semi合集-English.pdf - 第1260页

SEMI E5-1104 © SEMI 1982, 2004 202 Stream,Function Name (Mnemonic) Direction S15,F12 Recipe Version Data M,H< ->E Description This message contains the r ecommended version. Structure L,3 1. <AGENT> 2. <RC…

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SEMI E5-1104 © SEMI 1982, 2004 201
Stream,Function Name (Mnemonic) Direction
S15,F10 Recipe Status Data M,H<->E
Description
This message contains the protected status of the recipe and the next available version number for that recipe class and name.
Structure
L,3
1. <RCPSTAT>
2. <RCPVERS>
3. L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
RCPVERS is a zero-length item if and only if the recipe does not exist. p = 0 if and only if RMACK indicates no errors.
Stream,Function Name (Mnemonic) Direction
S15,F11 Recipe Version Request S,H<->E,reply
Description
This message is used to request the best version of a recipe for the specified agent.
Structure
L,4
1. <RMNSSPEC>
2. <RCPCLASS>
3. <RCPNAME>
4. <AGENT>
Exception
If item 2 is zero length, the recipe class PROCESS is indicated. If item 4 is a zero-length item, no agent is specified.
SEMI E5-1104 © SEMI 1982, 2004 202
Stream,Function Name (Mnemonic) Direction
S15,F12 Recipe Version Data M,H<->E
Description
This message contains the recommended version.
Structure
L,3
1. <AGENT>
2. <RCPVERS>
3. L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
If AGENT is a zero-length item in the request, it shall also be a zero-length item in the reply. If it is not zero-length in the
request, and it is of zero-length in the reply, then no qualifying recipe was found specific to that equipment. p = 0 if and only if
RMACK indicates no errors.
Stream,Function Name (Mnemonic) Direction
S15,F13 Recipe Create Request M,H<->E,reply
Description
This message is used to create or modify a recipe body. If multi-block, it shall be preceded by the S15,F1/F2 inquire/grant
transaction.
Structure
L,5
1. <DATAID>
2. <RCPUPDT>
3. <RCPSPEC>
4. L,m
1. L,2
1. <RCPATTRID
1
>
2. <RCPATTRDATA
1
>
.
.
m. L,2
1. <RCPATTRID
m
>
2. <RCPATTRDATA
m
>
5. <RCPBODY>
Exception
RCPBODY may be of zero length.
SEMI E5-1104 © SEMI 1982, 2004 203
Stream,Function Name (Mnemonic) Direction
S15,F14 Recipe Create Acknowledge M,H<->E
Description
This message is used to acknowledge that a recipe has been created or updated with the body sent in the request.
Structure
L,2
1. <RMACK>
2. L,2
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
p = 0 if and only if RMACK indicates no errors.