semi合集-English.pdf - 第317页

SEMI E49-1104 © SEMI 1995, 2004 3 3.5 National Fire Protection Association 4 NFPA Fire Protection Guide to Hazardous Materials NFPA 704 — St andard System for the Identificati on of the Hazards of Materials for Em ergenc…

100%1 / 7923
SEMI E49-1104 © SEMI 1995, 2004 2
SEMI F20 — Specification for 316L Stainless Steel
Bar, Forgings, Extruded Shapes, Plate, and Tubing for
Components Used in General Purpose, High Purity and
Ultra-High Purity Semiconductor Manufacturing
Applications
SEMI F27 — Test Method for Moisture Interaction and
Content of Gas Distribution Systems and Components
by Atmospheric Pressure Ionization Mass Spectrometry
(APIMS)
SEMI F58 — Test Method for Determination of
Moisture Dry-Down Characteristics of Surface-
Mounted and Conventional Gas Distribution Systems
by Atmospheric Pressure Ionization Mass Spectrometry
(APIMS)
SEMI F60 — Test Method for ESCA Evaluation of
Surface Composition of Wetted Surfaces of Passivated
316L Stainless Steel Components
SEMI F63 — Guidelines for Ultrapure Water Used in
Semiconductor Processing
SEMI F70 — Test Method for Determination of
Particle Contribution of Gas Delivery System
SEMI F73 — Test Method for Scanning Electron
Microscopy (SEM) Evaluation of Wetted Surface
Condition of Stainless Steel Components
SEMI F74 — Test Method for the Performance and
Evaluation of Metal Seal Designs for Use in Gas
Delivery Systems
SEMI F78 — Practice for Gas Tungsten Arc (GTA)
Welding of Fluid Distribution Systems in
Semiconductor Manufacturing Applications
SEMI F81 — Specification for Visual Inspection and
Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid
Distribution Systems in Semiconductor Manufacturing
Applications
SEMI S2 — Environmental, Health, and Safety
Guideline for Semiconductor Manufacturing Equipment
3.2 American Society of Mechanical Engineers
1
ASME SA479 — Specification for Stainless and Heat-
Resisting Steel Bars and Shapes for Use in Boilers and
Other Pressure Vessels (ASTM A 479/A 479-90)
(Boiler and Pressure Vessel Codes, 1989)
1 American Society of Mechanical Engineers, Three Park Avenue,
New York, NY 10016-5990, USA, Telephone: 800.843.2763
(U.S./Canada), 95.800.843.2763 (Mexico), 973.882.1167 (outside
North America), Website: www.asme.org
3.3 ASTM Standards
2
ASTM A 269 — Standard Specification for Seamless
and Welded Austenitic Stainless Steel Tubing for
General Service
ASTM A 479 — Standard Specification for Stainless
and Heat-Resisting Steel Bar and Shapes for Use in
Boilers and Other Pressure Vessels
ASTM A 632 — Standard Specification for Seamless
and Welded Austenitic Stainless Steel Tubing (Small-
Diameter) for General Service
ASTM D 4327 — Standard Test Method for Anions in
Water by Chemically Suppressed Ion Chromatography
ASTM F 1373 — Test Method for Determination of
Cycle Life of Automatic Valves for Gas Distribution
System Components
ASTM F 1394 — Standard for Determination of
Particle Contribution from Gas Distribution System
Valves
ASTM F 1397 — Test Method for Determination of
Moisture Contribution for Gas Distribution System
Components
ASTM F 1400 — Test Method for Determination of
Helium Leak Rate for Gas Distribution System
Components
ASTM F 1438 — Test Method for Determination of
Surface Roughness by Scanning Tunneling Microscopy
for Ultra Pure Water Distribution Components
3.4 ISO Standards
3
ISO 14644-1 — Cleanrooms and associated controlled
environments Part 1: Classification of air cleanliness
ISO 14644-2 — Cleanrooms and associated controlled
environments Part 2: Specifications for testing and
monitoring to prove continued compliance with ISO
14644-1
ISO 14644-4 — Cleanrooms and associated controlled
environments Part 4: Design, construction, and startup
2 American Society of Testing and Materials, 100 Barr Harbor Drive,
West Conshohoken, PA 19428-2959, USA. Telephone:
