semi合集-English.pdf - 第2512页

SEMI E88-1104 E © SEMI 1999, 2004 9 Transition # Previous State Trigger New State Actions Comments 4 TRANSFER- RING The SC pauses e xecution of the TRANSFER command due to an anomaly condition. PAUSED S6F11 TransferPause…

SEMI E88-1104

8.3.3.4 PAUSED (ACTIVE sub-state) — The Transfer command is not actively being executed by the stocker. This

may be due to an internal equipment error that does not immediately terminate the Transfer command

unsuccessfully. This would allow the Host or Operator the opportunity to retry the transfer.

8.3.3.5 CANCELING — The TRANSFER command cancel procedure is being performed to terminate a transfer

command which never entered the ACTIVE state (currently QUEUED). This state is entered via a CANCEL

remote command.

8.3.3.6 ABORTING — The TRANSFER command abort procedure is being performed to terminate a transfer

command which has entered the ACTIVE state. This state can only be entered via an ABORT remote command.

An unsuccessful transfer command completion will ultimately result from this state.

CANCELING

BORTING

CTIVE

TRANSFERRING

PAUSED

TRANSFERRING

PAUSED

QUEUED

Figure 4

Generic Stocker SEM TRANSFER Command State Model Diagram

8.3.4 TRANSFER Command State Transition Table

Table 2 Transfer Command State Transition Table

Transition # Previous State Trigger New State Actions Comments

1 QUEUED The TRANSFER

command has been

initiated by the SC.

TRANSFER-

RING

S6F11

TransferInitiated

2 QUEUED Host sends CANCEL

command for a specified

TRANSFER command to

SC.

CANCELING S6F11

TransferCancel-

Initiated

TRANSFER command is to

be removed from the

TRANSFER command queue.

3 CANCELING The cancel procedure for

the TRANSFER command

has completed by the

stocker and the SC.

None S6F11

TransferCancel-

Completed

The carrier will still be

situated at the transfer source

location. The carrier may

now be included in a future

transfer.

SEMI E88-1104

Transition # Previous State Trigger New State Actions Comments

4 TRANSFER-

RING

The SC pauses execution

of the TRANSFER

command due to an

anomaly condition.

PAUSED S6F11

TransferPaused for

a specific

CommandID

It is an important distinction

to make that the TRANSFER

command is paused and not

just the transfer agent.

The Stocker Controller state

will be ALARM.

5 PAUSED The SC resumes execution

of the TRANSFER

command since the

anomaly condition has

been cleared.

TRANSFER-

RING

S6F11

TransferResumed

for a specific

CommandID

If this was the only remaining

stocker alarm, the Stocker

Controller state will transition

to NO ALARMS.

6 ACTIVE The TRANSFER

command has completed

by the stocker and SC

(either successfully or

unsuccessfully).

None S6F11

TransferComplete

d sent to Host with

appropriate

ResultCode

ResultCode = 0 if

successful

ResultCode is

nonzero if

unsuccessful

Carrier(s) could be located at

any location or port located

along the path of the transfer,

if the TRANSFER command

completed unsuccessfully.

Supplier Option — The

location of the carrier(s)

associated with an

unsuccessful transfer

command must be a legal

SourcePort for a new

TRANSFER command.

7 ACTIVE Host sends ABORT

command for a specified

TRANSFER command to

SC.

ABORTING S6F11

TransferAbort-

Initiated

8 ABORTING The abort procedure for

the TRANSFER command

has completed by the

stocker and SC.

None S6F11

TransferAbort-

Completed

Carrier could be located at

any location or port located

along the path of the ACTIVE

transfer.

Supplier Option — The

location of the carrier

associated with the aborted

transfer command must be a

legal SourcePort for issuing a

new TRANSFER command.

9 ABORTING TRANSFER command

cannot be aborted.

ACTIVE S6F11

TransferAbort-

Failed

TRANSFER command could

not be aborted due to the

physical state of the

equipment. Such conditions

must be documented by the

Stocker SEM equipment

Supplier.

10 CANCELING Transport system is unable

to cancel the TRANSFER

command because the

transfer is now ACTIVE.

TRANSFER-

RING

S6F11

TransferInitiated

11 CANCELING Transport system is unable

to cancel the TRANSFER

command and it is still

queued.

QUEUED

S6F11

TransferCancel-

Failed

SEMI E88-1104

8.4 Stocker Carrier State Model

8.4.1 Stocker Carrier State Model Requirements

8.4.1.1 The purpose of the stocker carrier state model is to provide information to the host regarding carrier tracking

(the Host will not control carriers) while the carrier is in the domain of the stocker. The carrier is in the domain of

the stocker when it is in storage or transport internal to the stocker or on a stocker interface port (manual, interbay,

or intrabay). The equipment shall track each carrier in compliance with the Stocker Carrier State Model.

8.4.2 Stocker Carrier State Model

INSTALLED

WAIT IN

WAIT OUT

STORED

COMPLETED

ALTERNATE

TRANSFERRING

WAIT IN

WAIT OUT

STORED

COMPLETED

ALTERNATE

TRANSFERRING

COMPLETED

LTERNATE

Figure 5

Generic Stocker SEM Carrier State Model Diagram

8.4.3 Stocker Carrier State Definitions

8.4.3.1 INSTALLED — Carrier in stocker database.

8.4.3.2 WAIT IN (INSTALLED sub-state) — Carrier at final internal port location of the stocker. Carrier is ready to

be transferred to storage or output location and no further movement or action should be taken on this carrier prior to

transfer.

8.4.3.3 WAIT OUT (INSTALLED sub-state) — Carrier is at an Output, Buffer, or Loading Port.

8.4.3.4 TRANSFERRING (INSTALLED sub-state) — Carrier ‘moving’ between locations in the stocker. The

carrier may not be physically moving but may be on the crane (or other position) waiting for a new TRANSFER

command as the result of an anomaly condition.

8.4.3.5 STORED (INSTALLED sub-state) — Carrier is sitting at a storage location.

8.4.3.6 COMPLETED (STORED sub-state) — The carrier is stored at a shelf location as a result of completing a

transfer for which this shelf represents the destination of the transfer command.

8.4.3.7 ALTERNATE (STORED sub-state) — The carrier is temporarily stored at a shelf location. The transfer

command completion is pending until the destination and the crane become available.