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SEMI E54.3-0698 © SEMI 1998, 2004 13 Table 16 Gas Calibration Data Value Matrix Data Value Name Data Index A ccess Networ k Required Form All 0 — No Zero 1 RW No REAL Span 2 RW No REAL Calibration Date 3 R No Date Calibr…

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SEMI E54.3-0698 © SEMI 1998, 2004 12
Table 15 Get Calibration Data Value Service Parameter Definitions
Parameter
Request/
Indication
Response/
Confirmation
Data Type
Description
Gas Standard Number M — INT -1 = current programmed gas calibration
0 = use gas standard symbol field
n = gas standard number
Gas Standard Symbol M — Text String null character = not specified
text string = gas standard symbol
Full Scale Range M — REAL 0 = not specified
n = full scale range
Units M — UINT Indication of the units associated with the full scale range.
Data Index M — Byte The identifier of the particular gas calibration datum within
the list of data values.
Size of List — M Byte This parameter specifies the number of values returned in
the list.
Zero — C REAL zero offset
Span — C REAL span multiplier
Calibration Date — C Date The date of calibration for a particular gas type and full
scale range.
Calibration Gas Standard
Number
— C UINT The gas standard number representing the gas used to
calibrate the device.
Calibration Temperature — C REAL The standard temperature of calibration conditions.
Calibration Pressure — C REAL The standard pressure of the calibration conditions.
Manufacturer-Specified
Parameters
— C Manufacturer-
Specific
8.4.2.8.1 Gas Standard Number — This parameter is used to specify a gas standard number for which a gas cali-
bration data value is being requested. Two special values are allowed: A value of “0” indicates that the following
parameter “gas standard symbol” is used instead to reference the gas type. A value of “-1” indicates that the current
programmed gas calibration is requested.
8.4.2.8.2 Gas Standard Symbol — This parameter is used to specify a gas standard symbol for which a gas
calibration data value is being requested. If the gas standard number parameter has a value that is not “0,” then this
parameter is set to the null character.
8.4.2.8.3 Full Scale Range — This parameter is used to specify the full scale range for which a gas calibration data
value is being requested. If the gas standard number parameter has a value that is “-1,” then this parameter is set to
zero.
8.4.2.8.4 Units — This parameter specifies the units associated with the full scale range parameter. Its values are
defined in Section 8.4.2.4. If the gas standard number parameter has a value that is “-1,” then this parameter is set to
0.
8.4.2.8.5 Data Index — This parameter is used to specify the index of the value being requested. It is an enumerated
byte that can take on the values listed in the following table:
SEMI E54.3-0698 © SEMI 1998, 2004 13
Table 16 Gas Calibration Data Value Matrix
Data Value Name Data Index
A
ccess Networ
k
Required Form
All 0 — No
Zero 1 RW No REAL
Span 2 RW No REAL
Calibration Date 3 R No Date
Calibration Gas Standard Number 4 R No UINT
Calibration Temperature 5 R No REAL
Calibration Pressure 6 R No REAL
Reserved 7–63 — —
Manufacturer-Specified 64–255 — —
Table 17 Gas Calibration Data Initial and Default Values
Data Value Name Data Index Initial Value Default Value Comment
Zero 1 LVV 0
Span 2 LVV 1
Calibration Date 3 LVV 0, 0, 0
Calibration Gas Standard Number 4 LVV Manufacturer-Specific
Calibration Temperature 5 LVV 0.0 Defined by SEMI E12 as 0.0°C. Other
industries may specify a different value.
Calibration Pressure 6 LVV 101.32 Defined by SEMI E12 as 101.32 kPa. Other
industries may specify a different value.
Reserved 7–63 — —
Manufacturer-Specified 64–255 — —
8.4.2.8.5.1 All — This value for the data index parameter requests the list of all data values associated with a gas
calibration. The returned parameter values are ordered by index as defined in Table 15. The size of the list returned
is manufacturer-specified, since it includes the Manufacturer-Specific values.
