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SEMI E88-1104 E © SEMI 1999, 2004 50 13.2.5 Host Initiated ABORT of a TRANSFER Command 13.2.5.1 The Host wishes to abort a pr eviously issued tran sfer command. The assum ption is that the carrier is currently in the ALT…

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© SEMI 1999, 2004 49
STEP COMMENTS HOST SC COMMENTS
12.
S6,F11
Event Report Send (ERS)
CraneIdle
13. Event Report Acknowledge (ERA)
S6,F12
14.
S6,F11
Event Report Send (ERS)
CarrierWaitOut
· CarrierID =
“UNKNOWNSTK001”
· CarrierLoc = “LP1”
· PortType = “LP”
· CarrierZoneName
15. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
16.
S6,F11
Event Report Send (ERS)
IDReadError
· CarrierID =
“UNKNOWNSTK001”
· CarrierLoc
· IDReadStatus = 1
17. Event Report Acknowledge (ERA)
S6,F12
18. Carrier leaves the domain of
the stocker as it is acquired
by a person(PGV)
S6,F11
Event Report Send (ERS)
CarrierRemoved
· CarrierID
· HandoffType = MANUAL
19. Event Report Acknowledge (ERA)
S6,F12
20.
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
21. Event Report Acknowledge (ERA)
S6,F12
13.2.4 Host Initiated CANCEL of a TRANSFER Command
13.2.4.1 The Host wishes to cancel a previously issued transfer command. The assumption is that the carrier is
currently sitting on a stocker shelf and has not been picked up by the stocker crane.
STEP COMMENTS HOST SC COMMENTS
1. Assumption is that a TRANSFER
command(CommandID = 111111) is
in the QUEUED state.
2. Host Command Send (HCS)
CANCEL
· CARRIERID = “111111”
S2,F41
3.
S2,F42
Host Command Acknowledge (HCA)
4.
S6,F11
Event Report Send (ERS)
TransferCancelInitiated
· CommandID = “111111”
· CarrierID = “123456”
· CarrierLoc = “STORAGE”
· CarrierZoneName
5. Event Report Acknowledge (ERA)
S6,F12
6.
S6,F11
Event Report Send (ERS)
TransferCancelCompleted
· CommandID = “111111”
· CarrierID = “123456”
· CarrierLoc = “STORAGE”
· CarrierZoneName
7. Event Report Acknowledge (ERA)
S6,F12
8. Event Report Acknowledge (ERA)
S6,F12
SEMI E88-1104
E
© SEMI 1999, 2004 50
13.2.5 Host Initiated ABORT of a TRANSFER Command
13.2.5.1 The Host wishes to abort a previously issued transfer command. The assumption is that the carrier is
currently in the ALTERNATE substate of STORED.
STEP COMMENTS HOST SC COMMENTS
1. Assumption is that a TRANSFER
command (CommandID = 111111)
is in the ACTIVE state.
2. Host Command Send (HCS)
ABORT
· COMMANDID = “111111”
S2,F41
3.
S2,F42
Host Command Acknowledge (HCA)
4. The stocker must abort the
transfer command if the carrier
was in the ALTERNATE sub-state.
Other INSTALL stocker carrier
states may cause ABORT command
rejection. The latter scenario
is supplier specific.
5.
S6,F11
Event Report Send (ERS)
TransferAbortInitiated
· CommandID = “111111”
· CarrierID = “123456”
· CarrierLoc = “STOCKER
CRANE”
· CarrierZoneName
6.
Event Report Acknowledge (ERA)
S6,F12
7.
S6,F11
Event Report Send (ERS)
TransferAbortCompleted
· CommandID = “111111”
· CarrierID = “123456”
· CarrierLoc = “STOCKER
CRANE”
· CarrierZoneName
8. Event Report Acknowledge (ERA)
S6,F12
9. Event Report Acknowledge (ERA)
S6,F12
10. Two options may be available
for recovery:
1. Manual Recovery
2. Host Initiated Recovery
The host would have to issue a
TRANSFER command to dis
p
ose of
the carrier on the stocker
crane end-effector for the
crane to be utilized for
future transfers.
This is a Supplier Option
13.2.6 Connection or Reconnection between SC and Host
13.2.6.1 The Host System crashes (or loses communication with the SC for a time exceeding all time-outs and
retries) and must re-synchronize with the SC with the possibility of several events completing while the
communication link was lost.
STEP COMMENTS HOST SC COMMENTS
1. Communication session between
host and SC (re)established.
Host establishes communication
with the SC per the GEM
standard scenario (e.
g
., S1F13,
etc).
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© SEMI 1999, 2004 51
STEP COMMENTS HOST SC COMMENTS
2. Host Command Send (HCS)
PAUSE
S2,F41
3.
S2,F42
Host Command Acknowledge (HCA)
4.
S6,F11
Event Report Send (ERS)
SCPauseInitiated
5. Event Report Acknowledge (ERA)
S6,F12
6.
S6,F11
Event Report Send (ERS)
SCPauseCompleted
7.
S6,F12
8. Selected Equipment Status
Request (SSR)
ActiveCarriers
ActiveZones
ActiveTransfers
S1,F3
HOST asks for carrier, zone and
transfer command information
9.
S1,F4
Selected Equipment Status Data
(SSD)
· ActiveCarriers
.
. (one CarrierInfo for each
carrier)
.
· ActiveZones
.
. (one ZoneData for each
zone)
.
· ActiveTransfers
.
. (one TransferCommand for
each
. Active TRANSFER command)
10. The HOST updates its model of
the s
y
stem with the information
from the status data.
11. Host Command Send (HCS)
RESUME
S2,F41
HOST enables the system to
continue operations.
12.
S2,F42
Host Command Acknowledge (HCA)
13.
S6,F11
Event Report Send (ERS)
SCAutoInitiated
14. Event Report Acknowledge (ERA)
S6,F12
15.
S6,F11
Event Report Send (ERS)
SCAutoCompleted
16.
Event Report Acknowledge (ERA)
S6,F12
17. S
y
stem continues
p
rocessin
g
all
commands that were in process
or queued before/during the
Host crash or communication
loss/initialization. System
will also now process new
commands.
14 GEM Capabilities
14.1 The purpose of this section is to specify any
SEMI E30 additional capabilities that are required to be
supported by this class of equipment.
14.2 Requirement
14.2.1 This standard requires that the SEMI E30
fundamental requirements and additional capabilities
have been implemented on the Stocker SEM equipment
with the exception of Trace Data Collection, Process
Program Management, Remote Control, Limits
Monitoring and Spooling. If these capabilities are
implemented, they will be implemented as required by
the SEMI E30 document. The Stocker SEM Transfer
Command State Model serves as the SEMI E30
Processing State Model. The SEMI E30 additional
capabilities required by Stocker SEM are:
Establish Communications,