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SEMI E87-0705 © SEMI 1999, 2005 31 Parameter Name Form Description CMAcknowledge Enumerated:  Acknowledge, comma nd has been performed  Invalid command  Cannot perform now  Invalid data or argument  Acknowledge, req…

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SEMI E87-0705 © SEMI 1999, 2005 30
Service Name Type Description
CancelReservationAtPort R This service shall cause the equipment to remove the reservation at the specified Port and to
deactivate the visible signal.
CarrierIn R This service shall cause a carrier to be moved from a load port to an internal buffer location.
Used in anomaly situations.
CarrierNotification R This service shall cause the equipment to instantiate a carrier object.
CarrierOut R This service shall cause a carrier to be moved from the internal buffer to a load port. This
service can be queued by the production equipment.
CarrierReCreate R This service shall cause the carrier object (and consequently, associated state models of the
object) specified by the service to be recreated. This service shall be accepted only if the
load port is in the “Ready to Unload” state.
CarrierRelease R Release the carrier from Carrier Hold
CarrierTagReadData R Read data from carrier ID tag.
CarrierTagWriteData R Write data to the carrier ID tag.
ChangeAccess R This service shall change the access mode of the specified Ports at the production
equipment. If the equipment is unable to change one or more of the specified port(s) to the
specified Access Mode, then the equipment shall accept the command (with appropriate
response acknowledgement), and shall change only the Access Mode of those Port(s)
allowed by the equipment, supplying host with an indication that not all ports were
successfully changed.
ChangeServiceStatus R This service shall change the transfer status of a specified load port at the production
equipment.
ProceedWithCarrier R This service shall instruct the production equipment to proceed with using the specified
carrier.
ReserveAtPort R This service shall cause the equipment to reserve the specified Port and activate a visible
signal. This service is a Transfer boundary.
16.3 Service Message Parameter Definition
16.3.1 The following is a list of required parameters used in conjunction with service messages.
Table 16 Service Message Parameter Definition
Parameter Name Form Description
AccessMode Enumerated
AUTO,
MANUAL.
The desired access mode of the ports specified.
AttributeData Could be several different data types. The data value associated with AttributeID.
AttributeID Text
1 to 40 characters.
Identifier of the object attribute in the PropertiesList.
CarrierID Text
Conforms to ObjID as defined in SEMI E39.
Identifier of a carrier.
SEMI E87-0705 © SEMI 1999, 2005 31
Parameter Name Form Description
CMAcknowledge Enumerated:
Acknowledge, command has been
performed
Invalid command
Cannot perform now
Invalid data or argument
Acknowledge, request will be performed
with completion signaled later by an event
Rejected, invalid state
Acknowledgement of request.
Some services are commanding a certain task to be
performed. This task is only completed if the
expected end-condition is reached or has failed. A
number of services only have effect on a ‘logical’
level (e.g. Bind, CancelReservationAtPort). Those
services in general can be acknowledged right away
after having performed the task. Other services that
include triggering of physical movements (e.g.
CarrierOut, CancelCarrier) most likely will be
interpreted as “request action to be initiated” rather
than “do action”. The equipment will reply in those
cases the command “is going to be performed”. This
alleviates transaction timeouts for these services that
may take a long time to perform. It is however up to
the supplier to decide if this is applicable. The
completion of the task initiated by the services
commanding some task to be performed (either
acknowledged or going to be performed) must result
in either a state transition or other action that
generates a collection event upon normal / abnormal
completion.
CMStatus A structure consisting of CMAcknowledge and
Status.
Return information for a service.
Data Text. User data.
DataSeg Protocol-specific. Indicates specific section of data to read or write.
DataSize Unsigned integer. Indicates the number of bytes of data to read or write.
SEMI E87-0705 © SEMI 1999, 2005 32
Parameter Name Form Description
ErrorCode Enumerated:
Valid for all services listed below
Unsupported option [service] requested
Command not valid for current state
Insufficient parameters specified
Parameters improperly specified
Bind
Load port does not exist
Load port already in use
Object identifier in use, Duplicate CarrierID
Invalid attribute value
Unknown attribute name
CancelAllCarrierOut
(none)
CancelBind
Load port does not exist
Unknown object instance – Unknown CarrierID
CancelCarrier
Load port does not exist
Unknown object instance – Unknown CarrierID
Missing Carrier
CancelCarrierAtPort
Load port does not exist
CancelCarrierNotification
Unknown object instance – Unknown CarrierID
CancelCarrierOut
Unknown object instance – Unknown CarrierID
CancelReservationAtPort
Load port does not exist
CarrierIn
Unknown object instance – Unknown CarrierID
CarrierNotification
Object identifier in use, Duplicate CarrierID
Invalid attribute value
Unknown attribute name
CarrierOut
Load port does not exist
Unknown object instance – Unknown CarrierID
CarrierReCreate
Unknown object instance – Unkown CarrierID
Invalid attribute value
Unknown attribute name
Command not valid for current state
ChangeAccess
Load port does not exist
ChangeServiceStatus
Load port does not exist
ProceedWithCarrier
Load port does not exist
Unknown object instance – Unknown CarrierID
Invalid attribute value
Unknown attribute name
ReserveAtPort
Load port does not exist
Load port already in use
Contains the code for the specific error found.
ErrorText Text Text in support of the error code.