8.4.2.8.5.2 Size of List — This parameter is used to specify the number of parameters returned in the response list.
8.4.2.8.5.3 Zero — This value is used in conjunction with the span value to correct the flow measurement. It is
expressed in terms of the units parameter.
8.4.2.8.5.4 Span — This value is used in conjunction with the zero value to correct the flow measurement. It is a
dimensionless value.
8.4.2.8.5.5 Calibration Date — This value identifies the date the device was last calibrated for the specified gas
type and full scale range.
8.4.2.8.5.6 Calibration Gas Standard Number — This value identifies the gas type used when the device was cali-
brated for the referenced gas type and full scale range. It may be the same gas as gas type, a surrogate gas, nitrogen,
or some other gas.
8.4.2.8.5.7 Calibration Temperature — This value identifies the Standard Temperature with respect to calibration
conditions. The units for this value are degrees Centigrade.
8.4.2.8.5.8 Calibration Pressure — This value identifies the Standard Pressure with respect to calibration
conditions. The units for this value are KiloPascal.
8.4.2.9 Set Gas Calibration Data Value Service (Optional) — This service is used to set the values associated with
a gas calibration. The mechanism for referencing a data value involves specifying the gas type and full scale range
(a default is provided to specify the programmed gas calibration currently in use by the device), followed by an
index value which is used to specify the particular data value associated with the referenced gas calibration that is
SEMI E54.3-0698 © SEMI 1998, 2004 14
being set. The specific value to be set is the last parameter passed in the service request. The following table
describes the parameters specified for this service:
Table 18 Set Calibration Data Value Service Parameter Definitions
Parameter
Request/
Indication
Response/
Confirmation
Data Type
Description
Gas Standard Number M — INT -1 = current programmed gas calibration
0 = use gas standard symbol field
n = gas standard number
Gas Standard Symbol M — Text String null character = not specified
text string = gas standard symbol
Full Scale Range M — REAL 0 = not specified
n = full scale range
Units M — UINT Indication of the units associated with the full scale range.
Data Index M — Byte The identifier of the particular gas calibration datum within the
list of data values.
Size of List M — Byte This parameter specifies the number of values in the list that
follows.
Zero C — REAL zero offset
Span C — REAL span multiplier
Calibration Date C — Date The date of calibration for a particular gas type and full scale
range.
Calibration Gas Standard
Number
C — UINT The gas standard number representing the gas used to calibrate
the device.
Calibration Temperature C — REAL The standard temperature of calibration conditions.
Calibration Pressure C — REAL The standard pressure of the calibration conditions.
Manufacturer-Specified
Parameters
C — Manufacture
r-Specific
For a description of these parameters, see the preceding section.
8.4.2.10 Autorange Service (Optional) — This service is used to instruct the Sensor-AI-MF object instance to enter
the AUTORANGING state from the NOT AUTORANGING state or to enter the NOT AUTORANGING state from
the AUTORANGING state. The following table describes the parameters specified for this service:
Table 19 Autorange Service Parameter Definitions
Parameter
Request/
Indication
Response/
Confirmation
Data Type
Description
Command M — Byte Enumerated Byte:
0 = enter NOT AUTORANGING state
1 = enter AUTORANGING state
2–63 = Reserved
64–255 = Manufacturer-Specified
8.4.3 Sensor-AI-MF Object Behavior — The behavior exhibited by the Sensor-AI-MF object instance is inherited
from the Sensor-AI object defined in SEMI E54.1. Additional specific behavior associated with the Sensor-AI-MF
object is defined below.
8.4.3.1 Sensor-AI-MF OPERATING Application Process — A reading is retrieved from a physical flow sensor.
This reading may be corrected with a manufacturer-specified algorithm. This corrected reading becomes the input to
the offset and gain formula to generate the value attribute as referenced in SEMI E54.1.
8.4.3.1.1 For Gas Correction, the value retrieved is corrected with a manufacturer-specified algorithm using the
correction values, parameters, coefficients, or methods for the programmed gas calibration.