610.832.9585, Fax: 610.832.9555 Website: www.astm.org
3 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland, Telephone: 41.22.749.01.11, Fax: 41.22.733.34.30,
Website: http://www.iso.ch
SEMI E49-1104 © SEMI 1995, 2004 3
3.5 National Fire Protection Association
4
NFPA Fire Protection Guide to Hazardous Materials
NFPA 704 — Standard System for the Identification of
the Hazards of Materials for Emergency Response
3.6 Military Standard
5
MIL-STD-105 — Sampling Procedures and Tables for
Inspection by Attributes
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 Abbreviations and Acronyms
4.1.1 Ar — argon
4.1.2 C
v
— valve flow coefficient
4.1.3 CVD — chemical vapor deposition
4.1.4 DSF — dead space free
4.1.5 DIW — deionized; for this document, used as
deionized water
4.1.6 ESCA — electron spectroscopy for chemical
analysis (also known as XPS)
4.1.7 FTIR — Fourier transform infrared
4.1.8 HD — high density, i.e., polymer
4.1.9 HP — high purity
4.1.10 HPM — hazardous production material
4.1.11 IEEE — Institute of Electrical and Electronics
Engineers, Inc.
4.1.12 ID/OD — inside/outside (i.e., diameter)
4.1.13 IPA — isopropyl alcohol
4.1.14 MFC — mass flow controller
4.1.15 MTBA — mean time between assists
4.1.16 MTBF — mean time between failure
4.1.17 MTTR — mean time to repair
4.1.18 PFA — perfluoroalkoxy
4.1.19 PPB — parts per billion
4.1.20 PTFE — polytetrafluoroethylene
4 National Fire Protection Association, Batterymarch Park, Quincy,
MA 02269, Telephone: 617-770-3000, Fax: 617-770-0700, Website:
www.nfpa.org
5 Military Specifications, Commanding Officer, Naval Publications,
and Forms Center, Attention: MPFC 105, 5801 Tabor Avenue,
Philadelphia, PA 19120
4.1.21 PVDF — polyvinylidene fluoride
4.1.22 QA — quality assurance
4.1.23 QC — quality control
4.1.24
R
a — roughness average (e.g., surface)
4.1.25 SMTR — Smelter’s test report
4.1.26 SPC — statistical process control
4.1.27 TEOS — tetraethylorthosilicate
4.1.28 TOC — total organic carbons
4.1.29 UHP — ultrahigh purity
4.1.30 WC — water column, inches (cm) of water
4.1.31 XPS – X-ray photoelectron spectroscopy
4.2 Definitions
4.2.1 high purity (HP) — for industry standard systems
consisting of high grade materials, components, and
standard design/configuration, assembly method, and
performance capability.
4.2.2 ultrahigh purity (UHP) — for advanced or
special systems consisting of higher grade materials and
components, with advanced or integrated design and
configuration, the latest assembly methods, and
enhanced performance capabilities, especially related to
purge or rinse time and contamination levels.
4.2.3 subassembly — an assembled unit designed to be
incorporated with other units in a finished product.
5 Impact
5.1 The impact of improved tool quality and
standardization is:
5.1.1 Reduced tool purchase price for customized
piping distribution systems, by employing standard
designs and practices for HP and UHP systems.
5.1.2 Reduced tool installation cost and cycle time.
5.1.3 Reliability, Maintainability — Improved tool up-
time, repair time, and availability will positively affect
cost of ownership. Primary improvement is in system
MTBF and MTTR.
5.1.4 Sub-Assembly Contamination Control — Cost of
ownership will also be improved by lower long-term
contamination levels in the process chamber or bath,
resulting in wafer defect reductions and/or yield
improvement. Long-term flow accuracy for mass flow
controllers (MFC’s) will also be improved for better
wafer level uniformity.
SEMI E49-1104 © SEMI 1995, 2004 4
5.1.5 Final Assembly Contamination Control — Will
result in reduced possibility of cleanroom
contamination upon tool delivery, and avoid time delay
of tool cleaning at wafer fab site.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction
of the contents in whole or in part is forbidden without express
written consent of SEMI.