semi合集-English.pdf - 第4950页
SEMI M11-0704 © SEMI 1988, 2004 7 Figure 5 Epitaxial Stacking Fault showing four side s and a deep depression on on side of about 20 nm. Atomic Force Microscope Image. Appr oximate SSIS scattering event size, 0.30 µm.
SEMI M11-0704 © SEMI 1988, 2004 6
Figure 4
Epitaxial Stacking Fault. Atomic Force Microscope (AFM) Image. Approximate SSIS scattering event size
0.12 µm.
SEMI M11-0704 © SEMI 1988, 2004 7
Figure 5
Epitaxial Stacking Fault showing four sides and a deep depression on on side of about 20 nm. Atomic Force
Microscope Image. Approximate SSIS scattering event size, 0.30 µm.
SEMI M11-0704 © SEMI 1988, 2004 8
Figure 6
Double Epi taxial Stacking Fault. Atomic Force Microscope image. Approximate SSIS event scattering size
1.05 µm