurred for an object
0 = No change
1 = Created
2 = Updated
3 = Stored (new)
4 = Replaced
5 = Deleted
6 = Copied (new object)
7 = Renamed
8 = Unprotected
9 = Protected
10 = Verified
11 = Linked
12 = Unlinked
13 = Certified
14 = De-certified
15 = Selected
16 = Deselected
S15F25
SEMI E5-1104 © SEMI 1982, 2004 33
Name Format Description Values Where Used
RMCHGTYPE 5() Indicates the type of change
for a recipe
0 = No change
1 = Create
2 = Update
5 = Delete
6 = Copy (new object)
7 = Rename
8 = Unprotect
9 = Product
10 = Verify
11 = Link
12 = Unlink
13 = Certify
14 = De-certify
15 = Change generic attribute
16 = Change agent-specific
attribute
17 = Change both generic and
agent-specific attributes
S15F37, F41,
F44, F46, F47,
F48
RMDATASIZE 5() The maximum total length, in
bytes, of a multi-block
message, used by the receiver
to determine if the anticipated
message exceeds the
receiver’s capacity
S15F1
RMGRNT 10 Grant code, used to grant or
deny a request. 1 byte.
0 = Permission granted
1 = Cannot accept now, try
again
2 = No space
3 = Request is on hold
4-64 Reserved
S15F2, F37,
F46
RMNEWNS 20 New name (identifier)
assigned to a recipe
namespace
S15F5
RMNSCMD 51 Action to be performed on a
recipe namespace
1 = Created
5 = Deleted
0, 2-4, 6-63 Reserved
S15F3
RMNSSPEC 20 The object specifier of a
recipe namespace
S15F3, F5, F7,
F11, F21, F23,
F25, F47
RMRECSPEC 20 The object specifier of a
distributed recipe namespace
recorder
S15F39, F41,
F43
RMREQUESTOR 11 Set to TRUE if initiator of
change request was an
attached segment. Set to
FALSE otherwise.
S15F41, F44,
F46
RMSEGSPEC 20 The object specifier of a
distributed recipe namespace
segment
S15F37, F39,
F41, F44, F46,
F47
RMSPACE 5() The amount of storage
available for at least one
recipe in a recipe namespace,
in bytes
S15F8
ROWCT 5() Row count in die increments
S12F1, F4
SEMI E5-1104 © SEMI 1982, 2004 34
Name Format Description Values Where Used
RPMACK 51 Reticle Pod management
service acknowledge code.
One byte.
0 = Acknowledge, service has
been performed
1 = Service does not exist
2 = Can not perform now
3 = At least parameter does not
exist
4 = Acknowledge, request will
be performed with completion
signaled later by an event
5 = Service is not completed or
prohibited
6 = No such object exists
7-63 Reserved
RPMDESTLOC 20 The LocationID towards
which a reticle must be
moved. Conforms to OBJID
S14F19
RPMSOURLOC The LocationID of the
location from which to pick-
up a reticle for moving it to
another location. Conforms
to OBJID.
S14F19
RPSEL 51 Reference Point Select
Number of reference point from
0-n.
S12F1, F4
RPTID 20, 3(),
5()
Report ID
S2F33, F35;
S6F11, F13,
F16, F11, F19,
F21, F22;
S17F1, F2, F3,
F4, F5, F9, F11,
F12
RPTOC 11 A Trace Object attribute for a
flag which, if set TRUE,
causes only variables which
have changed during the
sample period to be included
in a report.
S14F1, F2, F3,
F4;
S17F5
RQCMD 11 Required Command
True = Command must be
specified
False = Command is optional
S7F22
RQPAR 11 Required Parameter
True = Parameter must be
specified
False = Parameter is optional
S7F22
RRACK 10 Request to Receive
Acknowledge code, 1 byte
0 = Acknowledge, OK (note that
'OK' differs from 'ready')
1 = Invalid port number
2 = Requested material is not
at identified port
3 = Busy. Try again
4 = Sender does not have
permission to perform this
operation
5-63 Reserved
S4F18