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SEMI E88-1104 E © SEMI 1999, 2004 6 stocker crane, conveyor, ID reader, et c.), it may be possible to co ntinue ON-LINE oper ation when the oper ation mode of som e stocker compone nts (as viewed by the SC) is a manual s…

SEMI E88-1104

6.13 Transfer Completed Port

LP2

LP1

PGV, AGV, OHV Accessible

Stocker Crane Accessible

Stocker Inside

Stocker Outside

Stocker Crane Accessible

Stocker Inside

Stocker Outside

PGV, AGV, OHV Accessible

OP - ouput port

BP - buffer port

LP1 - loading port 1

LP2 - loading port 2

OP - ouput port

BP - buffer port

LP - loading port

Case 3

Case 2

Case 1

Case 3

Case 2

Case 1

Figure 2

Output Shuttle Examples: L-Shaped Shuttle on Left, I-Shaped Shuttle on Right

6.13.1 The Transfer Completed Port is always the LoadingPort (LP) specified in the transfer command. If the end

user desires that the Host issue a transfer to the TSC prior to the carrier arriving at the LP, the states defined in the

Stocker Carrier State Model may be utilized.

7 Communication Requirements

7.1 It is required that any Stocker SEM compliant equipment follow the Communications State Model in SEMI

E30. In addition, Stocker SEM compliant equipment shall support either SEMI E37 and SEMI E37.1 or SEMI E4.

8 State Models

8.1 State Model Requirements

8.1.1 The state models included in this standard are a requirement for Stocker SEM equipment. This standard

requires implementation of all SEMI E30 state models (such as control, communication, on-line/off-line, etc.

according to the GEM capabilities required per Section 13). A state model consists of a state model diagram, state

definitions, and a state transition table. All state transitions in this standard, unless otherwise specified, shall

correspond to collection events.

8.1.2 A state model is the host’s view of the equipment, and does not necessarily describe the internal equipment

operation. All Stocker SEM state model transitions shall be mapped into the appropriate internal equipment events

that satisfy the requirements of those transitions. In certain implementations, the equipment may enter a state and

have already satisfied all of the conditions required by the Stocker SEM state model for transition to another state.

The equipment makes the required transition without any additional actions in this situation.

8.1.3 Some equipment may need to include additional substates other than those in this standard. Additional

substates may be added, but shall not change the Stocker SEM defined state transitions. All expected transitions

between Stocker SEM states shall occur.

8.2 SC State Model

8.2.1 SC State Model Requirements

8.2.1.1 The purpose of the SC state model is to provide information to the host regarding the overall status of the

stocker system. The SC state model is valid when the SEMI E30 (GEM) state is ON-LINE. The SC state model is

not valid when the SEMI E30 (GEM) state is OFF-LINE. Since a stocker may consist of many components (e.g.,

SEMI E88-1104

stocker crane, conveyor, ID reader, etc.), it may be possible to continue ON-LINE operation when the operation

mode of some stocker components (as viewed by the SC) is a manual state. The details of what happens when

individual components of the stocker enter a manual state are specific to the Stocker SEM equipment supplier.

When the SEMI E30 Control state changes from OFF-LINE to ON-LINE, the SC State Model is started from the SC

INIT state.

8.2.2 SC State Model

PAUSED

PAUSING

AUTO

ALARMS

NO ALARMS

SC INIT

8 7

AVAILABILITY

SYSTEM

Figure 3

Generic Stocker SEM SC State Model Diagram

8.2.3 SC State Definitions

8.2.3.1 SC INIT — SC initialization of stocker components is occurring. This is a non-operational state. No

commands from the host will be acknowledged, queued or processed. The system will not move out of this state if

there are carriers moving on any of the stocker units controlled by the SC. Such devices must be manually or

automatically recovered before transitioning to the next state.

8.2.3.2 PAUSING — A system PAUSE command has been received and is being processed. All carriers that are

currently moving will continue until their physical movement stops (their transfer command may still be active).

Carriers that are currently moving may continue to move but they must not begin another movement. TRANSFER

commands are accepted and queued. All status requests will be processed. The RESUME, INSTALL, REMOVE,

and LOCATE commands will also be processed.

8.2.3.3 PAUSED — No carriers are in the process of moving on any of the stocker units controlled by the SC.

Carriers may be at any port position including the OP, BP, and LP positions. TRANSFER commands are accepted

and queued. All status requests will be processed. The RESUME, INSTALL, REMOVE, and LOCATE commands

will also be processed.

8.2.3.4 AUTO — Stocker is in the normal operational state. Commands are actively processed.

8.2.3.5 NO ALARMS — There are no alarms present in the system.

8.2.3.6 ALARMS — There are one or more alarms present in the system.

SEMI E88-1104

8.2.4 SC State Transition Table

Table 1 SC State Transition Table

Transition

Previous State Trigger New State Actions Comments

1 none SC Initiation. SC INIT S6F11

SCAutoInitiated

System runs through its startup

sequence.

2 SC INIT System started up

successfully. All carrier

movement stopped.

PAUSED S6F11

SCPaused

System ready.

3 PAUSED RESUME command. AUTO S6F11

SCAutoCompleted

System can now execute

remote commands based upon

other internal conditions

(Alarm, GEM ONLINE, etc).

4 AUTO PAUSE command. PAUSING S6F11

SCPauseInitiated

Carriers that are not moving

remain there. Carriers that are

moving must stop at the next

logical stopping point.

5 PAUSING RESUME command. AUTO S6F11

SCAutoCompleted

System can now execute

remote commands based upon

other internal conditions

(Alarm, GEM ONLINE, etc).

6 PAUSING All carrier movement has

completed.

PAUSED S6F11

SCPauseCompleted

System will accept and queue

new commands but will not

execute them.

No new movement will occur.

Outstanding Transfer

Commands will remain NOT

ACTIVE.

7 NO ALARMS Alarm Set. ALARMS S6F11

AlarmSet

8 ALARMS All Alarms cleared. NO

ALARMS

S6F11

AlarmCleared

9 ALARMS Alarm Set. ALARMS S6F11

AlarmSet

Alarm occurs when there is

already an outstanding alarm.

8.3 TRANSFER Command State Model

8.3.1 TRANSFER Command State Model Requirements

8.3.1.1 The TRANSFER command state model serves as the SEMI E30 Processing State Model. The purpose of the

TRANSFER command state model is to provide information to the host regarding the control of the TRANSFER

command. The TRANSFER command allows the host to manage carrier movement and scheduling. The control of

each TRANSFER command must independently support the TRANSFER command state model.

8.3.2 TRANSFER Command State Model Diagram

8.3.2.1 The TRANSFER command state model is detailed for Stocker SEM equipment in Figure 4.

8.3.3 TRANSFER Command State Definitions

8.3.3.1 QUEUED — SC has acknowledged and queued the TRANSFER command. TRANSFER command has not

been initiated.

8.3.3.2 ACTIVE — The carrier is involved in the physical aspect of the TRANSFER command. It is denoted by the

time spanned by command initiation to command completion.

8.3.3.3 TRANSFERRING (ACTIVE sub-state) — The transfer command is actively being executed by the stocker.