semi合集-English.pdf - 第3326页

SEMI E130-1104 © SEMI 2003, 2004 40 R1-1.3.1.1 0.3 Load PJ02 Substrate 3. See Section R1-1.1.2.8 R1-1.3.1.1 0.4 Process Material. See Section R1-1.1.2.3 R1-1.3.1.1 0.5 Unload PJ02 Substrate 3. See Section R1-1.1.2.9 R1-1…

SEMI E130-1104 © SEMI 2003, 2004 39

R1-1.3.1.8 Stop PJ1

Host Prober

PRJobCommand.req (PRCmdName=STOP)()

Return PJ01 Substrate 3 to FOUP()

Unload substrate from chuck()

PS: AWAITING COMMAND to HANDLING MATERIAL()

Move PJ02 Substrate 1 to Pre-align()

Load substrate on Chuck()

PJ01: PROCESSING to STOPPING()

SubstPJ01.02: PROCESSING to STOPPED()

SubstPJ01.03: AT WORK to AT SOURCE()

SubstPJ01.02: AT WORK to AT DESTINATION()

Move next substrate to Pre-align()

Align and Profile()

PJ01: STOPPING to Terminal()

PJ02: POOLED to SETTING UP()

PJ02: SETTING UP to PROCESSING()

PS: HANDLING MATERIAL to AWAITING COMMAND()

Figure R1-15

Stop PJ01 Scenario

R1-1.3.1.9 Post Conditions

R1-1.3.1.9.1 State Models

Table R1-2 Object States After PJ01 Stopped

Object Reference Description States Occupied

PS Process State model AWAITING COMMAND

CJ1 Control Job 1 EXECUTING

PJ01 Process Job 1 Terminal (non existent)

PJ02 Process Job 2 PROCESSING

SubstPJ01.01 PJ1 Substrate 1 AT DESTINATION; PROCESSED

SubstPJ01.02 PJ1 Substrate 2 AT DESTINATION; STOPPED

SubstPJ01.03 PJ1 Substrate 3 AT SOURCE; NEEDS PROCESSING

SubstPJ02.01 PJ2 Substrate 1 AT WORK; IN PROCESS

SubstPJ02.02 PJ2 Substrate 2 AT WORK; NEEDS PROCESSING

SubstPJ02.03 PJ2 Substrate 3 AT SOURCE; NEEDS PROCESSING

R1-1.3.1.10 Post Processing — The following sequence would be followed to complete the job:

R1-1.3.1.10.1 Load PJ02 Substrate 2. See Section R1-1.1.2.7

R1-1.3.1.10.2 Process Material. See Section R1-1.1.2.3

SEMI E130-1104 © SEMI 2003, 2004 40

R1-1.3.1.10.3 Load PJ02 Substrate 3. See Section R1-1.1.2.8

R1-1.3.1.10.4 Process Material. See Section R1-1.1.2.3

R1-1.3.1.10.5 Unload PJ02 Substrate 3. See Section R1-1.1.2.9

R1-1.4 Scenario IV – Alarm Condition Causes a Process State Model Transition to the PROCESSING BLOCKED

State — The purpose of this scenario is to demonstrate the behavior of prober when an alarm condition occurs that

causes the processing resource to become unavailable. The Process State model transitions to the PROCESSING

BLOCKED state. The condition does not cause a corresponding transition to the PAUSING state within an

executing Process Job or a transition to the PAUSED state within the active Control Job.

PROCESS

EXECUTING

PROCESSING

BLOCKED

SUBSTRATE

LOADED

IDLE

SETTING UP

AWAITING COMMAND

HANDLING MATERIAL

SERVICE TASK

MOVING XYZ

AWAITING LOAD

IDLE WITH ALARMS

PROCESSING ACTIVE

Host Prober

Alarm Notification

PS: MOVINGXYZ to PROCESSING BLOCKED()

MOVE-ABS()

PS: AWAITING COMMAND to MOVING XYZ()

Internal Error Occurs()

User

Notify User()

Bring Up Prober User Interface()

Guide User Through Recover Process

User Determines Maintenance Required

Abort Job(s)

CJAbort

{OR}

{If User issues Abort request through the host, the host sends the CJAbort to the equipment}

Abort PJ

PJ01: PROCESSING to ABORTING()

PS: PROCESSING BLOCKED to HANDLING MATERIAL()

Remove Substrates

PJ01: ABORTING to Terminal

CJ1: EXECUTING to COMPLETED()

PS: HANDLING MATERIAL to IDLE WITH ALARMS()

PROCESS

EXECUTING

PROCESSING

BLOCKED

SUBSTRATE

LOADED

IDLE

SETTING UP

AWAITING COMMAND

HANDLING MATERIAL

SERVICE TASK

MOVING XYZ

AWAITING LOAD

IDLE WITH ALARMS

PROCESSING ACTIVE

PROCESS

EXECUTING

PROCESSING

BLOCKED

SUBSTRATE

LOADED

IDLE

SETTING UP

AWAITING COMMAND

HANDLING MATERIAL

SERVICE TASK

MOVING XYZ

AWAITING LOAD

IDLE WITH ALARMS

PROCESSING ACTIVE

PROCESS

EXECUTING

PROCESSING

BLOCKED

SUBSTRATE

LOADED

IDLE

SETTING UP

AWAITING COMMAND

HANDLING MATERIAL

SERVICE TASK

MOVING XYZ

AWAITING LOAD

IDLE WITH ALARMS

PROCESSING ACTIVE

Figure R1-16

Prober Alarm Scenario

R1-1.5 Scenario V – Processing Material using Control Maps — Control maps can be used for identifying the sites

to be probed per substrate. The specification for the download of maps is outside the scope of this specification.

The format of the maps is user defined.

R1-1.5.1 Example Settings — For the sake of demonstration, the control map pertaining to the substrate in this

example is communicated using the SEMI G85 map format. The recipe parameter “USE CONTROL MAP” is set to

true.

Site Selection List

Die Number Row Col

1 16 3

2 16 4

3 16 5

4 16 6

123456789101112131415161718

Legend:

Location specified in Control Map

Location Probed - Passed

Location Probed - Failed

?xml version="1.0"?>

Map xmlns:semi="http://www.semi.org"

WaferId="39211USEC4"

FormatRevision="G85-1101">

<Device

ProductId="Example300"

ProductCode="xx"

LotId="1234567890"

Orientation="0"

WaferSize="300"

DeviceSizeX="15968.77"

DeviceSizeY="15968.77"

StepSizeX="15968.77"

StepSizeY="15968.77"

Rows="18"

Columns="18"

SupplierName="xx"

OriginLocation="3"

CreateDate="2002100815124800"

Status="70"

BinType="Decimal"

NullBin="2">

</Data>

</Device>

/Map>

Figure R1-17

Control Map Usage Example Settings